基于压电陶瓷光电相移驱动的大行程纳米定位系统

许素安; 谢敏; 孙坚; 陈乐; 王桂荣

doi:10.3788/OPE.20142210.2773

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基于压电陶瓷光电相移驱动的大行程纳米定位系统

微纳技术与精密机械 | 更新时间：2020-08-13

- 基于压电陶瓷光电相移驱动的大行程纳米定位系统
- Long range nano-positioning system based on optoelectronic phase-shift for piezoelectric actuator
- 光学精密工程 2014年22卷第10期页码：2773-2778
- 作者机构：
  
  中国计量学院机电工程学院,浙江杭州,310018
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51105348,No.61203113)();浙江省钱江人才计划资助项目(No.2013R1066)();第45批教育部留学回国启动基
- DOI：10.3788/OPE.20142210.2773
  中图分类号： TN384;TP273
- 收稿日期：2014-02-20，
  
  修回日期：2014-04-09，
  
  纸质出版日期：2014-10-25
- 稿件说明：
移动端阅览
许素安, 谢敏, 孙坚等. 基于压电陶瓷光电相移驱动的大行程纳米定位系统[J]. 光学精密工程, 2014,22(10): 2773-2778

XU Su-an, XIE Min, SUN Jian etc. Long range nano-positioning system based on optoelectronic phase-shift for piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2014,22(10): 2773-2778
许素安, 谢敏, 孙坚等. 基于压电陶瓷光电相移驱动的大行程纳米定位系统[J]. 光学精密工程, 2014,22(10): 2773-2778 DOI： 10.3788/OPE.20142210.2773.

XU Su-an, XIE Min, SUN Jian etc. Long range nano-positioning system based on optoelectronic phase-shift for piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2014,22(10): 2773-2778 DOI： 10.3788/OPE.20142210.2773.

摘要

由于压电陶瓷驱动器作纳米定位控制系统驱动元件会导致定位过程中出现超调及振荡现象

故提出了一种新的基于外差干涉仪和自制高频相移电路的光电相移压电陶瓷驱动方法.实验论证了在严格控制的实验环境下

压电陶瓷能实现自主位置锁定并以纳米量级步距值被逐步推进.步距值可控的压电陶瓷驱动器与商用宏动平台结合

可实现纳米精度重复性的大行程定位系统.实验结果表明

对于5 mm往返行程的位移

在靠近目标处执行理论值为5 nm步距值的步进位移时

系统的定位重复性精度小于1 nm.该定位方法规避了压电陶瓷的机械非线性误差

具有系统架构简单

定位速度快等优点

可应用于当前纳米科技和超精密加工等领域.

Abstract

As overshoot and oscillation phenomena will occur when a piezoelectric ceramic actuator is taken as a driving element for nano-positioning systems

this paper proposes a new piezoelectric ceramic displacement control method based on a home made high frequency phase-shifting electronic circuit and a heterodyne interferometer. On the experiments

it demonstrates that the piezoelectric ceramic could be locked actively and be driven step by step in a nanometric scale under a strictly controlled experimental environment. This controlled stepper piezoelectric actuator combined with a commercial macro stage achieves a displacement system with nanometric repeatability over a millimeter range. Experimental results show that this system has a repeatability smaller than 1 nm when it has over back and forth displacement of 5 mm and executes the step by step displacement with the step value of 5 nm near the target position. The positioning method avoids the mechanical defects of piezoelectric actuator and is characteristics by simpler structure

faster positioning and suitable for numerous applications in nanotechnology and ultra precision machining .

关键词

Keywords

references

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