用于空间望远镜的膜光子筛

刘民哲; 刘华; 许文斌; 王泰升; 卢振武; 鱼卫星

doi:10.3788/OPE.20142208.2127

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用于空间望远镜的膜光子筛

微纳技术与精密机械 | 更新时间：2020-08-13

- 用于空间望远镜的膜光子筛
- Membrane photon sieve for space telescope
- 光学精密工程 2014年22卷第8期页码：2127-2134
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院大学北京,中国,100049
- 作者简介：
- 基金信息：
  
  国家自然科学基金重点资助项目（No.61137001）();国家自然科学基金面上资助项目（No.90923036，No.60977041）();中国科学院'百人计划’资
- DOI：10.3788/OPE.20142208.2127
  中图分类号： O436.1;TH743
- 收稿日期：2013-10-11，
  
  修回日期：2013-12-05，
  
  纸质出版日期：2014-08-25
- 稿件说明：
移动端阅览
刘民哲, 刘华, 许文斌等. 用于空间望远镜的膜光子筛[J]. 光学精密工程, 2014,22(8): 2127-2134

LIU Min-zhe, LIU Hua, XU Wen-bin etc. Membrane photon sieve for space telescope[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2127-2134
刘民哲, 刘华, 许文斌等. 用于空间望远镜的膜光子筛[J]. 光学精密工程, 2014,22(8): 2127-2134 DOI： 10.3788/OPE.20142208.2127.

LIU Min-zhe, LIU Hua, XU Wen-bin etc. Membrane photon sieve for space telescope[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2127-2134 DOI： 10.3788/OPE.20142208.2127.

摘要

针对空间衍射成像系统对大口径、结构轻量化、空间可展开等特性的要求，设计并制作了用于空间望远镜的新型衍射元件——PI薄膜光子筛。首先，分析了光子筛的设计理论;针对空间应用的特点和原则，采用振幅型光子筛的设计思路给出设计参数；用UG软件设计并加工制作了光子筛的机械固定结构。然后，通过镀膜、光刻、刻蚀等微细加工工艺制作了PI薄膜光子筛。最后，测试了光子筛的衍射效率及成像性能。实验结果表明：光子筛在波长632.8 nm处的实际衍射效率为4.916%，是理论值的73.9%。使用He-Ne激光器，选取10 μm的星点孔进行星点检测，得到了理想的艾里斑图像，其直径为176.70 μm，与理论极限值169.84 μm的误差仅为4.04%。搭建了分辨率板成像实验，测得薄膜光子筛的实际最高分辨频率为12.2 lp/mm，接近理论极限空间频率14.4 lp/mm，表明实验结果与理论分析基本相符。与其它刚性材料基底制成的光子筛相比，采用PI薄膜制作的光子筛不仅重量轻，同时具有较好的成像性能，可以满足空间望远镜主镜的应用要求。

Abstract

According to the requirements of a space diffraction imaging system for large-aperture

weight-lightening and space deployable

a new diffraction optical element

PI photon sieve

was designed and fabricated. Firstly

the design theory of PI photon sieve was analyzed and the design parameters for an amplitude photon sieve were given according to the characteristics and the principle of space applications. Then

the mechanical structure of the photon sieve was designed by using UG software and a PI membrane photon sieve was successfully manufactured by employing micro-fabrication methods including e-beam vacuum coating

photolithography and wet etching. Finally

the diffraction efficiency of the PI photon sieve was measured and the imaging performance was tested. The experimental results show that the diffraction efficiency of photon sieve is 4.916% at the wavelength of 632.8 nm

which is about 73.9% of the theoretical value. For the star testing

by choosing the star hole with a diameter of 10 μm and using a He-Ne laser for the light source

an ideal Airy disc with a diameter of 176.70 μm was obtained

which is very close to the theoretical value

and the error is only 4.04%. For the imaging experiments

the maximum resolution of the photon sieve is measured to be 12.2 lp/mm

which is close to the spatial frequency limit of 14.4 lp/mm. It is shown that the experimental results are generally in agreement with the theoretical results. Comparing with other diffractive elements

PI photon sieve satisfies the application requirement of the primary mirror used in a space telescope for its lighter weight and better imaging performance.

关键词

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