硅微陀螺仪零偏稳定性的优化

赵阳; 裘安萍; 施芹; 夏国明; 赵健

doi:10.3788/OPE.20142209.2381

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硅微陀螺仪零偏稳定性的优化

微纳技术与精密机械 | 更新时间：2020-08-13

- 硅微陀螺仪零偏稳定性的优化
- Optimization of bias stability for silicon microgyroscope
- 光学精密工程 2014年22卷第9期页码：2381-2388
- 作者机构：
  
  南京理工大学 MEMS惯性技术研究中心,江苏南京,210094
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2015AA123703)
- DOI：10.3788/OPE.20142209.2381
  中图分类号： TH824
- 收稿日期：2014-01-18，
  
  修回日期：2014-03-04，
  
  纸质出版日期：2014-09-25
- 稿件说明：
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赵阳, 裘安萍, 施芹等. 硅微陀螺仪零偏稳定性的优化[J]. 光学精密工程, 2014,22(9): 2381-2388

ZHAO Yang, QIU An-ping, SHI Qin etc. Optimization of bias stability for silicon microgyroscope[J]. Editorial Office of Optics and Precision Engineering, 2014,22(9): 2381-2388
赵阳, 裘安萍, 施芹等. 硅微陀螺仪零偏稳定性的优化[J]. 光学精密工程, 2014,22(9): 2381-2388 DOI： 10.3788/OPE.20142209.2381.

ZHAO Yang, QIU An-ping, SHI Qin etc. Optimization of bias stability for silicon microgyroscope[J]. Editorial Office of Optics and Precision Engineering, 2014,22(9): 2381-2388 DOI： 10.3788/OPE.20142209.2381.

摘要

为了进一步提高硅微陀螺仪的零偏稳定性，使其满足更高精度应用场合的需求，研究了硅微陀螺仪零偏稳定性优化技术。以典型

轴硅微陀螺仪为例，对影响其零偏稳定性的主要因素：机械耦合误差、电路耦合误差、机械热噪声、接口电路噪声进行了完整分析，并从抑制零偏温度漂移及输出噪声两个角度提出了改善硅微陀螺仪零偏稳定性的设计原则。基于上述原则，优化设计了硅微陀螺仪的机械结构及接口电路。最后对所设计的硅微陀螺仪进行了零偏稳定性测试，以验证所提出优化设计原则的有效性。实验结果表明，4个测试组的硅微陀螺仪零偏输出均无明显漂移，且零偏稳定性在6（）/h左右，达到了中等战术级水平。

Abstract

To improve the bias stability of a silicon microgyroscope for more precise applications

the optimization of bias stability for the silicon microgyroscope was explored. By taking a typical

-axis silicon microgyroscope for an example

zero-rate output errors of a typical

-axis silicon microgyroscope caused by mechanical coupling

electrical coupling

mechanical thermal noise and interface circuit noise were analyzed. On the basis of decreasing the drift and noise of zero-rate outputs

the design principle to improve the bias stability of the silicon microgyroscope was proposed. The mechanical structure and interface circuits for the silicon microgyroscope were designed. To verify the availability of the design principle

the bias stability of the silicon microgyroscope was tested. Experimental results indicate that the zero-rate outputs of four tested silicon microgyroscopes are no obvious drifts

and their bias stabilities are at the level of 6 ()/h. It suggests that the proposed silicon microgyroscope has reached a medium tactical precision grade.

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references

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