真空封装硅微陀螺品质因数的标定

王玉朝; 滕霖; 孙香政; 王刚; 郭志想; 余才佳

doi:10.3788/OPE.20142210.2708

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真空封装硅微陀螺品质因数的标定

微纳技术与精密机械 | 更新时间：2020-08-13

- 真空封装硅微陀螺品质因数的标定
- Quality factor measurement of vacuum-packaged microgyroscopes
- 光学精密工程 2014年22卷第10期页码：2708-2714
- 作者机构：
  
  中国航空工业集团西安飞行自动控制研究所,陕西西安,710065
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2011AA110102)();国家国际科技合作专项资助项目(No.2011DFA72370)()
- DOI：10.3788/OPE.20142210.2708
  中图分类号： V241.5
- 收稿日期：2014-01-23，
  
  修回日期：2014-03-12，
  
  纸质出版日期：2014-10-25
- 稿件说明：
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王玉朝, 滕霖, 孙香政等. 真空封装硅微陀螺品质因数的标定[J]. 光学精密工程, 2014,22(10): 2708-2714

WANG Yu-zhao, TENG Lin, SUN Xiang-zheng etc. Quality factor measurement of vacuum-packaged microgyroscopes[J]. Editorial Office of Optics and Precision Engineering, 2014,22(10): 2708-2714
王玉朝, 滕霖, 孙香政等. 真空封装硅微陀螺品质因数的标定[J]. 光学精密工程, 2014,22(10): 2708-2714 DOI： 10.3788/OPE.20142210.2708.

WANG Yu-zhao, TENG Lin, SUN Xiang-zheng etc. Quality factor measurement of vacuum-packaged microgyroscopes[J]. Editorial Office of Optics and Precision Engineering, 2014,22(10): 2708-2714 DOI： 10.3788/OPE.20142210.2708.

摘要

建立了真空封装陀螺的无激励欠阻尼二阶系统模型

用于测量真空封装硅微陀螺的品质因数.对该模型进行理论推导

提出了一种时延常数测试方法.该方法首先利用锁相环路

驱动陀螺实现闭环谐振

获得较大的初始振幅.然后关断激励信号

通过放大电路和解调电路

记录硅微陀螺振荡幅值的衰减过程;用计算机通过Matlab GUI实时采集并拟合振幅衰减曲线

获得时间常数.最后

通过时间常数解算获得真空封装硅微陀螺的品质因数.对真空封装硅微陀螺品质因数的实验测试结果表明:该方法实测数据与理论分析模型的拟合度为99.999%

测试重复性为4.03%

优于传统的扫频测试法的重复性.对比时延常数法与锁相放大器扫频测试法的测试数据显示:时延常数法具有更高的测量精度和更高的测试效率.该方法可以推广到其它高真空封装MEMS器件的品质因数测量.

Abstract

A under-damping second-order system model without excitation was proposed to measure the quality factor(

factor) for a vacuum packaged microgyroscope. The model was analyzed theoretically and a time decay constant method was presented. Firstly

an initial displacement of the seismic mass was obtained by exciting the microgyroscope to implement a closed loop resonance with a Phase Locked Loop (PLL). By releasing the excitation signal

the vibration amplitude decay curve was then acquired through demodulating the vibrating displacement signal and was transferred to a computer by a Field Programming Gate Array(FPGA) hardware and Matlab GUI software simultaneously. Finally

the

factor of the vacuum packaged microgyroscope was calculated by exponentially fitting the envelope of decay curve. The experimental results show that the

-square value of the fitted curve reaches up to 99.999% as compared to the measured data and the repeatability of the tested

factor is 4.03%

much better than that of the frequency sweeping method. Comparing the measurement data of decay constant method and frequency sweeping method

the former shows better measurement accuracy and higher efficiency. The method is also suitable for the measurements of microsensors with high

factors.

关键词

Keywords

references

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