均压槽对空气静压轴承微振动的影响

陈琦; 陈斌; 蔡黎明

doi:10.3788/OPE.20142212.3354

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均压槽对空气静压轴承微振动的影响

微纳技术与精密机械 | 更新时间：2020-08-13

- 均压槽对空气静压轴承微振动的影响
- Effect of equalizing groove on small vibration of aerostatic bearings
- 光学精密工程 2014年22卷第12期页码：3354-3359
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院苏州生物医学工程技术研究所,江苏苏州,中国,215163
- 作者简介：
- 基金信息：
  
  国家重大科研仪器设备开发专项基金资助项目(No.61227901)()
- DOI：10.3788/OPE.20142212.3354
  中图分类号： TH133.36
- 收稿日期：2014-04-16，
  
  修回日期：2014-05-08，
  
  纸质出版日期：2014-12-25
- 稿件说明：
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陈琦, 陈斌, 蔡黎明. 均压槽对空气静压轴承微振动的影响[J]. 光学精密工程, 2014,22(12): 3354-3359

CHEN Qi, CHEN Bin, CAI Li-ming. Effect of equalizing groove on small vibration of aerostatic bearings[J]. Editorial Office of Optics and Precision Engineering, 2014,22(12): 3354-3359
陈琦, 陈斌, 蔡黎明. 均压槽对空气静压轴承微振动的影响[J]. 光学精密工程, 2014,22(12): 3354-3359 DOI： 10.3788/OPE.20142212.3354.

CHEN Qi, CHEN Bin, CAI Li-ming. Effect of equalizing groove on small vibration of aerostatic bearings[J]. Editorial Office of Optics and Precision Engineering, 2014,22(12): 3354-3359 DOI： 10.3788/OPE.20142212.3354.

摘要

由于空气静压轴承工作过程中的微振动制约了它在超精密设备中的应用

本文对空气静压轴承的动态特性进行了实验分析

并提出用带均压槽的结构设计来解决上述问题.运用有限元软件对空气静压轴承进行仿真

得到了空气静压轴承的各项性能参数.分析了微振动产生的原因并提出在空气静压轴承工作表面增加均压槽来有效抑制空气静压轴承的微振动的方法.通过实验对提出方法进行了验证

结果显示计算结果与实验具有较好的一致性.实验表明通过增加均压槽的方式可以将轴承微振动降低80%

有效地提高了空气轴承的稳定性和运行精度.本研究为抑制空气轴承微振动和提高整个机床设备精度做出了有益探索.

Abstract

As the very small vibration of an aerostatic bearing limits its applications in ultra-precision machining

this paper analyzes experimentally the dynamical characteristics of the aerostatic bearing and proposes a structure design with an equalizing groove to solve the problem mentioned above. To realize the mechanical characteristics of aerostatic bearings

the analytical model was set up by using the finite element analysis software FLUENT and the performance parameters of the aerostatic bearing were obtained. The mechanism for the occurrence of small vibration was analyzed and the methods to add an equalizing groove on the surface of the aerostatic bearing to reduce the small vibration were proposed. The experiments were performed to verify the proposed method and the results show that the experiment results are good consistent with the analysis results. It indicates that the small vibration can be successfully suppressed by 80% with the proposed equalizing groove

which improves the stability and operation accuracy of the aerostatic bearing and is a useful exploring for suppressing the small vibration of aerostatic bearings and improving the accuracy of whole machine tool.

关键词

Keywords

references

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