基于单压电执行器的光栅刻线摆角修正

李晓天; 齐向东; 于海利; 高键翔; 冯树龙; 巴音贺希格

doi:10.3788/OPE.20142208.2039

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基于单压电执行器的光栅刻线摆角修正

现代应用光学 | 更新时间：2020-08-13

- 基于单压电执行器的光栅刻线摆角修正
- Yaw angle correction of grating line based on single piezoelectric actuator
- 光学精密工程 2014年22卷第8期页码：2039-2046
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（No.60478034）();国家创新方法工作专项资助项目（No.2008IM040700）();国家重大科研装备研制项目（No.ZDY200
- DOI：10.3788/OPE.20142208.2039
  中图分类号： O436.1;TN305.7
- 收稿日期：2013-06-26，
  
  修回日期：2013-08-13，
  
  纸质出版日期：2014-08-25
- 稿件说明：
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李晓天, 齐向东, 于海利等. 基于单压电执行器的光栅刻线摆角修正[J]. 光学精密工程, 2014,22(8): 2039-2046

LI Xiao-tian, QI Xiang-dong, YU Hai-li etc. Yaw angle correction of grating line based on single piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2039-2046
李晓天, 齐向东, 于海利等. 基于单压电执行器的光栅刻线摆角修正[J]. 光学精密工程, 2014,22(8): 2039-2046 DOI： 10.3788/OPE.20142208.2039.

LI Xiao-tian, QI Xiang-dong, YU Hai-li etc. Yaw angle correction of grating line based on single piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2039-2046 DOI： 10.3788/OPE.20142208.2039.

摘要

考虑机械刻划光栅刻线摆角对平面光栅衍射波前质量的影响，本文根据光栅机械刻划过程的特点，提出了一种单压电执行器调节方法。该方法可通过不断调节微定位工作台位移，实时修正工作台摆角导致的光栅刻线摆角误差。首先，推导出了微定位工作台位移实时修正公式。接着，采用三路干涉仪实现了微定位工作台摆角测量及其主要成分分析。最后，进行了光栅刻线摆角放大和校正实验。结果显示，摆角放大和摆角校正实验已基本达到了预期的效果，对光栅宽度为10.4 mm且刻线密度为600 line/mm的光栅进行修正后，光栅刻线摆角比校正前降低了64%以上。这些结果表明：采用单压电执行器方法对光栅刻线摆角进行实时修正可有效降低光栅刻线摆角，提高光栅质量；该方法可应用于大面积机械刻划光栅刻线摆角的修正。

Abstract

As the yaw angle of a machine-ruling grating will decline its wavefront quality and influence grating performance and application level

this paper proposes a correction method of single piezoelectric actuator according to the characteristics of the grating machine-ruling process. The method adjusts continuously the displacement of a micro-positioning table to correct the yaw angle error of grating line. Firstly

a real-time displacement correction formula for the micro-positioning table was deduced. Then

the yaw angle of micro-positioning table was measured and analyzed by three interferometers and its main component. Finally

amplification and correction experiments of the yaw angle of grating line were performed. The results show that experiments have basically achieved the expected results. Comparing to the result before yaw angle correction

the corrected yaw angle of grating line for a grating with a width of 10.4 mm and linear density of 600 line/mm has reduced by 64% or more. It concludes that the single piezoelectric actuator approach to the yaw angle correction of grating line effectively reduces yaw angle of grating line and improves the quality of the grating. This method is applicable to the yaw angle correction of machine-ruling grating with a large area.

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references

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