微磨削锥塔结构光滑表面的自适应方向检测与微加工精度

谢晋; 刘旭冉; 吴可可; 李萍; 卢泳贤

doi:10.3788/OPE.20142202.0376

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微磨削锥塔结构光滑表面的自适应方向检测与微加工精度

微纳技术与精密机械 | 更新时间：2020-08-13

- 微磨削锥塔结构光滑表面的自适应方向检测与微加工精度
- Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface
- 光学精密工程 2014年22卷第2期页码：376-382
- 作者机构：
  
  华南理工大学机械与汽车工程学院,广东广州,510640
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142202.0376
  中图分类号： TG115.5;TH744.3
- 收稿日期：2013-09-20，
  
  纸质出版日期：2014-02-20
- 稿件说明：
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谢晋,刘旭冉,吴可可等. 微磨削锥塔结构光滑表面的自适应方向检测与微加工精度[J]. 光学精密工程, 2014,22(2): 376-382

XIE Jin, LIU Xu-ran, WU Ke-ke etc. Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 376-382
谢晋,刘旭冉,吴可可等. 微磨削锥塔结构光滑表面的自适应方向检测与微加工精度[J]. 光学精密工程, 2014,22(2): 376-382 DOI： 10.3788/OPE.20142202.0376.

XIE Jin, LIU Xu-ran, WU Ke-ke etc. Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 376-382 DOI： 10.3788/OPE.20142202.0376.

摘要

用白光干涉检测(WLI)法检测微结构表面形貌时

其光滑结构面和边角数据很容易丢失

因此本文提出了自适应方向WLI检测法。该方法分别沿着每个微斜面法向进行自适应方向检测

评价分析其面形、特征轮廓和特征点的加工精度。首先

采用#3000金刚石砂轮微细尖端在Si表面加工出高度为50 μm、宽度为56 μm且光滑的微锥塔结构。然后

利用四次检测点云对微磨削表面进行拼接与重建。最后

分析面形误差、特征轮廓误差和特征点误差。实验显示:自适应方向WLI检测可以重构出完整的微锥塔结构表面

微磨削的面形误差为5.3 μm

表明该微磨削技术可以确保微锥塔结构光滑Si表面的加工精度。但是

对微锥塔结构表面特征轮廓误差及特征点误差的评价表明

特征轮廓误差高达7.7 μm

而特征点误差约为15 μm

约为面形误差的3倍。分析认为这些误差是由微金刚石砂轮V形尖端磨钝及微磨粒钝化造成的。

Abstract

When a White Light Interferometry (WLI) is used to measure the micro-structured surface topography

the measured points on smooth micro-structured surfaces and edges are easy to lose. Therefore

an adaptive-orientation WLI was proposed. The method measured each steep surface along its near normal-orientation for the evaluation of its surface shape

feature profile and micro-machining accuracy. First

a #3000 diamond wheel V-tip was employed to fabricate a micro-pyramid-structure Si surface with a depth of 50 μm and a width of 56 μm. Then

four adaptive-orientation measured point clouds were used to splice and reconstruct whole micro-ground surface. Finally

the micro-ground form error

feature profile error and the feature point error were investigated. Experiments show that the adaptive-orientation measurement can reconstruct integrated micro-pyramid-structured surface and the form error is 5.3 μm

which means that the micro-grinding may assure the machining accuracy of micro-pyramid-structured Si surface. In contrast

the evaluation for the feature profiles and feature points of a micro-pyramid-structure indicates that the feature profile error reaches 7.7 μm

and the feature point error is about 15 μm

which is about 3 times of its form error. It suggests that these errors come from the passivations of diamond wheel V-tip and micro grains.

关键词

Keywords

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