200单元硅基单压电变形镜的设计与测试

马剑强; 刘莹; 陈俊杰; 李保庆; 褚家如

doi:10.3788/OPE.20142208.2047

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200单元硅基单压电变形镜的设计与测试

现代应用光学 | 更新时间：2020-08-13

- 200单元硅基单压电变形镜的设计与测试
- Design and performance testing of 200-element silicon unimorph deformable mirror
- 光学精密工程 2014年22卷第8期页码：2047-2053
- 作者机构：
  
  1. 中国科学技术大学精密机械与精密仪器系,安徽合肥,230027
  2. 宁波大学机械工程与力学学院,浙江宁波,315211
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（No.11303019）();中国博士后科学基金资助项目（No.2013M531521）();浙江省自然科学基金资助项目（No.LQ13E05
- DOI：10.3788/OPE.20142208.2047
  中图分类号： P111;TN384
- 收稿日期：2013-11-18，
  
  修回日期：2013-12-30，
  
  纸质出版日期：2014-08-25
- 稿件说明：
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马剑强, 刘莹, 陈俊杰等. 200单元硅基单压电变形镜的设计与测试[J]. 光学精密工程, 2014,22(8): 2047-2053

MA Jian-qiang, LIU Ying, CHEN Jun-jie etc. Design and performance testing of 200-element silicon unimorph deformable mirror[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2047-2053
马剑强, 刘莹, 陈俊杰等. 200单元硅基单压电变形镜的设计与测试[J]. 光学精密工程, 2014,22(8): 2047-2053 DOI： 10.3788/OPE.20142208.2047.

MA Jian-qiang, LIU Ying, CHEN Jun-jie etc. Design and performance testing of 200-element silicon unimorph deformable mirror[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2047-2053 DOI： 10.3788/OPE.20142208.2047.

摘要

针对天文望远镜对变形镜的需求，设计了200单元级硅基单压电变形镜并对其进行了性能测试。首先，通过有限元方法对单压电变形镜进行结构建模，分析比较了电极排列形式和边界支撑方式对变形镜性能的影响。然后，制备了3款200单元变形镜样机（环形简支，环形固支，六边形简支）。最后，利用干涉仪测量了变形镜的影响函数，并通过激光多普勒测振仪测量其频响特性。仿真与实验结果表明：致动器在50 V电压下变形量可达1 μm，固支条件下谐振频率在1 kHz左右，对前100项Zernike像差具有良好的校正能力。该变形镜在低成本天文自适应光学系统中具有应用潜力。

Abstract

According to the requirements of astronomical telescopes for Deformable Mirrors (DMs)

a silicon unimorph DM with 200 elements were designed and its characteristics were measured. Firstly

the structure model of unimorph DM was developed using finite element method. The influences of the electrode arrangement and the boundary support of the DM on correction capability were investigated. Then

three prototype DMs (annular & simply support

annular & clamped support

and hexagonal & simply support) were fabricated. The influence functions of the fabricated DMs were measured using an interferometer. And the frequency response was measured using a laser Dopplar vibrometer. The simulation and experimental results indicate that the deflection of the actuator is more than 1 μm at 50 V and the resonance frequency of the DM with clamped boundary is about 1 kHz. The DMs have a well correction capability for the first 100 Zernike aberrations. These show that the developed DMs have potential applications for low-cost adaptive optics in astronomy.

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references

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