基于二氧化硅溅射的PMMA和PDMS亲水改性

叶雄英; 李子尚; 冯金扬; 马增帅

doi:10.3788/OPE.20142208.2096

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基于二氧化硅溅射的PMMA和PDMS亲水改性

微纳技术与精密机械 | 更新时间：2020-08-13

- 基于二氧化硅溅射的PMMA和PDMS亲水改性
- Hydrophilic modification of PMMA and PDMS based on silicon dioxide sputtering
- 光学精密工程 2014年22卷第8期页码：2096-2102
- 作者机构：
  
  清华大学精密仪器系精密测试技术及仪器国家重点实验室北京,100084
- 作者简介：
- 基金信息：
  
  国家重大科学仪器设备开发专项资助项目（No.2013YQ19046701）()
- DOI：10.3788/OPE.20142208.2096
  中图分类号： TQ320
- 收稿日期：2014-01-27，
  
  修回日期：2014-02-27，
  
  纸质出版日期：2014-08-25
- 稿件说明：
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叶雄英, 李子尚, 冯金扬等. 基于二氧化硅溅射的PMMA和PDMS亲水改性[J]. 光学精密工程, 2014,22(8): 2096-2102

YE Xiong-ying, LI Zi-shang, FENG Jin-yang etc. Hydrophilic modification of PMMA and PDMS based on silicon dioxide sputtering[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2096-2102
叶雄英, 李子尚, 冯金扬等. 基于二氧化硅溅射的PMMA和PDMS亲水改性[J]. 光学精密工程, 2014,22(8): 2096-2102 DOI： 10.3788/OPE.20142208.2096.

YE Xiong-ying, LI Zi-shang, FENG Jin-yang etc. Hydrophilic modification of PMMA and PDMS based on silicon dioxide sputtering[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2096-2102 DOI： 10.3788/OPE.20142208.2096.

摘要

为了提高以聚甲基丙烯酸甲酯（PMMA）和聚二甲基硅氧烷（PDMS）为材料的微流体通道的浸润性，通过溅射SiO

对PMMA和PDMS进行了表面亲水改性处理。首先，对PMMA和PDMS进行氧等离子刻蚀，改变其表面形貌;然后，溅射SiO

进行表面亲水改性处理，由不同溅射时间得到不同厚度的SiO

薄膜。在亲水处理后一段时间之内对PMMA和PDMS表面分别进行接触角测量，评价不同条件下的改性效果，并对改性后的样片进行黏接性测试。结果表明：氧等离子刻蚀后，溅射时间10 min以上的PMMA表面可在10天内保持极亲水的状态；溅射时间15 min后的PMMA在35天之内接触角不超过10°；PDMS的亲水性可保持10天，接触角不超过60°；高温老化处理能延缓PDMS表面疏水性的恢复。实验结果显示：氧等离子刻蚀之后，溅射SiO

的方法可使PMMA和PDMS获得较长时间的表面亲水改性效果。另外，亲水改性处理后的PDMS之间仍可实现有效黏接，改性PMMA与未改性PDMS也能有效黏接。

Abstract

To improve the wettability of micro channels made of Polymethyl Methacrylate(PMMA) and Polydimethylsiloxane(PDMS)

the wettability of PMMA and PDMS surfaces was modified through sputtering silicon dioxide. Firstly

the surfaces of PMMA and PDMS were etched with an oxygen plasma to change their surface morphologies and enhance the roughnesses. Then

a thin layer of silicon dioxide was sputtered on their surfaces for hydrophilic modification and the silicon dioxide layers with different thicknesses were obtained by different sputtering time. The contact angles of the PMMA and PDMS surfaces were measured within a period of time after the hydrophilic treatment

and the effects of hydrophilic modification under different conditions were evaluated. Finally the adhesivity of the modified samples was tested too. The experimental results show that the surface of PMMA after oxygen plasma etching remains extremely hydrophilcity during 10 days via 10 min dioxide sputtering

and the contact angle remains lower than 10° in 35 days with 15 min sputtering. The modified PDMS remains hydrophilcity and the contact angle lower than 60° for 10 days. The aging treatment delays the recovering of the hydrophobicity of PDMS. By silicon dioxide sputtering

the PMMA and PDMS after oxygen plasma etching achieves longer hydrophilic modification efficiency. Moreover

after hydrophilic modification

both modified PMMAs

or pristine PDMS and modified PDMS could be bonded effectively.

关键词

Keywords

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