投影物镜小比率模型系统补偿量的选择

赵阳; 巩岩

doi:10.3788/OPE.20132112.3029

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投影物镜小比率模型系统补偿量的选择

现代应用光学 | 更新时间：2020-08-12

- 投影物镜小比率模型系统补偿量的选择
- Selection of system compensators for small scale projected objective
- 光学精密工程 2013年21卷第12期页码：3029-3036
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室，吉林长春 130033
- 作者简介：
- 基金信息：
  
  太阳等离子体极紫外成像关键技术研究()
- DOI：10.3788/OPE.20132112.3029
  中图分类号： O435.2;TN305.7
- 收稿日期：2012-08-09，
  
  修回日期：2012-10-12，
  
  网络出版日期：2013-12-25，
  
  纸质出版日期：2013-12-25
- 稿件说明：
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赵阳, 巩岩. 投影物镜小比率模型系统补偿量的选择[J]. 光学精密工程, 2013,21(12): 3029-3036

DIAO Yang, GONG Yan. Selection of system compensators for small scale projected objective[J]. Editorial Office of Optics and Precision Engineering, 2013,21(12): 3029-3036
赵阳, 巩岩. 投影物镜小比率模型系统补偿量的选择[J]. 光学精密工程, 2013,21(12): 3029-3036 DOI： 10.3788/OPE.20132112.3029.

DIAO Yang, GONG Yan. Selection of system compensators for small scale projected objective[J]. Editorial Office of Optics and Precision Engineering, 2013,21(12): 3029-3036 DOI： 10.3788/OPE.20132112.3029.

摘要

由于光刻投影物镜小比率模型光学系统的光学元件数量较多，用每个补偿量去补偿对应失调量的传统装调方法已不适用。本文利用灵敏度矩阵，通过找出偏心补偿量和倾斜补偿量的内在联系来缩小补偿量的选择范围。然后根据失调量敏感度的分析，提出了选择系统补偿量的方法。利用这个方法，选择4个补偿量便使补偿后的光学系统的成像质量满足设计指标要求，减少了光学系统的装调难度。最后，编写宏模块完成大量仿真计算，验证了敏感度分析的正确性。光学系统初装完成后，对系统进行了预装调。实验结果表明，补偿后系统波像差(RMS)由50.9 nm提高到25.9 nm，优于技术指标要求，证明了本文提出的补偿量选择方法的正确性和有效性。

Abstract

As the small scale model optical system for a projected objective of lithography has so many optical elements

it is impossible to use a traditional method that each compensator only compensates the corresponding misalignment. Therefore

this paper proposes a sensitive matrix to solve this problem. Firstly

the internal relations between the decenter disalignments and the tip/tilt ones were found out based on a sensitive matrix to reduce the range of selection compensators. Then

according to the analysis of the disalignment sensitivity

a method for selecting system compensators was proposed. With the method

only selected four compensators could allow the imaging quality of compensated optical system to achieve the design index and the alignment difficulty to be reduced. Finally

the macro command modes were proposed to complete the massive simulation calculation to prove the correctness of the sensitive analysis. After the original assembling

a prealigning procedure of optical system was achieved to ensure the feasibility of the aligning scheme. The test results show that the wave front errors (RMS) have reduced to 25.9 nm from 50.9 nm after compensation

which is better than the requirements of qualifications. The results prove that the proposed methods are right and effective.

关键词

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references

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