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中国科学院 长春光学精密机械与物理研究所,吉林 长春,中国,130033
[ "王富国(1979- ),男,山东单县人,博士,副研究员,主要研究方向为大型望远镜光机系统的设计与仿真。E-mail:wfg109@163.com" ]
[ "安其昌(1988- ),男,山西太原人,硕士研究生,2011年于中国科学技术大学获得学士学位,主要从事空间机构学的研究。E-mail:anjj@mail.ustc.edu.cn" ]
收稿日期:2013-01-30,
修回日期:2013-03-12,
纸质出版日期:2014-05-25
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王富国, 安其昌,. 30m望远镜三镜镜面面形误差的斜率均方根评价[J]. 光学精密工程, 2014,22(5): 1171-1175
WANG Fu-guo, AN Qi-chang,. Evaluation of mirror surface figures for TMT based on SlopeRms[J]. Editorial Office of Optics and Precision Engineering, 2014,22(5): 1171-1175
王富国, 安其昌,. 30m望远镜三镜镜面面形误差的斜率均方根评价[J]. 光学精密工程, 2014,22(5): 1171-1175 DOI: 10.3788/OPE.20142205.1171.
WANG Fu-guo, AN Qi-chang,. Evaluation of mirror surface figures for TMT based on SlopeRms[J]. Editorial Office of Optics and Precision Engineering, 2014,22(5): 1171-1175 DOI: 10.3788/OPE.20142205.1171.
由于传统的均方根方法在评价大口径反射镜时难以精确表达光学表面的中空间频率误差,本文提出了基于斜率均方根(SlopeRms)的误差评价方法来评价光学表面面形。该方法先以Zernike多项式拟合光学表面面形,在此基础上求解不同空间间隔上的斜率均方根。这种评价方法可以很好地区分小尺寸磨削工具造成的误差和大口径反射镜在多点支撑下造成的面形误差。文中建立了SlopeRms的数学模型,推导了SlopeRms的计算方法,并以此方法为基础对30m望远镜(TMT)三镜面形进行了评价。结果显示,采用斜率均方根的评价方法得到的光学表面面形值达到0.9μrad,优于传统的RMS评价方法(RMS=115nm),满足设计要求。结果显示,基于斜率均方根的误差评价方法能更加全面和客观地评价大口径反射镜面形,具有实际意义。
As the traditional method based on Root Mean Square(RMS) is hard to accurately express middle spatial frequency errors of an optical surface in evaluation of a large aperture telescope
this paper proposes a new method based on SlopeRms to evaluate the optical surface. The method solves the SlopeRms in different space intervals after fitting the optical surface figure by Zernike polynomial. It can better quantify the small scale irregularities and the surface figure error from a smaller size grinding tool or from an aperture mirror surface figure error in multi-point support. The mathematical model of SlopeRms is established
how to calculate the SlopeRms is deduced and then the surface figure for TMT(Thirty Meter Telescope) tertiary mirror is evaluated by the proposed method. The obtained results show that the mirror surface figure error is 0.9 μrad
which is better than that of traditional method (RMS=115 nm) and meets the design requirement.It means that the method based on SlopeRms can objectively evaluate the mirror surface figure error for a large aperture telescope.
张丽敏, 张斌, 杨飞. 主动光学系统力促动器得设计和测试[J]. 光学 精密工程, 2012, 20(1):38-44. ZHANG L M, ZHANG B, YANG F.Design and test of force actuator in active optical system [J].Opt.Precision Eng., 2012, 20(1):38-44.(in Chinese)
毕勇, 翟嘉, 吴金虎, 等. 一种光学仪器镜面面形的处理方法[J]. 光学技术, 2009, 35(1).10-17. BI Y, ZHAI J, WU J H, et al.One method for mirror surface figure treatment in optical instrument[J].Optical Technique, 2009, 35(1).10-17.(in Chinese)
王栋, 杨洪波, 陈长征. 光学表面面形的计算机仿真[J]. 计算机仿真, 2007, 24(2):298-301. WANG D, YANG H B, CHEN CH ZH.Computer simulation of the optical surface[J].Computer Simulation, 2007, 24(2):298-301.(in Chinese)
WOLFGANG D.RMS slope of exponentially correlated surface roughness for radar applications [J].IEEE Transactions on Geoscience and Remote Sensing, 2000, 3(38):1451-1454.
ZHELEM R.Specification of optical surface accuracy using the structure function [J].SPIE,2011,8083:808310-1-10.
张伟, 刘剑峰, 龙夫年, 等. 基于Zernike多项式进行波面拟合研究[J]. 光学技术, 2005, 31(5) 675-678. ZHANG W, LIU J F, LONG F N, et al.Study on wavefront fitting using Zernike polynomials[J].Optical Technique, 2005, 31(5):675-678.(in Chinese)
林旭东, 刘欣悦, 王建立, 等. 137单元变形镜的性能测试即校正能力实验[J]. 光学 精密工程, 2013, 21(2):267-273. LIN X D, LIU X Y, WANG J L, et al.Performent of correction capability of 137-element deformable mirror[J].Opt.Precision Eng. , 2013, 21(2):267-273.(in Chinese)
张景旭. 地基大口径望远镜系统结构技术综述[J]. 中国光学, 2012, 5(4):327-336. ZHANG J X.Overview of structure of technologies of large aperture ground based telescope [J].Chinese Optics, 2012, 5(4):327-336.(in Chinese)
倪明阳, 巩岩. 光刻投影物镜光学元件运动学支撑结构的设计与分析[J]. 中国光学, 2012, 5(5):476-483. NI M Y, GONG Y.Design and analysis of kinematic lens positioning structure in lithographic projection objective[J].Chinese Optics, 2012, 5(5):476-483.(in Chinese)
邵亮, 杨飞, 王富国, 等. 1.2 m 轻量化SiC 主镜支撑系统优化设计[J]. 中国光学, 2012, 5(3):229-234. SHAO L, YANG F, WANG F G, et al..Design and optimization of supporting system for 1.2 m light weight SiC primary mirror [J].Chinese Optics, 2012, 5(3):229-234.(in Chinese)
Tertiary Mirror Surface Figure Specification [Z].TMT.Opt.Spe.12.001.DRF02,2012.
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