偏振正交性对偏振相移干涉检测精度的影响

宣斌; 宋淑梅

doi:10.3788/OPE.20132112.3001

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偏振正交性对偏振相移干涉检测精度的影响

现代应用光学 | 更新时间：2020-08-12

- 偏振正交性对偏振相移干涉检测精度的影响
- Influence of polarization direction nonorthogonality on precision of polarization phase shifting interferometry
- 光学精密工程 2013年21卷第12期页码：3001-3007
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所，吉林长春 130033,中国
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132112.3001
  中图分类号： O436.1
- 收稿日期：2013-08-30，
  
  修回日期：2013-10-17，
  
  网络出版日期：2013-12-25，
  
  纸质出版日期：2013-12-25
- 稿件说明：
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宣斌, 宋淑梅. 偏振正交性对偏振相移干涉检测精度的影响[J]. 光学精密工程, 2013,21(12): 3001-3007

XUAN Bin, SONG Chu-Mei. Influence of polarization direction nonorthogonality on precision of polarization phase shifting interferometry[J]. Editorial Office of Optics and Precision Engineering, 2013,21(12): 3001-3007
宣斌, 宋淑梅. 偏振正交性对偏振相移干涉检测精度的影响[J]. 光学精密工程, 2013,21(12): 3001-3007 DOI： 10.3788/OPE.20132112.3001.

XUAN Bin, SONG Chu-Mei. Influence of polarization direction nonorthogonality on precision of polarization phase shifting interferometry[J]. Editorial Office of Optics and Precision Engineering, 2013,21(12): 3001-3007 DOI： 10.3788/OPE.20132112.3001.

摘要

为了提高线偏振相移干涉检测的精度，分析了参考光和测试光的偏振方向正交性对该项检测技术的影响。分析了线偏振相移干涉的原理，提出偏振非正交引起的检测误差与波像差有关，且检测误差峰谷值与测试光和参考光振幅之比以及偏振非正交量成正比。讨论了偏振非正交产生的原因，认为测试光在被检元件表面的折射或者反射都有可能引起偏振非正交。针对不同被检元件，给出了减少偏振非正交的几种方法，包括合理镀膜、选择合理入射角偏振方向等。通过SkipFlat检测对理论分析进行了验证。结果显示，对于入射角为45的检测光路，偏振正交性引入的检测误差呈现与条纹一致的分布，峰谷值为0.174 1，这与理论分析相吻合。文章指出，进行偏振相移干涉检测时，需要针对不同的被检元件进行分析，以确保偏振非正交产生的检测误差能够满足技术要求。

Abstract

The influence of polarization direction orthogonality on Polarization Phase Shifting Interferometry(PPSI) was analyzed to improve its measurement precision. Based on the analysis of PPSI principle

it points out that the measurement error is a function of Optical Path Difference(OPD) and the PV of measurement error is proportional to the nonorthogonality and the ratio of amplitudes of test beam to reference beam. The polarization nonorthogonality can be introduced by the reflection or refraction on a surface. Then several approaches were recommended to depress the nonorthogonality

such as proper coatings

incident angles and polarization directions. A configuration of SkipFlat test with incident angle of 45 was set up. It shows that the distribution of measurement error is coincident with that of OPD. Moreover

the measurement error is 0.174 1 (PV)

which is in agreement with that of the theoretical analysis.Finally

the paper suggests that it is necessary to analyze individually each of the component under the test for making sure the measurement precision.

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references

［1］MALACARA D. Optical Shop Testing ［M］. Wiley, 1992.［2］赵智亮，夏伯才，陈立华，等. 相移干涉测量中相移误差的自修正［J］. 光学精密工程，2013，21(5)：1116-1121.ZHAO ZH L, XIA B C, CHEN L H, et al.. Self-correction of phase step error in phase shifting ［J］. Opt. Precision Eng., 2013, 21(5): 1116-1121. (in Chinese)［3］苏志德, 史振广, 彭吉, 等. 菲索干涉仪中精确移相的实现［J］. 中国光学, 2013,6(2):244-250.SU ZH D, SHI ZH G, PENG J, et al.. Implementation of accurate phase shift in Fizeau interferometer［J］. Chinese Optics, 2013,6(2):244-250. (in Chinese)［4］刘泊，郭建英，孙永全. 压电陶瓷微位移驱动器建模与控制［J］. 光学精密工程，2013，21(6)：1503-1509.LIU B, GUO J Y, SUN Y Q. Modeling control for PZT micro-displacement actuator ［J］. Opt. Precision Eng., 2013, 21(6): 1503-1509. (in Chinese)［5］MITSUO T. Temporal versus spatial carrier techniques for heterodyne interferometry ［J］. SPIE, 1987, 813: 329-330.［6］MITSUO T. Spatial-carrier fringe-pattern analysis and its applications to precision interferometry and profilometry. An overview ［J］. Industrial Metrology, 1990, 1(2): 79-99.［7］CHATTERJEE S,KUMAR Y P,BHADURI B. Measurement of surface figure of plane optical surfaces with polarization phase-shifting Fizeau interferometer ［J］. Opt. & Laser Tech., 2007, 39: 268-274.［8］CHATTERJEE S,KUMAR Y P. Polarization phase-shifting Fizeau interferometer with a cyclic path optical configuration ［J］. Opt. Eng., 2009, 48(11): 115601.［9］王孝坤. 子孔径拼接检测非球面时调整误差的补偿［J］. 中国光学, 2013,6(1): 88-95.WANG X K. Compensation of misalignment error on testing aspheric surface by subaperture stitching interferometry［J］. Chinese Optics, 2013,6(1):88-95.(in Chinese)［10］莫卫东, 范琦, 贾晋超, 等. 非球面检测中最佳入射球面波和最佳参考球面波的确定［J］. 中国光学, 2012,5(3): 263-269.MO W D, FAN Q, JIA J CH, et al.. Determination of optimum positions of incident spherical wave and reference spherical wave in testing aspheric surface［J］. Chinese Optics, 2012,5(3): 263-269. (in Chinese)［11］ZHAO CH Y, KANG D Y,BURE J H. Effects of birefringence on Fizeau interferometry that uses a polarization phase-shifting technique ［J］. Appl. Opt., 2005, 44(35): 7548-7553.［12］李霞，袁艳，赵建科. 干涉仪的微应力安装力学分析以及试验结果［J］. 光子学报，2007，36(5)：918-921.LI X , YUAN Y , ZHAO J K. Microstress instal lation and experiment result of the interferometer ［J］. Acta Photonica Sinica, 2007, 36(5): 918-921. (in Chinese)［13］王平，田伟，王汝冬，等. 支撑应力对光刻透镜投射波前畸变的影响［J］. 中国光学，2013，6(1)：57-63.WANG P, TIAN W, WANG R D, et al.. Influence of mounting stress on wavefront distortion of lithographic object lens ［J］. Chinese Optics, 2013, 6(1):57-63. (in Chinese)［14］杨军，刘志海，苑立波. 波片对偏振激光干涉仪非线性误差的影响［J］. 光子学报，2008，37(2)：364-369.YANG J, LIU ZH H, YUAN L B. Effects of wave plate on nonlinear errors in polarization laser interferometer ［J］. Acta Photonica Sinica, 2008, 37(2): 364-369. (in Chinese)［15］MENESES-FABIAN C,RIVERA-ORTEGA U. Phase-shifting interferometry by wave amplitude modulation: general case ［J］. Opt. and Lasers in Eng., 2012, 50: 905-909.［16］RIVERA-ORTEGA U,MENESES-FABIAN C,RODRIGUEZ-ZURITA G. Inhomogeneous phase-visibility modulating interferometry by space on-off non-quadrature amplitude modulation ［J］. Opt. Express, 2013, 22(15): 17421-17434.［17］GHOSH N, OTANI Y,BHATTACHARYA K. Generation of collinearly propagating orthogonally polarized beams ［J］. Optik, 2011, 122: 1164-1168.［18］李刚，孙连春，于兆波，等. 光学薄膜中的偏振效应［J］. 光学精密工程，2003，11(6)：647-651.LI G, SUN L C, YU ZH B, et al.. Polarization effects in optical thin films ［J］. Opt. Precision Eng., 2003, 11(6): 647-651. (in Chinese)［19］任寰，马力，刘旭，等. 多表面干涉下的光学元件面形检测［J］. 光学精密工程，2013，21(5)：1145-1150.REN H, MA L, LIU X, et al.. Optical element test with multiple surface interference ［J］. Opt. Precision Eng., 2013, 21(5):1145-1150. (in Chinese)

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