硅微谐振式加速度计驱动电路参数优化

赵健; 苏岩; 赵阳; 夏国明

doi:10.3788/OPE.20142206.1500

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硅微谐振式加速度计驱动电路参数优化

微纳技术与精密机械 | 更新时间：2020-08-13

- 硅微谐振式加速度计驱动电路参数优化
- Parameter optimization of drive circuit in silicon resonant accelerometer
- 光学精密工程 2014年22卷第6期页码：1500-1506
- 作者机构：
  
  南京理工大学 MEMS惯性技术研究中心,江苏南京,210094
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目（No.2011AA040402）()
- DOI：10.3788/OPE.20142206.1500
  中图分类号： TH824.4
- 收稿日期：2013-11-21，
  
  修回日期：2014-01-09，
  
  纸质出版日期：2014-06-25
- 稿件说明：
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赵健, 苏岩, 赵阳等. 硅微谐振式加速度计驱动电路参数优化[J]. 光学精密工程, 2014,22(6): 1500-1506

ZHAO Jian, SU Yan, ZHAO Yang etc. Parameter optimization of drive circuit in silicon resonant accelerometer[J]. Editorial Office of Optics and Precision Engineering, 2014,22(6): 1500-1506
赵健, 苏岩, 赵阳等. 硅微谐振式加速度计驱动电路参数优化[J]. 光学精密工程, 2014,22(6): 1500-1506 DOI： 10.3788/OPE.20142206.1500.

ZHAO Jian, SU Yan, ZHAO Yang etc. Parameter optimization of drive circuit in silicon resonant accelerometer[J]. Editorial Office of Optics and Precision Engineering, 2014,22(6): 1500-1506 DOI： 10.3788/OPE.20142206.1500.

摘要

将遗传算法与低频模型相结合，提出了一种快捷的驱动电路设计方法，用于提高低功耗硅微谐振式加速度计模拟驱动电路的瞬态性能，并缩短设计周期。该方法通过对闭环驱动电路模型进行高低频解耦，提取闭环驱动电路的低频模型；将提取的低频模型与遗传算法相结合，给出完整的优化方法，得到了满足各项实际约束的最优电路参数。针对某型硅微谐振式加速度计，建立了SIMULINK低频仿真模型，根据实际情况制定了约束条件。应用该方法求出了系统启动速度最快的PI控制器的参数，并对其进行了实验验证。起振实验结果表明，采用优化参数可使超调量小于50%，相位误差小于5°，1%调节时间从优化前的0.42 s减少到优化后的0.19 s，实验与仿真误差小于5%。得到的结果证明提出的方法正确有效，具有可实施性。

Abstract

A fast design method for the drive circuit was proposed by combining Genetic Algorithm(GA) with a low frequency model to improve the transient performance of analog drive circuit for a low-power Silicon Resonant Accelerometer(SRA) and to shorten its design cycle. The method decoupled the closed drive circuit model in high and low frequencies to extract a low-frequency model from drive close-loop circuits. Combined the low-frequency model with the GA

an optimization method was proposed to optimize the circuit parameters for meeting the different actual restraints. A simulation model was established in SIMULINK based on one type of micro silicon resonant accelerometer

and the optimal parameters of PI controller with a most start-up speed were obtained under constraint conditions. Finally

a start-up experiment was performed to testify the simulation results. It shows that the start-up time is shorten from previous 0.42 s to 0.19 s and the over-shoot and phase error are less than 50% and 5°

respectively. The difference between the simulation and experiment is less than 5%

which falls within the acceptable range. It proves that the optimization method is correct and effective.

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references

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