误差分离技术在平面镜瑞奇-康芒法检测中的应用

朱硕; 张晓辉

doi:10.3788/OPE.20142201.0007

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误差分离技术在平面镜瑞奇-康芒法检测中的应用

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- 误差分离技术在平面镜瑞奇-康芒法检测中的应用
- Application of error detaching to Ritchey-Common test for flat mirrors
- 光学精密工程 2014年22卷第1期页码：7-12
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院大学北京,中国,100049
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2012AA040503)();国家自然科学基金重点项目(No.11034007)()
- DOI：10.3788/OPE.20142201.0007
  中图分类号： TH706
- 收稿日期：2012-07-02，
  
  纸质出版日期：2014-01-15
- 稿件说明：
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朱硕, 张晓辉,. 误差分离技术在平面镜瑞奇-康芒法检测中的应用[J]. 光学精密工程, 2014,22(1): 7-12

ZHU Shuo, ZHANG Xiao-hui,. Application of error detaching to Ritchey-Common test for flat mirrors[J]. Editorial Office of Optics and Precision Engineering, 2014,22(1): 7-12
朱硕, 张晓辉,. 误差分离技术在平面镜瑞奇-康芒法检测中的应用[J]. 光学精密工程, 2014,22(1): 7-12 DOI： 10.3788/OPE.20142201.0007.

ZHU Shuo, ZHANG Xiao-hui,. Application of error detaching to Ritchey-Common test for flat mirrors[J]. Editorial Office of Optics and Precision Engineering, 2014,22(1): 7-12 DOI： 10.3788/OPE.20142201.0007.

摘要

为了提高瑞奇-康芒法检测平面镜面形误差的精度

提出了利用检测系统光瞳面与被检平面镜表面的坐标映射关系插值拟合平面镜面形的方法。结合最小二乘法分析

解算了由光路调整引入的离焦误差

获得了更为真实的平面镜面形误差。理论仿真分析显示

此方法的平面镜测量误差可控制在

/100(

=632.8 nm)量级。对口径为40 mm的小口径平面镜进行了实际检测

检测过程中通过多角度旋转被测平面镜

利用坐标映射关系和幅值转换关系对测试波前进行恢复

在分离系统离焦误差后得到被检平面镜面形RMS值为0.018 6

与干涉仪直接检测得到的RMS值0.021

相比

残差为0.002 4

。实验结果证明了此种误差分离技术在瑞奇-康芒法对平面镜面形检测时的有效性与准确性。

Abstract

To improve the accuracy of Ritchey-Common test for a flat mirror

a new method to use the relationship between the system pupil coordinate and the test mirror coordinate to interpolate and fit the test mirror surface was proposed. On the basis of the least square method

the system defocus error and surface error in two test angles were detached to gain a more actual flat surface error. The simulation analysis shows that the test error can be controlled under

/100(

=632.8 nm). A flat mirror with a diameter of 40 mm was tested. In the test process

the test flat mirror was rotated with different angels and the wavefront was reconstructed through the relationship between coordinate mapping and amplitude conversion. The obtained results show that the RMS of the test mirror surface is 0.018 6

after detaching the defocus error of the system. As compared with the test RMS of 0.021

from an interferometer

the residual error is 0.002 4

. Experiment results indicate that this error detaching method is valid and accurate in the Ritchey-Common test for flat mirrors.

关键词

Keywords

references

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