分子印迹型薄膜体声波谐振毒品检测传感器

陈剑鸣; 吕启蒙; 吴光敏; 楚合群; John D Mai

doi:10.3788/OPE.20132109.2272

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分子印迹型薄膜体声波谐振毒品检测传感器

微纳技术与精密机械 | 更新时间：2020-08-12

- 分子印迹型薄膜体声波谐振毒品检测传感器
- Molecularly imprinted sensor integrated with thin-film bulk acoustic resonator for drug detection
- 光学精密工程 2013年21卷第9期页码：2272-2278
- 作者机构：
  
  昆明理工大学2. 香港城市大学
- 作者简介：
- 基金信息：
  
  昆明理工大学MEMS学科建设基金()
- DOI：10.3788/OPE.20132109.2272
  中图分类号： TN409;TP212
- 收稿日期：2013-04-19，
  
  修回日期：2013-06-17，
  
  网络出版日期：2013-09-30，
  
  纸质出版日期：2013-09-15
- 稿件说明：
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陈剑鸣吕启蒙吴光敏楚合群 John D Mai. 分子印迹型薄膜体声波谐振毒品检测传感器[J]. 光学精密工程, 2013,21(9): 2272-2278

CHEN Jian-ming LV Qi-meng WU Guang-min CHU He-qun John D Mai. Molecularly imprinted sensor integrated with thin-film bulk acoustic resonator for drug detection[J]. Editorial Office of Optics and Precision Engineering, 2013,21(9): 2272-2278
陈剑鸣吕启蒙吴光敏楚合群 John D Mai. 分子印迹型薄膜体声波谐振毒品检测传感器[J]. 光学精密工程, 2013,21(9): 2272-2278 DOI： 10.3788/OPE.20132109.2272.

CHEN Jian-ming LV Qi-meng WU Guang-min CHU He-qun John D Mai. Molecularly imprinted sensor integrated with thin-film bulk acoustic resonator for drug detection[J]. Editorial Office of Optics and Precision Engineering, 2013,21(9): 2272-2278 DOI： 10.3788/OPE.20132109.2272.

摘要

针对毒品探测的需求，对高灵敏度、高选择性及可工作于液相环境中的传感器进行了研究，利用分子印迹技术（MIT），结合薄膜体声波谐振器（FBAR）和微流体（micro fluidics）技术构造了新型传感器。首先，阐述了用分子印迹技术制作FBAR吸附层材料的原理，利用分子印迹技术制备了对特定毒品分子具有专一吸附性的印迹材料，将其作为吸附层涂覆在基于微机电系统（MEMS）及微流体技术的FBAR上。根据压电方程和运动学方程推导出了FBAR压电振子的等效电路及电学端口输入阻抗公式，构建了以AlN为压电材料的微流体结构FBAR毒品检测传感器模型。对该结构的FBAR传感器进行了理论研究和公式推导，并在理论模型的基础上进行了仿真实验，得到了单位面积质量响度达0.8 pg/Hzcm2的FBAR传感器。得到的实验结果远高于石英晶体微天平这一传统的质量敏感型传感器，可实现对溶液中毒品分子的快速检测。

Abstract

A highly sensitive and high selective sensor which can detect drug molecules in a liquid environment was explored. By combining the Molecular Imprinting Technique (MIT)，Film Bulk Acoustic Resonator (FBAR) and the micro fluidic technology

the new sensor was constructed. The preparing principle of adsorption layer materials for FBAR by the MIT was introduced and the Imprinting material with special adsorption properties for the special drug was developed by the MIT. Then

the material was coated on a FBAR as a adsorption layer based on a Micro-electrical-mechanical System and the micro fluidic technology. According to the piezoelectric equation and dynamic equation

the input impedance formulas of the equivalent circuit and electric port for the FBAR piezoelectric vibrator were derived. Furthermore

a model of the micro fluidic system with the MIT plus FBAR-based drug detection sensor was designed and a detailed theoretical derivation and analysis was performed. Finally

the sensor model was simulated using practical operating parameters. The results show that the quality of the mass loudness per unit area of the sensor is up to 0.8 pg/Hzcm2

which is much higher than the quality of a conventional Quartz Crystal Microbalance (QCM) sensor. This advantage can greatly enhance the performance of the sensor for drug detection in the liquid environment.

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references

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