分波段式中阶梯光栅原子发射光谱仪

朱文煜; 陈少杰; 撖芃芃; 崔继承; 曹海霞; 巴音贺希格; 齐向东; 唐玉国

doi:10.3788/OPE.20142204.0870

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分波段式中阶梯光栅原子发射光谱仪

现代应用光学 | 更新时间：2020-08-13

- 分波段式中阶梯光栅原子发射光谱仪
- Echelle-emission spectrometer with divided spectral coverage
- 光学精密工程 2014年22卷第4期页码：870-876
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院大学北京,中国,100049
  3. 长春光机医疗仪器有限公司, 中国科学院长春光学精密机械与物理研究所,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（No. 61108032）();国家重大科研装备研制资助项目（No. ZDYZ2008-1）();中国科学院重大科研装备研制资助项目（No.
- DOI：10.3788/OPE.20142204.0870
  中图分类号： TH744.1
- 收稿日期：2013-01-17，
  
  修回日期：2013-02-21，
  
  纸质出版日期：2014-04-25
- 稿件说明：
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朱文煜, 陈少杰, 撖芃芃等. 分波段式中阶梯光栅原子发射光谱仪[J]. 光学精密工程, 2014,22(4): 870-876

ZHU Wen-yu, CHEN Shao-jie, HAN Peng-peng etc. Echelle-emission spectrometer with divided spectral coverage[J]. Editorial Office of Optics and Precision Engineering, 2014,22(4): 870-876
朱文煜, 陈少杰, 撖芃芃等. 分波段式中阶梯光栅原子发射光谱仪[J]. 光学精密工程, 2014,22(4): 870-876 DOI： 10.3788/OPE.20142204.0870.

ZHU Wen-yu, CHEN Shao-jie, HAN Peng-peng etc. Echelle-emission spectrometer with divided spectral coverage[J]. Editorial Office of Optics and Precision Engineering, 2014,22(4): 870-876 DOI： 10.3788/OPE.20142204.0870.

摘要

受探测器发展水平的限制，以中阶梯光栅光谱仪为分光模块的ICP-AES电感耦合等离子体原子发射光谱仪（ICP-AES）难以实现宽波段内多元素的同时测量。本文对现有中阶梯光栅光谱仪进行了改进，设计出一种适用于ICP-AES多元素同时测量的分波段式中阶梯光栅光谱仪。通过改变棱镜的入射角度，将系统波长扩展为200~900 nm，光谱分辨率为25 000，突破了现有探测器尺寸的限制，实现了宽波段范围内的多元素快速测量。将中阶梯光栅光谱仪与固态ICP光源组合，进行了系统波长标定与化学试样测试。实验结果表明：波长测试误差小于0.01 nm，满足化学元素精确判读要求；分波段式中阶梯光栅光谱仪在保持原有仪器性能的前提下，增宽了仪器的有效光谱探测范围，为多元素的同时测量提供了有效手段。

Abstract

Limited by the development of detectors

the Inductively Coupled Plasma Atomic Emission Spectrometry(ICP-AES) based on an echelle spectrograph is difficult to complete the multiple element measurement at a wider spectral coverage. This paper focuses on the improvement of an existing echelle spectrograph. It designs a new wider band echelle spectrograph suitable for ICP-AES to measure multiple elements simultaneously. By changing the incident angle of the prism

the wavelength of system is extented 200-900 nm with a spectral resolution of 25 000

which breaks the limitation of existing detector sizes

and realizes rapid and simultaneous measurement for multiple elements at a wider spectral range.By combination the Echelle spectrograph and a ICP

several specimens are measured and analyzed. Experiments show that the ICP-AES with Echelle spectrograph is available to detect multiple elements within a short time correctly

and the wavelength precision is better than 0.01 nm. The wavelength range

optical spectral resolution and the precision of wavelength calibration of the Echelle spectrograph meet the design needs.

关键词

Keywords

references

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