柔性铰链微定位平台的设计

马立; 谢炜; 刘波; 孙立宁

doi:10.3788/OPE.20142202.0338

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柔性铰链微定位平台的设计

微纳技术与精密机械 | 更新时间：2020-08-13

- 柔性铰链微定位平台的设计
- Design of micro-positioning stage with flexure hinge
- 光学精密工程 2014年22卷第2期页码：338-345
- 作者机构：
  
  1. 上海大学机电工程与自动化学院上海,200072
  2. 哈尔滨工业大学机器人技术与系统国家重点实验室,黑龙江哈尔滨,150080
  3. 苏州大学机器人与微系统研究中心,江苏苏州,215021
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142202.0338
  中图分类号： TP242
- 收稿日期：2013-10-11，
  
  纸质出版日期：2014-02-20
- 稿件说明：
移动端阅览
马立,谢炜,刘波等. 柔性铰链微定位平台的设计[J]. 光学精密工程, 2014,22(2): 338-345

MA Li, XIE Wei, LIU Bo etc. Design of micro-positioning stage with flexure hinge[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 338-345
马立,谢炜,刘波等. 柔性铰链微定位平台的设计[J]. 光学精密工程, 2014,22(2): 338-345 DOI： 10.3788/OPE.20142202.0338.

MA Li, XIE Wei, LIU Bo etc. Design of micro-positioning stage with flexure hinge[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 338-345 DOI： 10.3788/OPE.20142202.0338.

摘要

设计了一种以平行板铰链机构进行导向

以桥式机构进行位移放大的新型压电陶瓷驱动微定位平台。应用弹性力学和材料力学理论建立该平台的桥式放大机构和平行板铰链机构的理论模型

分析了平台的驱动力、输出位移、刚度和固有频率

并运用Matlab软件优化了桥式机构铰链长度、厚度

平行板铰链长度及厚度等几何参数

获得了微定位平台的最优值。对优化后的结果进行了有限元仿真

并搭建了测试系统对平台性能进行了测试。测试结果显示

理论分析与实验结果的最大误差为9.8%

有限元分析与实验结果的最大误差为4.2%

得到的结果验证了理论分析和有限元分析的正确性

实现了平台体积小

放大倍数高

位移输出大的设计目标。

Abstract

A micro-positioning stage driven by a piezoelectric ceramic is developed

which adopts a bridge-type flexure hinge mechanism to realize displacement amplification and uses a parallel board hinge mechanism to guide. Based on elastic mechanics and material mechanics

the theoretical models of bridge-type flexure hinge and parallel board hinge mechanisms are established and the driving force

output displacement

stiffness and natural frequency of the stage are analyzed. The Matlab software is used to optimize the geometric parameters

including the length and thickness of the bridge-type flexure hinge

and those of the parallel board hinge

By which the optimized parameters are obtained. The micro-positioning stage after optimization is simulated by Finite Element Analysis(FEA) and a test system is constructed to measure the micro-positioning stage . The experimental results show that the largest error between theoretical analysis and experimental result is 9.8%

and the largest error between FEA and experimental result is 4.2%

which verifies the accuracy of theoretical analysis and FEA

and achieves the stage design objective in smaller volumes

higher amplification and large displacement outputs.

关键词

Keywords

references

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