通道型电磁常闭微阀结构参数优化

施镠佳; 董景新; 谭映军; 叶雄英; 王春艳

doi:10.3788/OPE.20142202.0406

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通道型电磁常闭微阀结构参数优化

微纳技术与精密机械 | 更新时间：2020-08-13

- 通道型电磁常闭微阀结构参数优化
- Optimization of structure parameters of channel-type electromagnetic microvalves
- 光学精密工程 2014年22卷第2期页码：406-413
- 作者机构：
  
  1. 清华大学精密仪器系北京,100084
  2. 中国航天员科研训练中心北京,100094
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142202.0406
  中图分类号： TH134.1
- 收稿日期：2013-09-20，
  
  纸质出版日期：2014-02-20
- 稿件说明：
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施镠佳,董景新,谭映军等. 通道型电磁常闭微阀结构参数优化[J]. 光学精密工程, 2014,22(2): 406-413

SHI Liu-jia,DONG Jing-xin,TAN Ying-jun etc. Optimization of structure parameters of channel-type electromagnetic microvalves[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 406-413
施镠佳,董景新,谭映军等. 通道型电磁常闭微阀结构参数优化[J]. 光学精密工程, 2014,22(2): 406-413 DOI： 10.3788/OPE.20142202.0406.

SHI Liu-jia,DONG Jing-xin,TAN Ying-jun etc. Optimization of structure parameters of channel-type electromagnetic microvalves[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 406-413 DOI： 10.3788/OPE.20142202.0406.

摘要

优化了通道型电磁常闭微阀的结构参数

以提高其工作性能。基于近似结构模型对结构参数进行理论分析;以泄漏率为指标

利用有限元方法仿真分析了微通道的宽度、高度

底膜厚度

顶膜厚度及电磁驱动机构压力等主要结构参数对泄漏率的影响。提取了经验公式

基于正交实验法研究了结构参数对泄漏率和开启率的影响。最后

结合理论分析、仿真和正交实验结果对微阀结构参数进行了优化。实验结果表明

通道高度和宽度对泄漏率影响最大

通道高度对开启率影响最大。获得最优开闭性能的结构参数组合为:通道宽度1 mm

高度0.1 mm

底膜厚度0.2 mm

顶膜厚度0.2 mm

电磁机构压力3×10

Pa。基于该结构参数组合的微阀在10 kPa内可以实现零泄漏及近似完全开启。该阀具有易与微流控芯片集成、低电压驱动、制作简单、无死体积等优点。

Abstract

The structure parameters of a channel-type electromagnetic normally-closed microvalve were optimized to improve its performance. Firstly

the structure parameters were analyzed theoretically based on an approximate structure model. The impacts of main structure parameters on the leakage rate

such as the width and height of a microchannel

the thicknesses of bottom and top films

and the pressure generated by a electromagnetic mechanism were analyzed based on the Finite Element Simulation(FES)

and then a empirical formula was established. On the orthogonal experiment method

the influences of the structure parameters on the leakage rate and the open rate were also researched. Finally

the structure parameters of the microvalve were optimized according to the theoretical analysis

FES and the experiment results. The experimental results show that the width and height of the microchannel have the effect on the leakage rate greatly

and the channel height effects on the open rate most.Furthermore

the optimal structure parameters of the microvalve are the width and height to be 1 mm and 0.1 mm

the bottom and top film thicknesses both to be 0.2 mm

and the pressure to be 3×10

respectively. On the parameters mentioned above

the microvalve has no detectable leakage flow when the backpressure is up to 10 kPa. The microvalve shows its advantages on the low-voltage driving

zero dead volume

simple process and easy to integrate with microfluidic devices.

关键词

Keywords

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