可调谐半导体激光吸收光谱方法的多组分气体浓度同时在线监测技术

张志荣; 夏滑; 董凤忠; 庞涛; 吴边

doi:10.3788/OPE.20132111.2771

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可调谐半导体激光吸收光谱方法的多组分气体浓度同时在线监测技术

现代应用光学 | 更新时间：2020-08-12

- 可调谐半导体激光吸收光谱方法的多组分气体浓度同时在线监测技术
- Simultaneous and on-line detection of multiple gas concentration with tunable diode laser absorption spectroscopy
- 光学精密工程 2013年21卷第11期页码：2771-2777
- 作者机构：
  
  中国科学院安徽光学精密机械研究所安徽省光子器件与材料重点实验室，安徽合肥 230031
- 作者简介：
- 基金信息：
  
  国家自然科学基金项目资助(51577001)
- DOI：10.3788/OPE.20132111.2771
  中图分类号： O433.1
- 收稿日期：2013-07-19，
  
  修回日期：2013-08-21，
  
  网络出版日期：2013-11-22，
  
  纸质出版日期：2013-11-15
- 稿件说明：
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张志荣, 夏滑, 董凤忠, 庞涛, 吴边. 可调谐半导体激光吸收光谱方法的多组分气体浓度同时在线监测技术[J]. 光学精密工程, 2013,21(11): 2771-2777

ZHANG Zhi-Rong, JIA Gu, DONG Feng-Zhong, LONG Chao, TUN Bian. Simultaneous and on-line detection of multiple gas concentration with tunable diode laser absorption spectroscopy[J]. Editorial Office of Optics and Precision Engineering, 2013,21(11): 2771-2777
张志荣, 夏滑, 董凤忠, 庞涛, 吴边. 可调谐半导体激光吸收光谱方法的多组分气体浓度同时在线监测技术[J]. 光学精密工程, 2013,21(11): 2771-2777 DOI： 10.3788/OPE.20132111.2771.

ZHANG Zhi-Rong, JIA Gu, DONG Feng-Zhong, LONG Chao, TUN Bian. Simultaneous and on-line detection of multiple gas concentration with tunable diode laser absorption spectroscopy[J]. Editorial Office of Optics and Precision Engineering, 2013,21(11): 2771-2777 DOI： 10.3788/OPE.20132111.2771.

摘要

由于线宽窄，可调谐半导体激光吸收光谱技术(TDLAS)一般情况下只能对一种气体进行检测。为了实现多气体同时或近同时在线检测，本文以1 578 nm-H2S和1 747 nm-HCl混合气体同时在线监测为例，研究了3种检测方法：(1)同频10 kHz正弦波和两路同频30 Hz不同步的分时锯齿信号法；(2)同频10 kHz正弦和30 Hz锯齿信号的光开关检测法；(3)多频(10 kHz和20 kHz正弦信号)正弦调制法。实验结果表明：分时锯齿信号法除幅值略有微小变化外，在使用前后对测试结果影响很小；光开关法在切换过程瞬间会略有不稳定，但不影响后期的浓度反演；多频正弦法的信噪比和抗干扰能力均有所提高，进行HCl探测和H2S探测时，信噪比在激光器关闭和打开情况下分别提高了0.95倍和3.17倍。以上3种方法操作简单，可以方便地实现多气体组分的同时在线监测，提高了TDLAS仪器的竞争力。

Abstract

Generally

Tunable Diode Laser Absorption Spectroscopy (TDLAS) can detect only one kind of gas because of its narrow line-width. To detect the multi-component gas in real time simultaneously or near simultaneously

three kinds of detection methods were reported by taking 1 578 nm-H2S

1 747 nm-HCl and N2 mixture for examples. The three methods are called timeshare-sawtooth method (10 kHz sin wave

30 Hz asynchrony sawtooth wave)

optical-switch method (same frequency 10 kHz sin wave

30 Hz sawtooth wave) and multi-frequency modulation method (10 kHz and 20 kHz sin wave). The experimental results for the three methods show as follows: the method one gives fewer effects on measuring results apart from amplitude changes. The method 2 shows slightly unstable moments in the switching process

but it has no effect on concentration inversion in the later stage of the experiment. Moreover

in the method 3

the Signal-to-noise Ratio (SNR) and the anti-interference ability are improved

and the SNR has increased about 0.95 and 3.17 times for monitoring HCl and H2S when lasers are on or off. The three methods mentioned above have advantages on less investment

simple adjusting

and easy operation

also they can monitor many kinds of gases with the changing modulation parameters or switch channels

simultaneously.

关键词

Keywords

references

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激光吸收光谱技术在工业生产过程及安全预警标识性气体监测中的应用