用于探空仪的加热式湿度传感器及测量电路

罗毅; 施云波; 杨昆; 商春雪; 渠立亮

doi:10.3788/OPE.20142211.3050

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用于探空仪的加热式湿度传感器及测量电路

微纳技术与精密机械 | 更新时间：2020-08-13

- 用于探空仪的加热式湿度传感器及测量电路
- Humidity sensor for radiosonde and its measuring circuit
- 光学精密工程 2014年22卷第11期页码：3050-3060
- 作者机构：
  
  1. 云南师范大学信息科学和技术学院西部资源环境地理信息技术教育部工程研究中心,云南昆明,650092
  2. 哈尔滨理工大学测控技术与通信工程学院测控技术与仪器黑龙江省高校重点实验,黑龙江哈尔滨,150080
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2006AA04Z319)();黑龙江省自然科学基金资助项目(No.ZD201217977)();哈尔滨市科技创新人才专项资
- DOI：10.3788/OPE.20142211.3050
  中图分类号： TH765.1;TP212.2
- 收稿日期：2014-03-13，
  
  修回日期：2014-04-13，
  
  纸质出版日期：2014-11-25
- 稿件说明：
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罗毅, 施云波, 杨昆等. 用于探空仪的加热式湿度传感器及测量电路[J]. 光学精密工程, 2014,22(11): 3050-3060

LUO Yi, SHI Yun-bo, YANG Kun etc. Humidity sensor for radiosonde and its measuring circuit[J]. Editorial Office of Optics and Precision Engineering, 2014,22(11): 3050-3060
罗毅, 施云波, 杨昆等. 用于探空仪的加热式湿度传感器及测量电路[J]. 光学精密工程, 2014,22(11): 3050-3060 DOI： 10.3788/OPE.20142211.3050.

LUO Yi, SHI Yun-bo, YANG Kun etc. Humidity sensor for radiosonde and its measuring circuit[J]. Editorial Office of Optics and Precision Engineering, 2014,22(11): 3050-3060 DOI： 10.3788/OPE.20142211.3050.

摘要

针对探空仪湿度传感器在高空低温、高湿恶劣环境下容易结露

湿度波动大、电路板分布电容对测量结果有影响等问题

研究了具有蛇形加热器的平板夹心电容式湿度传感器及其工艺制备方法

并设计了测量电路。采用微机电系统(MEMS)加工工艺设计了加热式湿度传感器

通过对传感器进行有限元分析

确定了传感器表面加热区域温度分布情况

得出了环境温度、加热功率与加热温度三者之间的函数关系。提出一种基于电容充放电及比较法的湿度测量电路

从而有效地抑制了温度漂移和零点漂移

减小了寄生电容对测量结果的影响。地面实验结果显示:湿度传感器灵敏度约为2.3%RHpF

-1

迟滞约为0.7% FS

重复性约为1.9%

测量总不确定度约为4%

时间常数约为0.5 s。本文研究的湿度传感器及其测量电路具有很好的温度稳定性

能够在低温环境下正常工作。

Abstract

Humidity sensors are easy to condense and have humidity fluctuation

moreover

their board distributed capacitances affect measurement results under a high altitude environment. Therefore

this paper proposes a sandwich plate capacitive humidity sensor integrated with a snake like platinum resistance heater and its prepared method. Then

it studies the measuring circuit for the sensor. The humidity sensor with heater was designed using Micro-electric-mechanic System(MEMS) technology

the temperature distribution of sensor surface was analyzed and the function relationship between environment temperature

heating power and heating temperature were obtained by using finite element analysis. To suppress the temperature and zero drifts effectively and reduce the influence of parasitic capacitance on measurement

a humidity measurement circuit based on the capacitor charging and comparative law was designed. The ground experimental results on the sensor show that the humidity sensitivity is about 2.3%RHpF

-1

hysteresis is about 0.7%FS

and the repeatability is about 1.9%. Moreover

it gives the measurement uncertainty about 4%

time constance about 0.5 s. In conclusion

the humidity sensor and measurement circuit have good temperature stability

and is suitable for working at a low temperature correctly.

关键词

Keywords

references

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