平行双关节坐标测量机的标定及不确定度评价

夏桂锁; 廖城; 伏燕军

doi:10.3788/OPE.20142205.1227

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平行双关节坐标测量机的标定及不确定度评价

微纳技术与精密机械 | 更新时间：2020-08-13

- 平行双关节坐标测量机的标定及不确定度评价
- Calibration and uncertainty evaluation of double parallel-joint coordinate measuring machine
- 光学精密工程 2014年22卷第5期页码：1227-1234
- 作者机构：
  
  南昌航空大学无损检测教育部重点实验室,江西南昌,330063
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（No.51365045）();南昌航空大学博士启动基金资助项目（No.EA201308039）()
- DOI：10.3788/OPE.20142205.1227
  中图分类号： TP242;TH721.1
- 收稿日期：2013-11-12，
  
  修回日期：2013-12-21，
  
  纸质出版日期：2014-05-25
- 稿件说明：
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夏桂锁, 廖城, 伏燕军. 平行双关节坐标测量机的标定及不确定度评价[J]. 光学精密工程, 2014,22(5): 1227-1234

XIA Gui-suo, LIAO Cheng, FU Yan-jun. Calibration and uncertainty evaluation of double parallel-joint coordinate measuring machine[J]. Editorial Office of Optics and Precision Engineering, 2014,22(5): 1227-1234
夏桂锁, 廖城, 伏燕军. 平行双关节坐标测量机的标定及不确定度评价[J]. 光学精密工程, 2014,22(5): 1227-1234 DOI： 10.3788/OPE.20142205.1227.

XIA Gui-suo, LIAO Cheng, FU Yan-jun. Calibration and uncertainty evaluation of double parallel-joint coordinate measuring machine[J]. Editorial Office of Optics and Precision Engineering, 2014,22(5): 1227-1234 DOI： 10.3788/OPE.20142205.1227.

摘要

借鉴国外ScanMax测量机所具有的优势，研发了RRP结构（即两个转动和一个直线运动）的平行双关节坐标测量机，并研究了该仪器的误差模型、标定方法和不确定度评定方法。首先，根据平行双关节坐标测量机的机械结构建立了仪器的数学模型和误差模型。然后，基于全误差分析技术设计了仪器的标定方案并分别介绍了对重力和扭矩变形、平行度、臂长、零位等参数的标定。最后，根据国家坐标测量机校准规范，提出了通过评价测量重复性和长度测量精度的方法来评定测量不确定度。实验结果表明：在1000mm×250mm（直径×高度）的测量范围内，平行双关节坐标测量机的测量不确定度可达到12μm（

=2）。得到的结果验证了平行双关节坐标测量技术及全误差分析技术的可行性，为非正交坐标测量机的标定探索了新的方法。

Abstract

On the basis of advantages of ScanMax measuring machines at abroad

a double parallel-joint Coordinate Measuring Machine (CMM) with a RRP structure(two rotation movements and a line movement)was developed

and its error model

calibration method and uncertainty evaluation was investigated. Firstly

the mathematical model and error model was established according to the mechanical structure of the double parallel-joint CMM.Then

the calibration scheme was designed based on the total error analysis

and calibration methods of the parameters such as gravity

torque deformation

parallelism

arm length

null were introduced. Finally

based on the national Calibration Specification for CMM

a evaluation method by measurement repeatability and the precision of length measurement to evaluate measurement uncertainty was proposed. The experiments by proposed method show that the measurement uncertainty of double parallel-joints CMM can reach 12 μm (

=2) in a measurement range of 1 000 mm×250 mm (diameter×height).It is proved that both double parallel-joint coordinate measuring technique and total error analysis technology are feasible. It explores a new way to calibrate non-orthogonal CMM.

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references

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