微流体数字化技术制备聚合物微透镜阵列

朱晓阳; 侯丽雅; 郑悦; 王洪成; 章维一

doi:10.3788/OPE.20142202.0360

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微流体数字化技术制备聚合物微透镜阵列

微纳技术与精密机械 | 更新时间：2020-08-13

- 微流体数字化技术制备聚合物微透镜阵列
- Fabrication of polymer micro-lens array by micro-fluid digitalization
- 光学精密工程 2014年22卷第2期页码：360-368
- 作者机构：
  
  南京理工大学机械工程学院,江苏南京,中国,210094
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142202.0360
  中图分类号： Q819;TP273
- 收稿日期：2013-10-19，
  
  纸质出版日期：2014-02-20
- 稿件说明：
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朱晓阳,侯丽雅,郑悦等. 微流体数字化技术制备聚合物微透镜阵列[J]. 光学精密工程, 2014,22(2): 360-368

ZHU Xiao-yang, HOU Li-ya, ZHENG Yue etc. Fabrication of polymer micro-lens array by micro-fluid digitalization[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 360-368
朱晓阳,侯丽雅,郑悦等. 微流体数字化技术制备聚合物微透镜阵列[J]. 光学精密工程, 2014,22(2): 360-368 DOI： 10.3788/OPE.20142202.0360.

ZHU Xiao-yang, HOU Li-ya, ZHENG Yue etc. Fabrication of polymer micro-lens array by micro-fluid digitalization[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 360-368 DOI： 10.3788/OPE.20142202.0360.

摘要

基于微流体数字化技术搭建了聚合物微透镜阵列按需喷射制备实验系统。以UV固化胶为喷射材料

将其按需喷射到镀有疏水化薄膜的玻璃基片上

在界面张力和疏水化效应的作用下

形成平凸状的微液滴

再经紫外光固化后形成微透镜阵列。实验研究了系统参量对稳定微喷射与微透镜直径的影响

稳定微喷射出了黏度值为50×10

-3

Pa·s的UV胶

制得了最小直径达25 μm的微透镜

进而制备出了直径变异系数C·V达0.64%、焦距均匀性误差为1.7%的15×15微透镜阵列。微透镜在扫描电子显微镜下具有较好的表面形貌

采用白光干涉/轮廓仪(VSI模式)测得其轮廓算术平均偏差

为247.99 nm(扫描区域:29.4 μm×39.3 μm)

扫描区域轮廓曲线平滑。通过微透镜阵列的成像实验

得到了微透镜阵列所成的清晰实像。实验结果表明

采用微流体数字化技术进行聚合物微透镜阵列的按需喷射制备过程简单、成本低廉、工艺参数稳定;制备的微透镜阵列几何与光学性能优越。

Abstract

On the basis of the digitalization of microfluids technology

an experimental system for the drop-on-demand (DOD) jetting fabrication of micro-lens array was constructed. The UV-curable adhesive was taken as the jetting material and it was jetted on the glass substrate coated with the hydrophobic film. Then

liquid plano convex micro-droplet could be formed on the glass substrate by surface tension and hydrophobic effect

and the micro-lens array was obtained after the UV light polymerization at a room temperature. The influences of the system parameters on the stable micro-jetting and the diameter of micro-lens were researched. Results show that the UV-curable adhesive with a viscosity of 50×10

-3

Pa·s can be obtained in stable micro-jetting and the micro-lens with a diameter of 25 μm is prepared. Furthermore

a 15 × 15 micro-lens array is obtained by experiments with the coefficient of variation diameter of 0.64% and non-uniformity of the focal length of 1.7%. The micro-lens shows a good surface morphology in a Scanning Electron Microscopy(SEM) and its surface roughness is 247.69 nm (scanning area: 29.4 μm×39.3 μm) by the white light interferometer (VSI mode) and the profile curves of the scanning area are smooth. Through the projection image experiment of the micro-lens

the clear real image of the micro-lens array is obtained. Experimental results indicate that the DOD jetting fabrication of the micro-lens array based on the digitalization of microfluids technology has advantages of simple process

low costs

stable process parameters and the micro-lens has good geometry and optical performance.

关键词

Keywords

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数字化微喷射技术制备聚合物薄膜电阻

微流体数字化技术制备基因芯片微阵列