悬浮转子式微陀螺的反电动势转速检测

翁睿1; 张海峰1; 刘晓为1

doi:10.3788/OPE.20132110.2566

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悬浮转子式微陀螺的反电动势转速检测

微纳技术与精密机械 | 更新时间：2020-08-12

- 悬浮转子式微陀螺的反电动势转速检测
- Back EMF Speed Detection of Suspended Rotor Micro Gyroscope
- 光学精密工程 2013年21卷第10期页码：2566-2573
- 作者机构：
  
  1. 哈尔滨工业大学 MEMS中心,黑龙江哈尔滨,150001
  2. 微系统与微结构制造教育部重点实验室,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
  
  国家重大科学研究计划();基于光楔姿态与条纹分析的多自由度运动误差测量方法()
- DOI：10.3788/OPE.20132110.2566
  中图分类号： TB934
- 收稿日期：2013-03-25，
  
  修回日期：2013-05-19，
  
  网络出版日期：2012-10-19，
  
  纸质出版日期：2013-10-15
- 稿件说明：
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翁睿张海峰刘晓为. 悬浮转子式微陀螺的反电动势转速检测[J]. 光学精密工程, 2013,21(10): 2566-2573

WENG Rui ZHANG Hai-feng LIU Xiao-wei. Back EMF Speed Detection of Suspended Rotor Micro Gyroscope[J]. Editorial Office of Optics and Precision Engineering, 2013,21(10): 2566-2573
翁睿张海峰刘晓为. 悬浮转子式微陀螺的反电动势转速检测[J]. 光学精密工程, 2013,21(10): 2566-2573 DOI： 10.3788/OPE.20132110.2566.

WENG Rui ZHANG Hai-feng LIU Xiao-wei. Back EMF Speed Detection of Suspended Rotor Micro Gyroscope[J]. Editorial Office of Optics and Precision Engineering, 2013,21(10): 2566-2573 DOI： 10.3788/OPE.20132110.2566.

摘要

根据液浮转子式微陀螺闭环驱动系统对转子转速测量的需求，提出了一种适用于悬浮转子式微陀螺的反电动势转速检测方法。根据楞次定律，永磁转子在附有检测线圈的定子中转动时，会切割磁感线感应出反电动势。对反电动势信号进行分析，即可测得转子的转速。由于检测线圈与驱动线圈共用定子铁芯，这种检测方法在降低定子结构复杂度的同时，也引入了矩形波驱动信号带来的毛刺干扰。干扰信号经过模拟低通滤波器衰减后，通过模数转换器转换为数字信号。该信号通过单片机上运行的过零检测算法处理后，即可得到当前转子的转速。测试结果表明，该转速检测系统在刷新率为4 Hz、转速达到5 000 r/min以上时，测量值的相对误差在0.3%以内，其非线性误差为0.41%

能够满足对悬浮转子式微陀螺转速进行检测的要求。

Abstract

On the basis of requirements of the closed-loop driving system in a liquid suspended rotor gyroscope for measurement of rotor speeds

a Back-electromotive Force (EMF) rotating speed detection method is proposed for the suspended rotor gyroscope. As induction coils work on Lenz's law

the rotating speed of rotor can be measured by detecting the back-EMF generated by a permanent magnetism (p-m) rotor. Because the detecting coil and driving coil share the same stator core

this method reduces the complexity of the stator

but also introduces a burr interference from the driving rectangular wave. The interference signal is then attenuated by an analog low-pass filter and sampled by an A/D converter. Finally

the rotating speed of rotor can be calculated automatically by using a Micro-controller Unit (MCU) and the zero crossing detection algorithm. The test results show that the relative error of detected value can be within 0.3%

and the nonlinear error is 0.41% when a refresh frequency is 4 Hz and the rotating speed reaches 5 000 r/min. The performance meets the requirement of rotating speed detection.

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Keywords

references

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