静电诱导自组装碳纳米管薄膜的结构表征与电学性能

张冬至

doi:10.3788/OPE.20142206.1562

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静电诱导自组装碳纳米管薄膜的结构表征与电学性能

微纳技术与精密机械 | 更新时间：2020-08-13

- 静电诱导自组装碳纳米管薄膜的结构表征与电学性能
- Structure characterization and electric properties of electrostatic-induced self-assembly carbon nanotube films
- 光学精密工程 2014年22卷第6期页码：1562-1570
- 作者机构：
  
  中国石油大学(华东)信息与控制工程学院,山东青岛,266580
- 作者简介：
  
  [ "张冬至（1981- ），男，山东聊城人，博士，讲师，2004年于山东理工大学获学士学位，2007年于中国石油大学（华东）获得硕士学位，2011年于华南理工大学获博士学位，主要从事测试计量技术与仪器、微机电系统（MEMS）与柔性电子技术等研究。E-mail：dzzhang@upc.edu.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目（No.51205414）();山东省优秀中青年科学家科研奖励基金资助项目（No.BS2012DX044）();青岛市科技发展计划资助项目（No
- DOI：10.3788/OPE.20142206.1562
  中图分类号： TB34;O484.4
- 收稿日期：2013-11-08，
  
  修回日期：2013-12-30，
  
  纸质出版日期：2014-06-25
- 稿件说明：
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张冬至,. 静电诱导自组装碳纳米管薄膜的结构表征与电学性能[J]. 光学精密工程, 2014,22(6): 1562-1570

ZHANG Dong-zhi,. Structure characterization and electric properties of electrostatic-induced self-assembly carbon nanotube films[J]. Editorial Office of Optics and Precision Engineering, 2014,22(6): 1562-1570
张冬至,. 静电诱导自组装碳纳米管薄膜的结构表征与电学性能[J]. 光学精密工程, 2014,22(6): 1562-1570 DOI： 10.3788/OPE.20142206.1562.

ZHANG Dong-zhi,. Structure characterization and electric properties of electrostatic-induced self-assembly carbon nanotube films[J]. Editorial Office of Optics and Precision Engineering, 2014,22(6): 1562-1570 DOI： 10.3788/OPE.20142206.1562.

摘要

为了给高性能微机电系统（MEMS）薄膜器件提供复合功能薄膜材料，本文将功能化碳纳米管与聚电解质溶液交互沉积技术用于静电诱导逐层自组装碳纳米管/聚合物薄膜。对薄膜制备及其性能的可调控性进行了表征和测试。扫描电镜显微（SEM）形貌观察表明，碳纳米管与聚合物分子链结合致密，形成了质地均匀的随机碳纳米管网络结构。拉曼光谱结果表明，碳纳米管在径向呼吸、缺陷振动、拉伸振动等模式下的指纹特征光谱证实了碳纳米管的有效组装和加载。用石英晶体微天平（QCM）对碳纳米管/聚合物薄膜自组装过程进行了在线实时监测，结果揭示了沉积薄膜厚度和薄膜结构的可调控性。当聚电解质层数由0递增到5时，子层膜厚由6.31 nm增加到111.59 nm，碳纳米管加载体积比由72.35 %减小到14.78 %。此外，基于

I-V

表征研究了碳纳米管填充体积比及其薄膜厚度对碳纳米管/聚合物薄膜电学特性的影响，为实现碳纳米管/聚合物薄膜电学性能的可调节性提供了实验及理论依据。

Abstract

To provide building blocks for high-performance Micro-electro-mechanical System (MEMS) devices

Layer-by-layer (LbL) self-assembly of Single-walled Carbon Nanotube (SWNT)/polymer films was proposed and their properties were characterized and tested. The surface morphologies of the SWNT/polymer films observed under a Scanning Electron Microscope(SEM) show high strength

dense and random network structures. Raman spectra of all characteristic peaks for the SWNT in radial breathing mode

disorder mode and tangential mode demonstrate the presence of the SWNT in overall good quality and a loading state. Real time Quarts Crystal Microbalance(QCM) online monitoring illustrates that the deposition thickness and the SWNT loading fraction in the nanocomposite can be controlled in a large range based on LbL sequential deposition process. When the cycle number of polymers increase from 0 to 5

the average film thickness increases from 6.31 to 111.59 nm

and the SWNT volume fraction decreases from 72.35 % to 14.78 %. In addition

the electric properties of the SWNT/polymer films under the influence of SWNT loading fraction and film thickness were investigated through current-voltage characterization. These results provide experimental and theoretical bases for potential applications of SWNT films in MEMS devices.

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