用于光束整形的表面等离子体双光栅结构

陈泳屹; 秦莉; 佟存住; 王立军; 刘益春

doi:10.3788/OPE.20142206.1461

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用于光束整形的表面等离子体双光栅结构

现代应用光学 | 更新时间：2020-08-13

- 用于光束整形的表面等离子体双光栅结构
- Dual gratings based on surface plasmons for optical beam shaping
- 光学精密工程 2014年22卷第6期页码：1461-1468
- 作者机构：
  
  1. 中国科学院大学北京,中国,100049
  2. 中国科学院长春光学精密机械与物理研究所发光学及其应用国家重点实验室,吉林长春,130033
  3. 东北师范大学,吉林长春,130021
- 作者简介：
- 基金信息：
  
  国家自然科学基金重点资助项目（No.61234004）();国家自然科学基金面上项目（No.61176045）();国家自然科学基金青年基金资助项目（No.611060
- DOI：10.3788/OPE.20142206.1461
  中图分类号： O469;TN248.4
- 收稿日期：2013-04-23，
  
  修回日期：2013-05-30，
  
  纸质出版日期：2014-06-25
- 稿件说明：
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陈泳屹, 秦莉, 佟存住等. 用于光束整形的表面等离子体双光栅结构[J]. 光学精密工程, 2014,22(6): 1461-1468

CHEN Yong-yi, QIN Li, TONG Cun-zhu etc. Dual gratings based on surface plasmons for optical beam shaping[J]. Editorial Office of Optics and Precision Engineering, 2014,22(6): 1461-1468
陈泳屹, 秦莉, 佟存住等. 用于光束整形的表面等离子体双光栅结构[J]. 光学精密工程, 2014,22(6): 1461-1468 DOI： 10.3788/OPE.20142206.1461.

CHEN Yong-yi, QIN Li, TONG Cun-zhu etc. Dual gratings based on surface plasmons for optical beam shaping[J]. Editorial Office of Optics and Precision Engineering, 2014,22(6): 1461-1468 DOI： 10.3788/OPE.20142206.1461.

摘要

为了对双边布拉格反射波导半导体激光器的远场双瓣特性进行整形，使之合并成为单瓣出光远场，在布拉格反射波导的出光腔面上制作了表面等离子体双光栅结构。利用Au-SiO

光栅结构对表面等离子体的耦合效应和表面等离子体的透射增强现象将双瓣远场耦合成为单瓣出射，然后通过Au-Si

光栅结构将透射的表面等离子体耦合成为光子进行准直出射，最终得到单瓣准直的远场光斑。计算结果表明：当Au-SiO

光栅厚度为50 nm，填充因子为0.5，光栅周期为350 nm；Au-Si

光栅厚度为70 nm，填充因子为0.5，光栅周期为660 nm时可以得到远场发散角压缩到6.1°的整形光斑，比没有双光栅结构的发散角缩小了3.6倍；其远场透射光功率达到了模式光源的62%，是没有双光栅结构单瓣出射功率的1.59倍；同时腔面反射率也降低到12.4%，是没有双光栅结构的0.53倍。结果显示，提出的双光栅结构优化了布拉格反射波导半导体激光器的出光远场特性。

Abstract

To shape the beam with two-lobe far-field property from a dual side Bragg reflection waveguide semiconductor laser

a dual grating structure based on surface plasmons was prepared on the optical outlet facet of a Bragg reflection waveguide.It could combine the two lobes into a single lobe and to increase the optical intensity and quality of the beam. An Au-SiO

grating was used to couple photons into surface plasmons and to combine the two lobe beams into a single beam. The surface plasmons also were taken to increase the extraordinary optical transmission. On the other hand

the Au-Si

grating was used to help the outlet surface plasmons couple back to photons

meanwhile collimating the outlet beam to increase the far-field property. Numerical simulation results indicate when the parameters for Au-SiO

show a depth of 50 nm

a filling factor of 0.5 and a duration of 350 nm

and those for Au-Si

show 70

0.5 and 660 nm

respectively

the outlet far-field beam will has a 6.1° divergence

which means the divergence angle shrinks by 3.6 times as that without the dual grating structure. The far-field optical transmission power reaches 62% of the model source

that is 1.59 times of the power of a single lobe far-field to the structure without the dual grating. Moreover

the cavity facet reflectivity has reduced to 12.4%

0.53 times as the structure without the dual grating. It concludes that the dual grating structure has optimized the far field properties of dual side Bragg reflection waveguide semiconductor lasers.

关键词

Keywords

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