类陨石坑表面类金刚石薄膜的制备及摩擦特性

郑锦华; 张冲; 晁云峰; 李聪慧

doi:10.3788/OPE.20142204.0934

您当前的位置：

首页 >

文章列表页 >

类陨石坑表面类金刚石薄膜的制备及摩擦特性

微纳技术与精密机械 | 更新时间：2020-08-13

- 类陨石坑表面类金刚石薄膜的制备及摩擦特性
- Deposition and friction properties of DLC films with micro-crater-like structures
- 光学精密工程 2014年22卷第4期页码：934-941
- 作者机构：
  
  1. 郑州大学化工与能源学院,河南郑州,450001
  2. 河南瑞邦能源科技开发有限公司,河南郑州,450001
- 作者简介：
- 基金信息：
  
  河南省科技创新杰出人才计划资助项目（No.114100510025）();郑州市科技领军人才项目（No.131PLJRC639）()
- DOI：10.3788/OPE.20142204.0934
  中图分类号： O484.2;TN304.055
- 收稿日期：2013-12-04，
  
  修回日期：2014-01-23，
  
  纸质出版日期：2014-04-25
- 稿件说明：
移动端阅览
郑锦华, 张冲, 晁云峰等. 类陨石坑表面类金刚石薄膜的制备及摩擦特性[J]. 光学精密工程, 2014,22(4): 934-941

ZHENG Jin-hua, ZHANG Chong, CHAO Yun-feng etc. Deposition and friction properties of DLC films with micro-crater-like structures[J]. Editorial Office of Optics and Precision Engineering, 2014,22(4): 934-941
郑锦华, 张冲, 晁云峰等. 类陨石坑表面类金刚石薄膜的制备及摩擦特性[J]. 光学精密工程, 2014,22(4): 934-941 DOI： 10.3788/OPE.20142204.0934.

ZHENG Jin-hua, ZHANG Chong, CHAO Yun-feng etc. Deposition and friction properties of DLC films with micro-crater-like structures[J]. Editorial Office of Optics and Precision Engineering, 2014,22(4): 934-941 DOI： 10.3788/OPE.20142204.0934.

摘要

为了提高DLC（Diamond-like Carbon）类金刚石薄膜与SAE1060碳素钢基材的结合强度，以延长发动机活塞环的使用寿命，研制了一种带有复合阳极的RF-DCCVD双电源化学气相沉积设备。利用锯齿结构的辅助阳极产生尖端放电，制备了具有微米类陨石坑非连续结构的DLC薄膜，并利用Ball-on-Disk摩擦评价试验机评价了薄膜的摩擦特性。着重研究了极间距S -T对薄膜表面类陨石坑密度的影响；最后利用拉曼光谱仪分析了薄膜结构和成分。结果表明：在同样的电压下，类陨石坑的密度随着电极间距的增加而减小，最佳电极间距S -T为40~60 mm，此时不仅具有比较适中的类陨石坑密度，对DLC薄膜的摩擦特性影响不大，而且具有较强的界面结合强度。当S-T为50 mm，施加载荷为3 N时，薄膜的破坏寿命达到了130万循环，比光滑表面的薄膜延长了30万循环。得到的结果显示微米类陨石坑非连续结构能够有效地释放膜内的残余压缩应力，延长SAE1060碳素钢基材上沉积类金刚石薄膜的使用寿命。

Abstract

To enhance the adhesive strength between a Diamond-like Carbon(DLC) film and a SAE1060 substrate and to prolong the service life of engine piston rings

the RF-DCCVD dual power chemical vapor deposition equipment with a composite anode was developed. The auxiliary anode with zigzag was used to produce cutting-edge discharge

and the DLC films with micro-crater-like structures were formed. Then

the friction properties of the films were experimentally evaluated with a "Ball-on-Disk" wear testing machine. The effects of electrode spacing S-T on the density of the micro-crater-like on the surface of the films were studied and the structure and composition were determined by a Raman spectrometer. The experimental results indicate that the micro-crater-like density on the surface of DLC films decreases with the increase of the electrode spacing (S-T) under the same voltage. The best electrode spacing is 40-60 mm

in which there is a relatively moderate micro-crater-like density

a relatively strong adhesive strength at the interface and little effect on the friction characteristics. When S-T is 50 mm or so

there is a maximum in the failure lifetime

which reaches approximately 1.3 million cycles as applying the load of 3 N

and 300

000 cycles are increased over films with a smooth surface. In conclusion

the micro-crater-like discontinuous structures effectively reduce the residual compressive stress within films

and the failure life of DLC films deposited on SAE1060 substrates is effectively prolonged.

关键词

Keywords

references

SUNDARAM V S. Diamond like carbon film as a protective coating for high strength steel and titanium alloy[J]. Surface & Coatings Technology, 2006, 201(6): 2707-2711.

LIU X F, WANG L P, LU Z B, et al. Vacuum tribological performance of DLC-based solid-liquid lubricating coatings: Influence of sliding mating materials[J]. Wear, 2012, 292-293: 124-134.

MIYAKE S, SHINDO T, SUZUKI M. Nanomechanical and boundary lubrication properties of titanium carbide and diamond-like carbon nanoperiod multilayer and nanocomposite films[J]. Surface & Coatings Technology, 2013, 221:124-132.

BOLELLI G, LUSVARGHI L, MANTINI F P, et al. Enhanced tribological properties of PECVD DLC coated thermally sprayed coatings[J]. Surface and Coatings Technology, 2008, 202(18):4382-4386.

YU X, NING Z W, HUA M, et al. Influence of silver incorporation on toughness improvement of diamond-like carbon film prepared by ion beam assisted deposition[J]. Journal of Adhesion, 2013, 89(7):578-593.

PAPPAS D L, SAENGER K L, BRULEY J, et al. Pulsed laser deposition of diamond-like carbon films[J].Journal of Applied Physics, 1992, 71(11): 56-75.

张华, 杨坚, 杨玉卫, 等. RF-PECVD制备类金刚石膜的研究[J]. 真空, 2012, 49(4): 44-46. ZHANG H, YANG J, YANG Y W, et al. Study of diamond-like carbon coatings prepared by RF-PECVD[J]. Vacuum, 2012, 49(4): 44-46. (in Chinese)

NAKAJIMA M, UEMATSU Y, KAKIUCHI T, et al. Effect of quantity of martensitic transformation on fatigue behavior in type 304 stainless steel[C]. 11th International Conference on the Mechanical Behavior of Materials, Como, 2011, 10: 299-304.

MAHESWARAN R, SIVARAMAN R, MAHAPATRA O, et al. Surface studies of diamond-like carbon films grown by plasma-enhanced chemical vapor deposition[J]. Surface and Interface Analysis, 2010, 42(12-13):1702-1705.

BOBZIN K, BAGCIVAN N, THEISS S, et al. Behavior of DLC coated low-alloy steel under tribological and corrosive load: Effect of top layer and interlayer variation[J]. Surface &coatings technology, 2012, 215:110-118.

郑锦华, 李聪慧, 张冲, 等. 不同基材上类金刚石薄膜的摩擦特性[J]. 光学精密工程, 2013, 21(6):1545-1552. ZHENG J H, LI C H, ZANG CH, et al. Friction properties of DLC films on different metal substrates[J]. Opt. Precision Eng., 2013, 21(6):1545-1552. (in Chinese)

GAYATHRI S, KUMAR N, KRISHNAN R, et al. Tribological properties of pulsed laser deposited DLC/TM (TM=Cr, Ag, Ti and Ni) multilayers[J]. Tribology International, 2012, 53: 87-97.

ZHENG J H, KATO M, NAKASA K. Effect of intermediate layer on wear-delamination life of low-frictional SiC-2.6mass% Ti film sputter-deposited on titanium substrate[J]. Surface & Coatings Technology, 2010, 205: 2532-2537.

郑锦华. 高界面强度类金刚石薄膜材料的常温沉积设备及方法. 中国:ZL 1 0599609, 2011. ZHENG J H. Deposition equipment and method of DLC films with high interfacial strength at room temperature. China:ZL 1 0599609, 2011. (in Chinese)

ZHENG J H, CHEN Y. A study on interface strength of a-Si:H-DLC film[J]. Advanced Materials Research, 2011, 179-180: 775-80.

ZHENG J H, CHAO Y F, ZHANG C, et al. Design on ultrahigh vacuum system with titanium pump[J]. Advanced Materials Research, 2013, 702:286-290.

郑锦华. 高界面强度类金刚石薄膜材料的常温沉积设备[P]. 中国: ZL 2010 2 0673327.2, 2011. ZHENG J H. Deposition equipment of DLC films with high interfacial strength at room temperature[P]. China:ZL 2010 2 0673327.2, 2011. (in Chinese)

张三慧, 藏庚媛, 华基美. 大学物理·电磁学[M]. 第一版, 北京:清华大学出版社, 1991: 42-82. ZHANG S H, ZHANG G Y, HUA J M. College Physics·Electromagnetics[M]. Beijing: Tsinghua University Press, 1991: 42-82. (in Chinese)

FERRARI A C. Determination of bonding in diamond-like carbon by Raman spectroscopy[J]. Diamond Related Material, 2002, 11(3-6):1053-1061.

DOMINGUES M R, MOUSINHO A P. Micro-Raman spectroscopy as a tool to analyze mechanical stress in nano-structured diamond-like carbon films[J]. Physica Status Solidi C, 2012, 9(6):1431-1434.

MABUCHI Y, HIGUCHI T, WEIHNACHT V. Effect of sp2/sp3 bonding ratio and nitrogen content on friction properties of hydrogen-free DLC coatings[J]. Tribology International, 2013, 62:130-140.

浏览量

536

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

压力传感器波纹膜片低应力激光焊接工艺

单晶硅激光辅助超精密切削工艺优化与表面特性

脉冲激光沉积薄膜的残余应力测量

7075铝合金厚板淬火残余应力的测试与分析

超润滑石墨表面的光谱表征研究