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1. 中国科学院大学 北京,中国,100049
2. 中国科学院 长春光学精密机械与物理研究所 应用光学国家重点实验室,吉林 长春,130033
收稿日期:2013-06-13,
修回日期:2013-08-13,
纸质出版日期:2014-10-25
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邵晶, 马冬梅, 张海涛等. 极小孔径衍射波前测试分析[J]. 光学精密工程, 2014,22(10): 2639-2644
SHAO Jing, MA Dong-mei, ZHANG Hai-tao etc. Evaluation of wavefront diffracted from ultra small aperture[J]. Editorial Office of Optics and Precision Engineering, 2014,22(10): 2639-2644
邵晶, 马冬梅, 张海涛等. 极小孔径衍射波前测试分析[J]. 光学精密工程, 2014,22(10): 2639-2644 DOI: 10.3788/OPE.20142210.2639.
SHAO Jing, MA Dong-mei, ZHANG Hai-tao etc. Evaluation of wavefront diffracted from ultra small aperture[J]. Editorial Office of Optics and Precision Engineering, 2014,22(10): 2639-2644 DOI: 10.3788/OPE.20142210.2639.
研制点衍射干涉仪时
小孔的形貌和装调误差会对衍射波前质量产生影响
故本文研究了采用相位复原对小孔衍射波前质量进行测评的方法.设计并搭建了衍射波前测试装置
对光纤衍射波前进行了测评实验.为了验证测试方法的有效性
分别对采集的衍射图像与重构的衍射图像
以及测试获得的振幅分布与理论计算获得的振幅分布进行了对比.结果显示.采集图像与重构图像之间的差异为0.32%
验证了采用相位复原技术进行衍射波前测试方法的有效性.同时
对干涉方法测量与相位复原结果进行了对比
二者差异仅为0.001 4λ RMS.
As the morphology of an ultra small aperture and the assembling error will affect the quality of wavefront diffraction in development of a point diffraction interferometer
this paper explores an evaluating method for wavefront diffracted quality from the ultra small aperture based on the phase retrieval. The testing equipments for wavefront diffraction was designed and the evaluating testing experiment for the wavefront diffraction were performed. To verify the effectiveness of the method based on the phase retrieval
the captured and reconstructed images were compared
and the obtained amplitudes with the theoretical calculation and experimental test were also analyzed. The results show that the difference between captured images and reconstructed images is only 0.32%
which verifies that the proposed method is feasibility. Moreover
the interferometric measurement result was compared with that of the phase retrieval proposed in this paper
and the results show that the difference is only 0.001 4λ RMS(Root Mean Square).
SOMMARGREN G E, PHILLION D W, JOHNSON M A, et al.. 100-picometer interferometry for EUVL[J]. SPIE, 2002,4688:316-328.
GOLDBERG K A, TEJNIL E, LEE S H, et al.. Characterization of an EUV Schwarzschild objective using phase-shifting point diffraction interferometry[J]. SPIE,1997,3048:264-270.
张海涛. 基于光学设计软件的相移点衍射干涉仪建模[J]. 中国光学, 2010, 3(6): 616-622. ZHANG H T.Modeling for phase shifting point diffraction interferometer based on lens design software[J].Chinese Journal of Optics,2010,3(6):616-622.(in Chinese)
于杰. 用于相移点衍射干涉仪的加权最小二乘相位提取算法[J]. 中国光学, 2010, 3(6): 605-615. YU J.Weighted least square phase extraction algorithm for phase-shifting point diffraction interferometer[J].Chinese Journal of Optics,2010,3(6):605-615.(in Chinese)
TOSHIAKI M, SATORU O, TAKAAKI N, et al.. Measurement accuracy in phase-shifting point diffraction interferometer with two optical fibers[J]. Optical Review, 2007, 14(6): 401-405.
卢增雄, 金春水, 马冬梅, 等. 微小孔偏差对远场波前质量影响分析[J]. 光学学报, 2011, 31(8): 0812002. LU Z X, JIN CH SH, MA D M, et al..Analysis of effect of tiny pinhole deviation on far-field wave-front quality[J].Acta Optica Sinica,2011,31(8):0812002.(in Chinese)
马强, 刘伟奇, 李香波, 等. 点衍射干涉仪中小孔衍射波面误差分析[J]. 光学学报, 2008, 28(12): 2321-2324. MA Q, LIU W Q, LI X B, et al..Analysis of diffraction wavefront error in point diffraction interferometer[J].Acta Optica Sinica,2008,28(12):2321-2324.(in Chinese)
张宇, 金春水, 马冬梅, 等. 点衍射干涉仪波前参考源标定算法的研究[J]. 中国激光, 2012,39(3):0308001. ZHANG Y, JIN CH SH, MA D M, et al..Study of calibrating algorithm for wavefront reference source of point diffraction interferometer[J].Chinese Journal of Lasers, 2012, 39(3):0308001.(in Chinese)
DIRKSEN P, BRAAT J J M, JANSSEN A J E M, et al.. Aerial image based lens metrology for wafer steppers[J]. SPIE, 2006,6154:61540X.
马冬梅, 陈土泉. 点衍射波前位相的测评[J]. 光学 精密工程, 2010, 18(11):2390-2397. MA D M, CHEN T Q.Test and evaluation of wavefront phase of point diffraction[J].Opt. Precision Eng.,2010,18(11):2390-2397.(in Chinese)
邵晶,马冬梅. 点衍射干涉仪基准波前测试技术研究[J]. 中国激光, 2011, 38(5):0508003. SHAO J, MA D M.Testing the criterion wavefront diffracted by point diffraction interferometer[J].Chinese Journal of Lasers,2011,38(5):0508003.(in Chinese)
DIRKSENA P, BRAATB J, JANSSEN A J E M, et al.. Aberration retrieval using the extended Nijboer-Zernike approach[J]. Journal of Microlithography, Microfabrication and Microsystems, 2003, 2(1): 61-68.
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