MEMS电容式三维微触觉测头设计及校准

吴俊杰; 李源; 李东升; 卢歆; 何明轩

doi:10.3788/OPE.20132112.3087

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MEMS电容式三维微触觉测头设计及校准

微纳技术与精密机械 | 更新时间：2020-08-12

- MEMS电容式三维微触觉测头设计及校准
- Design and calibration of 3D Micro Tactile Probe based on MEMS Capacitance Sensor
- 光学精密工程 2013年21卷第12期页码：3087-3094
- 作者机构：
  
  1. 中国计量学院计量测试工程学院,浙江杭州,310018
  2. 上海市计量测试技术研究院微米纳米计量实验室上海,201203
  3. 上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室上海,200240
- 作者简介：
- 基金信息：
  
  多微通道层流式气体静压节流机理的研究();跨尺度工艺集成纳米平面尺寸标准样板的制备及溯源表征技术研究()
- DOI：10.3788/OPE.20132112.3087
  中图分类号： TB92;TP212.9
- 收稿日期：2013-04-19，
  
  修回日期：2013-06-25，
  
  网络出版日期：2013-12-25，
  
  纸质出版日期：2013-12-25
- 稿件说明：
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吴俊杰, 李源, 李东升, 卢歆, 何明轩. MEMS电容式三维微触觉测头设计及校准[J]. 光学精密工程, 2013,21(12): 3087-3094

TUN Dun-Jie, LI Yuan, LI Dong-Sheng, LEI Xin, HE Meng-Han. Design and calibration of 3D Micro Tactile Probe based on MEMS Capacitance Sensor[J]. Editorial Office of Optics and Precision Engineering, 2013,21(12): 3087-3094
吴俊杰, 李源, 李东升, 卢歆, 何明轩. MEMS电容式三维微触觉测头设计及校准[J]. 光学精密工程, 2013,21(12): 3087-3094 DOI： 10.3788/OPE.20132112.3087.

TUN Dun-Jie, LI Yuan, LI Dong-Sheng, LEI Xin, HE Meng-Han. Design and calibration of 3D Micro Tactile Probe based on MEMS Capacitance Sensor[J]. Editorial Office of Optics and Precision Engineering, 2013,21(12): 3087-3094 DOI： 10.3788/OPE.20132112.3087.

摘要

由于微纳米几何量计量很难以三维方式高精度地测量较大尺寸的器件，本文基于非硅MEMS工艺，开发了一种可用于微纳米尺度三维尺寸测量的电容式微触觉测头。利用电容频率测量法实现了微弱电容信号的采集。采用宏微结合驱动方式，设计了运动范围为25 mm25 mm10 mm，单轴12 m范围内定位精度达1 nm的三维微位移平台。最后，对测头的测量范围、线性、迟滞及分辨力进行了测试。结果表明，测头的轴向测量范围为4.5 m，横向测量范围大于5 m，轴向分辨力优于10 nm，横向分辨力优于25 nm，线性较好。开发的测头结构简单、分辨力高、体积小、成本低，可集成到纳米测量定位平台（NMM），完成具有大范围、亚微米或纳米级精度要求的测量任务。

Abstract

It is difficult to measure large size components in higher precision and a 3D mode in the micro-nano geometrical measurement. Therefore

a high resolution

small sized capacitance sensor was fabricated based on non-silicon Micro-electronic-mechanical system(MEMS) technology. By designing the packaging and weak-capacitance acquisition system of the sensor

a capacitance-based micro tactile probe was developed to measure the 3D dimensions in micro/nano scale. Then

a 3D micro displacement platform was designed to test and calibrate the probe. The macro-micro combination drive mode was used to design the stage and its moving range is 25 mm25 mm10 mm and the uniaxial resolution in 12 m range is 1 nm. Finally

the range

linearity

hysteresis and resolution of the probe were tested. Results show that the axial range is 4.5 m

the lateral range is greater than 5 m

the axial resolution and the lateral resolution of the probe are less than 10 nm and 25 nm

respectively. The experiments show that the probe has a good linearity and its advantages are simple structure

high resolution

small volume and low costs. The probe developed can be integrated to the nano measuring and positioning machine (NMM) to complete required measurement tasks in large ranges and sub-micrometer or nanometer level accuracy.

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Keywords

references

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