大型衍射光栅刻划机刀架系统的设计

陈科位1; 于宏柱1; 张善文1; 齐向东1; 于海利1; 冯树龙1

doi:10.3788/OPE.20132111.2900

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大型衍射光栅刻划机刀架系统的设计

微纳技术与精密机械 | 更新时间：2020-08-12

- 大型衍射光栅刻划机刀架系统的设计
- Design of diamond carriage system for large diffraction grating ruling engine
- 光学精密工程 2013年21卷第11期页码：2900-2905
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 北京航空航天大学机械工程及自动化学院，北京 100191
- 作者简介：
- 基金信息：
  
  国家重大科研装备研制项目(ZDYZ2008-1)
- DOI：10.3788/OPE.20132111.2900
  中图分类号： TN305.7
- 收稿日期：2012-09-14，
  
  修回日期：2012-11-12，
  
  网络出版日期：2013-11-22，
  
  纸质出版日期：2013-11-15
- 稿件说明：
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陈科位, 于宏柱, 张善文, 齐向东, 于海利, 冯树龙. 大型衍射光栅刻划机刀架系统的设计[J]. 光学精密工程, 2013,21(11): 2900-2905

CHEN Ke-Li, XU Hong-Zhu, ZHANG Shan-Wen, JI Xiang-Dong, XU Hai-Li, FENG Shu-Long. Design of diamond carriage system for large diffraction grating ruling engine[J]. Editorial Office of Optics and Precision Engineering, 2013,21(11): 2900-2905
陈科位, 于宏柱, 张善文, 齐向东, 于海利, 冯树龙. 大型衍射光栅刻划机刀架系统的设计[J]. 光学精密工程, 2013,21(11): 2900-2905 DOI： 10.3788/OPE.20132111.2900.

CHEN Ke-Li, XU Hong-Zhu, ZHANG Shan-Wen, JI Xiang-Dong, XU Hai-Li, FENG Shu-Long. Design of diamond carriage system for large diffraction grating ruling engine[J]. Editorial Office of Optics and Precision Engineering, 2013,21(11): 2900-2905 DOI： 10.3788/OPE.20132111.2900.

摘要

设计了一套光栅刻划机刀架系统。该系统将刻划刀具部分安装于能绕鞍形滑块自由转动的安装板上，利用铰链机构来实现了刀架刻划部分与承重部分的分离，降低运动中鞍形滑块的变形、偏移等对金刚石刻刀的影响。分析了刀架运动中产生的误差以及该误差对金刚石刻刀的影响。提出了一种新型检测光路结构，该结构利用双频激光干涉仪测量运动中刀架相对于导向导轨的位移变化。结果显示，刀架单向行程约70 mm时，刀架在光栅刻划阶段相对于导向导轨在分度方向的最大位移值约为60 nm。由于在刻划阶段，膜层对金刚石刻刀存在约束作用，所以金刚石刻刀相对于导向导轨的实际位移会更小。利用新的刀架结构刻制了一块70 mm70 mm，600 gr/mm的衍射光栅，对比利用原刀架结构刻制的光栅，该光栅杂散光强度减弱，质量提高。

Abstract

The diamond carriage system of a grating ruling engine was designed. The diamond lifter part was installed on the plate which could be free to revolve around the saddle-shaped slider. The diamond lifter part and the load-bearing part were separated by the hinge to reduce the error of the diamond position caused by the saddle-shaped sliders deformation and offset. The movement error of the diamond carriage as well as its influence on the diamond position were analyzed

then a optical detection structure was proposed to measure the displacement of the diamond carriage relative to the guide rail at the movement stage by a dual-frequency laser interferometer. The measuring results at the stage of about 70 mm show that the maximum displacement of the diamond carriage relative to the guide rail is up to 60 nm in the ruling stage. As the diamond is constrained by the coatings

the error of the diamond position is even more less. A diffraction grating with 70 mm70 mm area and 600 gr/mm has been ruled with the changed diamond carriage and it shows a weaker stray light and good quality as compared with traditional gratings.

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references

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