微纳测量机测头弹性结构的参数设计

陈晓怀; 陈贺; 王珊; 李瑞君; 高伟

doi:10.3788/OPE.20132110.2587

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微纳测量机测头弹性结构的参数设计

微纳技术与精密机械 | 更新时间：2020-08-12

- 微纳测量机测头弹性结构的参数设计
- Design Elastic Structure Parameters of probe in micro-nano CMM
- 光学精密工程 2013年21卷第10期页码：2587-2593
- 作者机构：
  
  合肥工业大学仪器科学与光电工程学院,安徽合肥,230009
- 作者简介：
- 基金信息：
  
  微纳测量技术与装置()
- DOI：10.3788/OPE.20132110.2587
  中图分类号：
- 收稿日期：2013-04-01，
  
  修回日期：2013-05-16，
  
  网络出版日期：2012-10-19，
  
  纸质出版日期：2013-10-15
- 稿件说明：
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陈晓怀陈贺王珊李瑞君高伟. 微纳测量机测头弹性结构的参数设计[J]. 光学精密工程, 2013,21(10): 2587-2593

CHEN Xiao-huai CHEN He WANG Shan LI Rui-jun GAO Wei. Design Elastic Structure Parameters of probe in micro-nano CMM[J]. Editorial Office of Optics and Precision Engineering, 2013,21(10): 2587-2593
陈晓怀陈贺王珊李瑞君高伟. 微纳测量机测头弹性结构的参数设计[J]. 光学精密工程, 2013,21(10): 2587-2593 DOI： 10.3788/OPE.20132110.2587.

CHEN Xiao-huai CHEN He WANG Shan LI Rui-jun GAO Wei. Design Elastic Structure Parameters of probe in micro-nano CMM[J]. Editorial Office of Optics and Precision Engineering, 2013,21(10): 2587-2593 DOI： 10.3788/OPE.20132110.2587.

摘要

根据微纳米三坐标测量机对测头各项指标的要求，提出了4种测头弹性结构的设计方案。通过力学分析建立测头弹性结构三维刚度模型，应用有限元分析软件ANSYS分别对4种弹性结构的刚度进行仿真计算；然后，分析讨论了4种弹性结构的性能特点。综合考虑测量刚度、灵敏性及结构紧凑稳定等多种因素，选择十字型结构作为微纳米测量机测头的弹性结构，并对其进行了结构参数的优化和测头刚度各向同性设计。搭建了高精度三维微位移测试平台，对测头的测量范围、线性、位移误差进行了实验验证。仿真分析和实验结果表明，测头的弹性结构满足测量范围40 m40 m20 m、测量刚度小于0.5 mN/m及刚度各向同性的要求，整体测量误差小于100 nm。

Abstract

According to the isotropic requirements of micro-nano Coordinate Measuring Machines(CMMs) for a probe

four kinds of elastic structure design schemes for the probe were proposed. A three-dimensional stiffness model of elastic structure was established by mechanical analysis. The stiffnesses of four elastic structures were simulated by using finite element analysis software ANSYS

and the performance characteristics of the four structures were analyzed and discussed

In consideration of a variety of factors like measuring stiffnesses

sensitivity and stable compact structures

a cross shape structure was selected as the elastic structure of micro-nano CMM probe

and its structure parameters were optimized and stiffness isotropic was designed. A high precision three-dimensional micro displacement test platform was set

and the measuring range

linearity and displacement error of the probe were tested and verified by experiments. Simulation and experiment results show that the elastic structure of the probe meets the requirement of a measuring range of 40 m40 m20 m

stiffness less than 0.5 mN/m and stiffness isotropic

and its overall measurement error is less than 100 nm.

关键词

Keywords

references

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