多轴亚微米级平面定位台的滑模观测器无传感控制

佃松宜; 向国菲; 蒲明

doi:10.3788/OPE.20142211.3067

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多轴亚微米级平面定位台的滑模观测器无传感控制

微纳技术与精密机械 | 更新时间：2020-08-13

- 多轴亚微米级平面定位台的滑模观测器无传感控制
- Sensorless control of sliding mode observer for multi-DOF submicron-order planar motion stage
- 光学精密工程 2014年22卷第11期页码：3067-3073
- 作者机构：
  
  四川大学电气信息学院,四川成都,610065
- 作者简介：
- 基金信息：
  
  四川省高校院所应用成果转化计划资助项目(No.12DXYB171JH-002)()
- DOI：10.3788/OPE.20142211.3067
  中图分类号： TH703;TP274
- 收稿日期：2013-12-27，
  
  修回日期：2014-02-25，
  
  纸质出版日期：2014-11-25
- 稿件说明：
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佃松宜, 向国菲, 蒲明. 多轴亚微米级平面定位台的滑模观测器无传感控制[J]. 光学精密工程, 2014,22(11): 3067-3073

DIAN Song-yi, XIANG Guo-fei, PU Ming. Sensorless control of sliding mode observer for multi-DOF submicron-order planar motion stage[J]. Editorial Office of Optics and Precision Engineering, 2014,22(11): 3067-3073
佃松宜, 向国菲, 蒲明. 多轴亚微米级平面定位台的滑模观测器无传感控制[J]. 光学精密工程, 2014,22(11): 3067-3073 DOI： 10.3788/OPE.20142211.3067.

DIAN Song-yi, XIANG Guo-fei, PU Ming. Sensorless control of sliding mode observer for multi-DOF submicron-order planar motion stage[J]. Editorial Office of Optics and Precision Engineering, 2014,22(11): 3067-3073 DOI： 10.3788/OPE.20142211.3067.

摘要

针对Sawyer电机驱动的平面定位台的多轴精密定位问题(

X、Y

和

轴)

提出了一种新的部分无传感控制方法。用激光干涉仪检测定位台一个方向上的平移运动和摆动

并构建相应的闭环控制;同时

应用滑模观测器估计另一个方向上的平移运动并构建对应轴的闭环控制。在此基础上

通过实验从开环控制、多轴全闭环控制及部分无传感控制三方面对比了定位性能。实验结果表明:采用部分无传感控制

多轴平面定位台的重复定位精度达到亚微米(0.25 m)级;部分无传感控制下的动子行程与开环控制相同(

轴300 mm、

轴300 mm)

远大于基于多轴位置传感的全闭环控制下的动子行程(

轴100 mm、

轴100 mm);获得的结果可满足应用设计要求。

Abstract

A novel Partial Sensorless Control (PSC) method was proposed to improve the precision positioning capability of multi-DOF (

and

) motion for a planar motion stage driven by Sawyer motor. For the position estimation

a laser interferometer was used to detect the translational motion and swing in one direction and to construct a closed-loop control; a sliding mode observer-based technique was taken to estimate the translational motion in another direction and to construct a closed-loop control for a corresponding axis. The positioning performance on open-loop control

closed-loop control and PSC was compared by experiments. The experimental results verify that the PSC is an available way to obtain submicron-order positioning accuracy (0.25 m) with a 300 mm (

)300 mm (

) travel range

which is more larger than that of 100 mm (

)100 mm (

) travel range from the closed loop control of a multi-DOF (

and

) location sensing. The result meets the design requirement of positioning accuracy and travel range for planar motion stages.

关键词

Keywords

references

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BENDJEDIA M, AIT-AMIRAT Y, WALTHER B, et al.. Sensorless control of hybrid stepper motor[C]. 2007 European Conference on Power Electronics and Applications, Alborg, 2007: 1-10.

HIRAI J, KIM T W, KAWAMURA A. Position-sensorless drive of linear pulse motor for suppressing transient vibration[J]. IEEE Transactions on Industrial Electronics, 2000, 47(2): 337-345.

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SHTESSEL Y, EDWARDS C, FRIDMAN L, et al.. Sliding Mode Control and Observation[M]. New York: Springer, 2014.

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