悬臂式压电双晶片振子夹持长度变化对其动态特性的影响

程光明; 李新辉; 张海滨; 曾平; 温建明

doi:10.3788/OPE.20142205.1296

您当前的位置：

首页 >

文章列表页 >

悬臂式压电双晶片振子夹持长度变化对其动态特性的影响

微纳技术与精密机械 | 更新时间：2020-08-13

- 悬臂式压电双晶片振子夹持长度变化对其动态特性的影响
- Effect of different clamping lengths of cantilever bimorph on its dynamic characteristics
- 光学精密工程 2014年22卷第5期页码：1296-1303
- 作者机构：
  
  1. 浙江师范大学精密机械研究所,浙江金华,321004
  2. 兰州交通大学机电工程学院,甘肃兰州,730070
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（No.51175478，No.51205369）();浙江省自然科学基金资助项目（No.Y1110529）()
- DOI：10.3788/OPE.20142205.1296
  中图分类号： TN384
- 收稿日期：2013-12-01，
  
  修回日期：2014-02-05，
  
  纸质出版日期：2014-05-25
- 稿件说明：
移动端阅览
程光明, 李新辉, 张海滨等. 悬臂式压电双晶片振子夹持长度变化对其动态特性的影响[J]. 光学精密工程, 2014,22(5): 1296-1303

CHENG Guang-ming, LI Xin-hui, ZHANG Hai-bin etc. Effect of different clamping lengths of cantilever bimorph on its dynamic characteristics[J]. Editorial Office of Optics and Precision Engineering, 2014,22(5): 1296-1303
程光明, 李新辉, 张海滨等. 悬臂式压电双晶片振子夹持长度变化对其动态特性的影响[J]. 光学精密工程, 2014,22(5): 1296-1303 DOI： 10.3788/OPE.20142205.1296.

CHENG Guang-ming, LI Xin-hui, ZHANG Hai-bin etc. Effect of different clamping lengths of cantilever bimorph on its dynamic characteristics[J]. Editorial Office of Optics and Precision Engineering, 2014,22(5): 1296-1303 DOI： 10.3788/OPE.20142205.1296.

摘要

以惯性压电驱动器的关键部件——悬臂式压电双晶片振子为研究对象，探讨了悬臂式压电双晶片振子的夹持长度变化对其动态特性的影响规律。首先，建立了悬臂式压电双晶片振子静态参数方程和动力学模型。然后，应用matlab软件仿真分析了夹持长度变化对悬臂式压电双晶片振子的端部位移幅值和惯性加速度幅值的影响。最后，分别测试了悬臂式压电双晶片振子在不同夹持长度下的端部位移幅值以及惯性加速度幅值。结果显示：驱动电压为10V，频率为11Hz，悬臂式压电双晶片振子的夹持长度在9~20mm内变化时，其端部位移幅值最大为66.2μm，产生的惯性加速度幅值最大为10.2ms

-2

。仿真和试验结果表明：激励电场相同时，随着悬臂式压电双晶片振子的夹持长度增大，其端部位移幅值会变小，而其产生的惯性加速度会变大。

Abstract

This work focuses on the effect of clamping length on the dynamic characteristics of a cantilever piezoelectric bimorph vibrator. First

the static parameter equation and the dynamic model of the cantilever bimorph vibrator was established. Then

the effects of the changed clamping lengths on the tip displacement amplitude and the inertia acceleration magnitude of the cantilever bimorph vibrator were analyzed with MATLAB software. Finally

the tip displacement amplitude and the inertia acceleration amplitude of the cantilever bimorph vibrator were measured separately. Results show that the maximal amplitude of tip displacement is 66.2 μm and the generated maximal inertial acceleration is 10.2 ms

-2

at a driving voltage of 10 V

a frequency of 11 Hz

and the clamping length of cantilever bimorph vibrator between 9 and 20 mm. Simulation and experimental results indicate that with the same excitation field

the longer the clamping length

the smaller the amplitude of displacement and the larger the inertial acceleration produced by the piezoelectric bimorph vibrator.

关键词

Keywords

references

曾平, 温建明, 程光明, 等. 新型惯性式压电驱动机构的研究[J]. 光学精密工程, 2006, 14(4):623-627. ZENG P, WEN J M, CHENG G M, et al..Research on novel inertial piezoelectric actuator[J].Opt.Precision Eng., 2006, 14(4):623-627.(in Chinese)

李晓韬, 程光明, 杨志刚, 等. 应用惯性冲击原理的非对称夹持式压电旋转驱动器的设计[J]. 光学精密工程, 2010, 18(1):156-161. LI X T, CHENG G M, YANG ZH G, et al..Design of asymmetrical rotated piezoelectric actuators based on impact driving principle[J].Opt.Precision Eng., 2010, 18(1):156-161.(in Chinese)

HUNSTI M, HEMSEL T, SEXTRO W.Modelling the friction contact in an inertia motor[J].Journal of Intelligent Material Systems and Structures, 2013, 24(11):1380-1391.

LIU W H, WANG Y, HUANG W Q, et al..A linear stepping piezoelectric motor using inertial impact driving [J].Applied Mechanics and Materials, 2012, 226:693-696.

温建明, 马继杰, 曾平, 等. 压电旋转驱动器制作及性能测试[J]. 光学精密工程, 2013, 21(1):131-136. WEN J M, MA J J, ZENG P, et al..Machining and functional testing of piezoelectric rotary actuator[J].Opt.Precision Eng.,2013, 21(1):131-136.(in Chinese)

GAO W, SATO S, ARAI Y.A linear-rotary stage for precision positioning[J].Precision Engineering, 2010, 34(2):301-306.

NISHIMURA T, HOSAKA H, MORITA T.Resonant-type Smooth Impact Drive Mechanism (SIDM) actuator using a bolt-clamped langevin transducer [J].Ultrasonics, 2012, 52(1):75-80.

WANG Q M, CROSS L E.Performance analysis of piezoelectric cantilever bending actuators[J].Ferroelectrics, 1998, 215(1):187-213.

鄂世举, 刘建芳, 朱喜林, 等. 压电弯曲元件的长度对其特性影响的实验研究[J]. 压电与声光, 2009, 31(3):364-365. E SH J, LIU J F, ZHU X L, et al..Experimental research on the effect of length of piezoelectric bender on its characteristics [J].Piezoelectrics & Acoustooptics, 2009, 31(3):364-365.(in Chinese)

张宏壮.压电双晶片型二自由度惯性冲击式精密驱动器理论与实验研究:长春:吉林大学, 2006. ZHANG H ZH.Theoretical and Experimental Study of 2-DOF Precise Actuator Utilizing Impact Force of Piezoelectric Bimorphs.Changchun:Graduate of the Jilin University, 2006.(in Chinese)

程光明, 冯丽娜, 曾平, 等. 泵用压电振子与泵腔体积变化的测试研究[J]. 排灌机械工程学报, 2012, 30(4):412-416. CHENG G M, FENG L N, ZENG P, et al..Experimental study of piezoelectric vibrator deformation and cavity volume fluctuation of piezoelectric pump[J].Journal of Drainage and Irrigation Machinery Engineering, 2012, 30(40):412-416.(in Chinese)

浏览量

629

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

压电微位移台的动态迟滞建模及实验验证

低温环境下MEMS微构件的动态特性及测试系统