嵌入式时栅传感器的动态自标定

孙世政; 陈锡侯; 彭东林; 武亮

doi:10.3788/OPE.20142210.2757

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嵌入式时栅传感器的动态自标定

微纳技术与精密机械 | 更新时间：2020-08-13

- 嵌入式时栅传感器的动态自标定
- Dynamic self-calibration for embedded time grating sensors
- 光学精密工程 2014年22卷第10期页码：2757-2764
- 作者机构：
  
  1. 合肥工业大学仪器科学与光电工程学院,安徽合肥,230009
  2. 重庆理工大学机械检测技术与装备教育部工程中心重庆,400054
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51127001,No.51005263)();国家863高技术研究发展计划资助项目(No.2012AA041200)();"两江学者"
- DOI：10.3788/OPE.20142210.2757
  中图分类号： TP212.6
- 收稿日期：2014-02-20，
  
  修回日期：2014-04-03，
  
  纸质出版日期：2014-10-25
- 稿件说明：
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孙世政, 陈锡侯, 彭东林等. 嵌入式时栅传感器的动态自标定[J]. 光学精密工程, 2014,22(10): 2757-2764

SUN Shi-zheng, CHEN Xi-hou, PENG Dong-lin etc. Dynamic self-calibration for embedded time grating sensors[J]. Editorial Office of Optics and Precision Engineering, 2014,22(10): 2757-2764
孙世政, 陈锡侯, 彭东林等. 嵌入式时栅传感器的动态自标定[J]. 光学精密工程, 2014,22(10): 2757-2764 DOI： 10.3788/OPE.20142210.2757.

SUN Shi-zheng, CHEN Xi-hou, PENG Dong-lin etc. Dynamic self-calibration for embedded time grating sensors[J]. Editorial Office of Optics and Precision Engineering, 2014,22(10): 2757-2764 DOI： 10.3788/OPE.20142210.2757.

摘要

提出了一种新的嵌入式时栅角位移传感器的自标定方法

以提高这类传感器在没有高精度母仪标定以及参数和工作环境发生变化时的测量精度.介绍了嵌入式时栅的特点

提出了利用两个间隔一定角度离散测头之间的误差规律变换来实现自标定的方法.设计了动态自标定系统

采用卡尔曼动态滤波算法来降低动态标定过程中传感器自身稳定性波动和环境干扰的影响.为了寻求最优参数以保证标定精度

提出了残差的控制算法.最后

运用设计的自标定系统对传感器进行了标定实验

并与以往母仪标定方法进行了对比. 实验结果表明

传感器的误差从标定前±20"降低到±2.4"

标定参数与实际传感器误差成分相吻合

标定精度与以往母仪标定的精度基本相同

满足时栅传感器的标定要求.

Abstract

A dynamic self-calibration method was proposed for an embedded time grating sensor to improve its measuring accuracy when it worked at changed electric parameters and measuring environments and could not be calibrated by a standard instrument. The features of the embedded time grating sensor were introduced

and a self-calibration method was presented by using error regular transformation of two discrete probes in a certain angle. Then

a dynamic self-calibration system was designed. To reduce the influence of sensor stability and environmental disturbance on the dynamaic calibrating processing

a Kalman filter was used. Moreover

an algorithm for residual control was proposed to ensure calibration precision. Finally

the self-calibration system was applied to calibration of the embedded time grating sensor.This calibration method was compared with the traditional standard method. Experiment results show that the original errors of sensor have been reduced from ±20" to ±2.4"

which is nearly the same as the accuracy of standard instrument calibration and has been satisfied the calibration requirements of time grating sensors.

关键词

Keywords

references

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