高精度曲率半径测量方法及其不确定度

田志辉; 史振广; 刘伟奇; 杨怀江; 隋永新

doi:10.3788/OPE.20132110.2495

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高精度曲率半径测量方法及其不确定度

现代应用光学 | 更新时间：2020-08-12

- 高精度曲率半径测量方法及其不确定度
- High-accuracy measurement method for radius of curvature and its uncertainties
- 光学精密工程 2013年21卷第10期页码：2495-2501
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室，吉林长春 130033
- 作者简介：
- 基金信息：
  
  NA0.75光刻投影物镜光学元件检测技术研究()
- DOI：10.3788/OPE.20132110.2495
  中图分类号： O436;TN247
- 收稿日期：2012-05-25，
  
  修回日期：2012-07-12，
  
  网络出版日期：2012-10-19，
  
  纸质出版日期：2013-10-15
- 稿件说明：
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田志辉史振广刘伟奇杨怀江隋永新. 高精度曲率半径测量方法及其不确定度[J]. 光学精密工程, 2013,21(10): 2495-2501

TIAN Zhi-hui SHI Zhen-guang LIU Wei-qi YANG Huai-jiang SUI Yong-xin. High-accuracy measurement method for radius of curvature and its uncertainties[J]. Editorial Office of Optics and Precision Engineering, 2013,21(10): 2495-2501
田志辉史振广刘伟奇杨怀江隋永新. 高精度曲率半径测量方法及其不确定度[J]. 光学精密工程, 2013,21(10): 2495-2501 DOI： 10.3788/OPE.20132110.2495.

TIAN Zhi-hui SHI Zhen-guang LIU Wei-qi YANG Huai-jiang SUI Yong-xin. High-accuracy measurement method for radius of curvature and its uncertainties[J]. Editorial Office of Optics and Precision Engineering, 2013,21(10): 2495-2501 DOI： 10.3788/OPE.20132110.2495.

摘要

为了实现对光学元件曲率半径的高精度测量，提出了一种利用反射式计算全息元件结合波长移相干涉测长进行光学球面曲率半径测量的检测新方法。测试中

反射式计算全息元件作为基准

用来标定所用标准镜头参考面的曲率半径，同时利用波长移相技术对干涉腔腔长进行测量，通过计算分析即可得到被测元件的曲率半径。本文首先描述了该方法的系统构成及其工作原理。然后，结合实例，运用理论分析与软件仿真模拟，对该方法的测量不确定度进行了详细地分析。最后，进行了实验验证。在实验室现有的商用波长移相干涉仪上

利用此方法对一口径为100 mm的球面样品进行了曲率半径测量，测量结果为157.1083 mm。接着，利用接触式球径仪法对同一样品进行了对比测量，两测试结果的相对误差小于0.02%。该方法较其它目前已有的非接触式曲率半径测量方法相比，具有误差源少、测量精度高、易于操作等优点。

Abstract

In order to realize high-accuracy measurement for radius of curvature (ROC) of optical elements

a novel interferometric testing approach to measuring ROC of spherical optical surfaces which uses reflective-type computer-generated-hologram (RTCGH) and wavelength phase-shifting technology is proposed. The RTCGH is used as a reference to calibrate the ROC of the reference surface of the transmission sphere lens. At the same time

the lengths of interferometric cavities are measured by using wavelength phase-shifting. Then

the test ROC can be calculated by above data. In this paper

we firstly describe the system structure and the measuring principle of our method. And then

combining with an example

uncertainty analysis is researched in detail by theoretical derivations and computer simulations. Finally

a verification experiment is carried out. By using a commercial wavelength phase-shifting interferometer in our laboratory

the ROC of an optical spherical sample with 100 mm aperture is tested by the method. The test result is 157.1083 mm. For comparison and validation

the sample is also tested by a spherometer. The relative error is less than 0.02%. Compared with other non-contact ROC measurement methods

this testing way has less error sources

and can achieve high-precision metrology while maintaining relative convenient-operation.

关键词

Keywords

references

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