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华侨大学 机电及自动化学院,福建 厦门,361021
收稿日期:2014-01-09,
修回日期:2014-03-21,
纸质出版日期:2014-12-25
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崔长彩, 余卿, 张遨等. 金刚石砂轮表面形貌测量系统[J]. 光学精密工程, 2014,22(12): 3167-3174
CUI Chang-cai, YU Qing, ZHANG Ao etc. Measurement system of surface topography for diamond grinding wheel[J]. Editorial Office of Optics and Precision Engineering, 2014,22(12): 3167-3174
崔长彩, 余卿, 张遨等. 金刚石砂轮表面形貌测量系统[J]. 光学精密工程, 2014,22(12): 3167-3174 DOI: 10.3788/OPE.20142212.3167.
CUI Chang-cai, YU Qing, ZHANG Ao etc. Measurement system of surface topography for diamond grinding wheel[J]. Editorial Office of Optics and Precision Engineering, 2014,22(12): 3167-3174 DOI: 10.3788/OPE.20142212.3167.
为了实现对金刚石砂轮表面形貌的非接触精密测量
开发了基于干涉原理的金刚石砂轮表面形貌专用测量系统
研究了该系统的测量原理和关键技术.根据垂直扫描白光干涉显微测量原理以及被测对象的特征
提出了适用于砂轮测量的方法
研究了系统的自动扫描范围、垂直方向的扫描方法、单次测量三维表面的恢复算法和磨粒的识别算法.结合自行设计的夹具搭建了砂轮测量系统
并对多次测量拼接算法进行了实验分析.实验结果表明:基于区域重合大小(重合度为30%~50%)的拼接算法获得的拼接前后重合区域的相关系数均大于0.8
拼接后重合区域的高度差均小于0.4
μ
m.得到的结果显示所搭建的系统可以恢复砂轮的形貌
其测量范围和精度满足砂轮磨粒评定和分析的要求.
In order to precisely measure the surface topography of a diamond grinding wheel in a non-contact way
an interferometry based special topographic measurement system was established and the principle and key techniques of the system were investigated. On the basis of the principle of vertical scanning white light interferometry and the characteristics of measured objects
an approach suitable for grinding wheel measurement was presented. Then
the key techniques such as automatic scanning range determination
larger vertical scanning
three dimensional surface reconstruction and abrasive grain recognition
were analyzed. With a specific setup for wheel fixing
a wheel measurement system was given based on the proposed method and its stitching method for a larger area evaluation was analyzed experimentally. Experimental results indicate that the correlation coefficient of the regions before and after stitchings is more than 0.8 by using area-based method with an overlapping area of 30%-50%. The height error of the stitched area is less than 0.4
μ
m. The system recovers the three dimensional surface of the grinding wheel and obtained measuring ranges and accuracy meet the requirements for analysis and evaluation of grinding wheels.
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WANG SH,CUI CH C,HUANG CH Q, et al.. Stitching for a large area of surface topography analysis of diamond grinding wheel[J]. SPIE,2012,8759:87591B.
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