基于解析分区法设计闪耀全息凹面光栅

谭鑫; 沈晨; 吴娜; 张方程; 巴音贺希格

doi:10.3788/OPE.20132109.2303

您当前的位置：

首页 >

文章列表页 >

基于解析分区法设计闪耀全息凹面光栅

微纳技术与精密机械 | 更新时间：2020-08-12

- 基于解析分区法设计闪耀全息凹面光栅
- Design of diffraction blazed concave grating by partitioned space calculated method
- 光学精密工程 2013年21卷第9期页码：2303-2308
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院大学，北京 100049,中国
- 作者简介：
- 基金信息：
  
  吉林省科技发展计划项目(20140203011GX);国家重大科研装备开发专项(2011YQ120023);中国科学院重大科研装备研制项目(YZ201005)
- DOI：10.3788/OPE.20132109.2303
  中图分类号： O436.1
- 收稿日期：2012-12-24，
  
  修回日期：2013-02-07，
  
  网络出版日期：2013-09-30，
  
  纸质出版日期：2013-09-15
- 稿件说明：
移动端阅览
谭鑫沈晨吴娜张方程巴音贺希格. 基于解析分区法设计闪耀全息凹面光栅[J]. 光学精密工程, 2013,21(9): 2303-2308

TAN Xin Shen Chen WU Na ZHANG Fang-cheng Bayanheshige. Design of diffraction blazed concave grating by partitioned space calculated method[J]. Editorial Office of Optics and Precision Engineering, 2013,21(9): 2303-2308
谭鑫沈晨吴娜张方程巴音贺希格. 基于解析分区法设计闪耀全息凹面光栅[J]. 光学精密工程, 2013,21(9): 2303-2308 DOI： 10.3788/OPE.20132109.2303.

TAN Xin Shen Chen WU Na ZHANG Fang-cheng Bayanheshige. Design of diffraction blazed concave grating by partitioned space calculated method[J]. Editorial Office of Optics and Precision Engineering, 2013,21(9): 2303-2308 DOI： 10.3788/OPE.20132109.2303.

摘要

研究了制备闪耀凹面光栅的离子束刻蚀工艺，提出了用解析分区法设计闪耀凹面光栅的衍射效率。该方法能通过确定离子束入射角，在实验前定量给出平行离子束刻蚀后光栅衍射效率的设计结果。经过理论设计计算出所需波长衍射效率较高的凹面闪耀光栅中心闪耀角，利用刻蚀模拟软件BLAZING计算出离子束刻蚀参数及光刻胶掩模参数；以计算结果为依据，利用全息-离子束刻蚀工艺制作出尺寸为45 mm40 mm2，曲率半径为224 mm的凹面闪耀光栅，其中心闪耀角约为9.21，峰值衍射效率为54.8%@300 nm，250 nm处衍射效率为50%，与解析分区法计算结果符合较好。实验结果表明，利用解析分区法进行凹面闪耀光栅衍射效率设计的方法简单易行，能够有效指导平行离子束刻蚀闪耀凹面光栅工艺，完成高衍射效率凹面闪耀光栅的制作。

Abstract

Ion beam etching technology was researched for fabricating blaze concave gratings

and a partitioned space calculated method was proposed to calculate the diffraction efficiency of a blaze concave grating. The method can calculate the diffraction efficiency quantitatively without experimentation by confirming an incidence angle. The blazed angle of the blaze concave grating with a given wavelength was calculated based on the partitioned space calculated method

and ion beam etching parameters and a mask parameter were calculated by etching software BLAZING. On the basis of these parameters

a concave grating with a size of 45mm40mm was fabricated by holographic ion beam etching. The focus blazed angles measured by an Atomic Force Microscope(AFM) are 9.21

the efficiencies of the gratings measured by a concave grating diffraction efficiency instrument are about 54.8% at 300 nm and 50% at 250 nm. The grating substrate has a smooth blazed groove profile with 1 200 groove/mm. The results are in agreement with that partitioned space calculated well. It means that partitioned space calculated method is suitable for designing and calculating the efficiency of blaze concave gratings and it can direct the fabrication of the blaze concave gratings by the ion beam etching technology.

关键词

Keywords

references

ELENA S， SANTIAGO D A R C. New optical mountings of the spectral devices with concave diffraction gratings and high entrance slit [J]. SPIE， 2863：197-205.[2]LOEWEN E G, POPOV E. Diffraction Gratings and Applications [M]. Marcel Dekker, 1997.[3]庄夔, 刘桂琴, 李永贵.全息光栅[J]. 光学精密工程, 1981, 12（05）: 226-230.ZHUANG X, LIU G Q , LI Y G , Holographic Gratings [J]. Opt. Precision Eng., 1981, 12（05）: 226-230. (in Chinese)[4]MCCOY R P, DYMOND K F, FRITZ G G. A far and extreme ultraviolet limb imaging spectrograph for DMSP satellites [J]. SPIE， 1992，1745: 310-321.[5]HUNTER W R, SEELY J F, KOWALSKI M P, et al.. Grazing-incidence efciencies in the 28-42- wavelength region of replicas of the Skylab 3600-lineymm concave grating with multilayer and gold coatings [J]. Applied Optics, 1997, 36(25): 6411-6415.[6]巴音贺希格, 高健翔,齐向东.机械刻划长焦距凹面金属光栅的研制[J]. 光学精密工程，2006（14）：391-395.BAYANHESHIGE, GAO J X, QI X D. Manufacturing for ruling concave metal grating with a long focal length [J]. Opt. Precision Eng., 2006（14）：391-395. (in Chinese)[7]SOKOLOVA E A. Concave diffraction gratings recorded in counterpropagating beams[J]. J. Opt. Technol., 1999, 66 (12)：1085-1088.[8]SOKOLOVA E A. New-generation diffraction gratings [J]. J. Opt. Technol., 2001,68(8)：584-589.[9]YOSHIKI Y. Concave saw-tooth slot for grating manufacturing method-involves usage of concave replica process to make replica of concave slots of saw-tooth for grating [J]. Japanese patent, 1996，（33）：218178(in Japanese)[10]AOYAGI Y, NAMBA S. Blazed ion-etched holographic gratings[J]. Opt. Acta., 1976,23(9): 701-707.[11]MAYTRE D, Selected papers on diffraction gratings [J]. Washington, SPIE, 1993.[12]谭鑫，刘颖，徐向东,等，13.9 nm Laminar 分束光栅的研制[J]. 光学精密工程，2009, 12（1）：33-37.TAN X, LIU Y, XU X D, et al.. 13.9 nm Laminar grating as beam splitter[J]. Opt. Precision Eng., 2009, 12（01）：33-37. (in Chinese)[13]LIU Y, TAN X, LIU ZH K. Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment[J]. Optics Express, 2008(16):14761-14770.[14]TAN X. Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask [J]. SPIE, 2011, 8191: 1117-1129.[15]吴娜，谭鑫，巴音贺希格,等.闪耀全息光栅离子束刻蚀工艺模拟及实验验证[J].光学精密工程，2012, 20（9）：33-41.WU N, TAN X, BAYINHEXIGE, et al.. Simulation of ion beam etching process in ion beam etched holographic grating[J]. Opt. Precision Eng., 2012, 20（9）：33-41.(in Chinese)

浏览量

100

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

闪耀全息光栅离子束刻蚀工艺模拟及实验验证

用于飞秒激光制备光纤光栅的相位掩模研制

闪耀透射光栅衍射规律的分析和验证

紫外全息闪耀光栅的制作

宽束离子束刻蚀快速加工金属纳米间隙结构