大口径非球面组合加工技术

刘振宇1; 罗霄1; 邓伟杰1; 郑立功1; 张学军1

doi:10.3788/OPE.20132111.2791

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大口径非球面组合加工技术

现代应用光学 | 更新时间：2020-08-12

- 大口径非球面组合加工技术
- Multi-mode Optimization Technique for Large Optical Aspheric Mirror
- 光学精密工程 2013年21卷第11期页码：2791-2797
- 作者机构：
  
  1. 中国科学院大学北京,中国,100049
  2. 中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
  
  大口径离轴高次非球面加工和检测基础研究()
- DOI：10.3788/OPE.20132111.2791
  中图分类号： O439
- 收稿日期：2012-05-11，
  
  修回日期：2012-06-27，
  
  网络出版日期：2013-11-22，
  
  纸质出版日期：2013-11-15
- 稿件说明：
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刘振宇, 罗霄, 邓伟杰, 郑立功, 张学军. 大口径非球面组合加工技术[J]. 光学精密工程, 2013,21(11): 2791-2797

LIU Zhen-Yu, LUO Xiao, DENG Wei-Jie, ZHENG Li-Gong, ZHANG Hua-Jun. Multi-mode Optimization Technique for Large Optical Aspheric Mirror[J]. Editorial Office of Optics and Precision Engineering, 2013,21(11): 2791-2797
刘振宇, 罗霄, 邓伟杰, 郑立功, 张学军. 大口径非球面组合加工技术[J]. 光学精密工程, 2013,21(11): 2791-2797 DOI： 10.3788/OPE.20132111.2791.

LIU Zhen-Yu, LUO Xiao, DENG Wei-Jie, ZHENG Li-Gong, ZHANG Hua-Jun. Multi-mode Optimization Technique for Large Optical Aspheric Mirror[J]. Editorial Office of Optics and Precision Engineering, 2013,21(11): 2791-2797 DOI： 10.3788/OPE.20132111.2791.

摘要

摘要：为提高大口径非球面光学反射镜研磨与抛光阶段的加工效率，提出了采用多磨头组合加工方式同时提高材料去除效率和面形收敛效率的方法。该方法以矩阵运算为基础，在一次优化过程中同时对多个加工循环进行优化，将传统的单去除函数驻留时间求解过程进行扩展，实现多去除函数的综合优化求解。扩展了驻留时间求解范围，使大磨头和小磨头在加工过程中优势互补，实现多个磨头多个加工循环的全局优化。本文采用计算机虚拟加工的方法，对等厚和实际加工中的面形误差进行加工模拟分析，结果表明：与传统的驻留时间求解算法相比，在加工效率提高了50%的同时，RMS收敛率达到与小磨头相当。使用实际面形仿真加工结果RMS由0.0115变为0.0044，收敛效率为0.6212，满足实际加工要求。该技术可以有效缩短加工周期，具有很强的实用性。

Abstract

Abstract: In order to manufacture a large aspheric mirror in high efficiency and precision

a new method which uses multi-mode optimization was introduced. This method is based on matrix calculate

use different tool influence functions at one time when calculating dwell time

extending conventional calculation of dwell time to algorithm which uses a set of different TIF

extend solution area of dwell time. In the end did a simulation of polishing an error map with actual parameters using multi-mode method. The simulation result shows that compared to conventional way using multi-mode technique can improve efficiency by 50%

convergence rates of the RMS value better than before. When simulation on the real surface RMS changes from 0.115 to 0.0044

the convergence rates is 0.6212 which is satisfied for real manufacture. Multi-mode technique can improve polishing efficiency and maintain good precision

it can forms an attractive solution for the large optical aspheric mirror fabrication capability and has large potential.

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references

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