胶层固化对反射镜面形影响的仿真与试验

董得义; 李志来; 李锐钢; 樊延超; 张学军

doi:10.3788/OPE.20142210.2698

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胶层固化对反射镜面形影响的仿真与试验

微纳技术与精密机械 | 更新时间：2020-08-13

- 胶层固化对反射镜面形影响的仿真与试验
- Simulation and experiment of influence of adhesive curing on reflective mirror surface
- 光学精密工程 2014年22卷第10期页码：2698-2707
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2009AA7020107)()
- DOI：10.3788/OPE.20142210.2698
  中图分类号： TP391.9;TQ171.6+8
- 收稿日期：2013-10-24，
  
  修回日期：2013-11-18，
  
  纸质出版日期：2014-10-25
- 稿件说明：
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董得义, 李志来, 李锐钢等. 胶层固化对反射镜面形影响的仿真与试验[J]. 光学精密工程, 2014,22(10): 2698-2707

DONG De-yi, LI Zhi-lai, LI Rui-gang etc. Simulation and experiment of influence of adhesive curing on reflective mirror surface[J]. Editorial Office of Optics and Precision Engineering, 2014,22(10): 2698-2707
董得义, 李志来, 李锐钢等. 胶层固化对反射镜面形影响的仿真与试验[J]. 光学精密工程, 2014,22(10): 2698-2707 DOI： 10.3788/OPE.20142210.2698.

DONG De-yi, LI Zhi-lai, LI Rui-gang etc. Simulation and experiment of influence of adhesive curing on reflective mirror surface[J]. Editorial Office of Optics and Precision Engineering, 2014,22(10): 2698-2707 DOI： 10.3788/OPE.20142210.2698.

摘要

研究了用厚胶层进行光学零件之间的黏结操作时

胶层固化后其收缩力对反射镜面形的影响.首先

分析了胶层固化过程中胶层对光学元件产生拉应力的原理

找到了胶层固化过程中产生收缩力的主要因素.其次

建立了反射镜胶结组件的有限元模型

采用等效热变形法仿真分析了胶层收缩对反射镜面形的影响

分析发现胶层的等效线胀系数不能直接采用收缩率代替

而将材料的收缩率转换为胶层的等效线胀系数后

分析结果与试验结果吻合较好.最后

提出了减小胶层收缩对反射镜面形影响的改进方案.试验结果表明:黏胶方案改进后

胶层固化过程中的收缩力引起反射镜中心区域鼓包的PV值从0.574λ减小为0.064λ

镜面面形均方根值从0.127λ减小为0.038λ

这些结果显示胶层固化过程中产生的收缩力对反射镜面形的影响得到了显著改善.

Abstract

The effect of shrinkage stress induced by adhesive curing on a reflective mirror surface was analyzed when the thick adhesive layer was used to joint optical elements. Firstly

the principle of tensile stress induced by adhesive layer to optical elements during adhesive curing was analyzed and the main factors of generating shrinkage stress were obtained. Then

a finite element model of the reflective mirror set was constructed. The finite element analysis was carried out by using the thermal-to-shrinkage analogy and the thermal modeling tools were used to compute the adhesive curing shrinkage. The curing shrinkage was substituted by low temperature concentration

but the Coefficient of Thermal Expansion( CTE) value of the adhesive could not be taken place by the coefficient of adhesive shrinkage directly. After converting the coefficient of adhesive shrinkage to the equivalent CTE value

the analysis results are accord with the test results. Finally

the improved glue scheme was put forward on the basis of the analysis results. The experiment results indicate that the reflective mirror surface deformation( PV value) has decreased from 0.547λ to 0.064λ

and the RMS value decreased from 0.127λ to 0.038λ. This results mean that the effect of shrinkage stress in adhesive curing processing on the reflective mirror surface has improved greatly.

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Keywords

references

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