基于铌酸锂制作光弹调制器用压电驱动器

王志斌; 李克武; 张瑞; 王立福; 王国梁

doi:10.3788/OPE.20152301.0063

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基于铌酸锂制作光弹调制器用压电驱动器

现代应用光学 | 更新时间：2020-08-13

- 基于铌酸锂制作光弹调制器用压电驱动器
- Fabrication of piezoelectric actuator for photoelastic modulator based on lithium niobate
- 光学精密工程 2015年23卷第1期页码：63-69
- 作者机构：
  
  1. 中北大学仪器科学与动态测试教育部重点实验室,山西太原,030051
  2. 中北大学山西省光电信息与仪器工程技术研究中心,山西太原,030051
- 作者简介：
- 基金信息：
  
  国家国际科技合作专项资助项目(No.2012DFA10680,No.2013DFR10150)();国家自然科学基金仪器专项基金资助项目(No.61127015)()
- DOI：10.3788/OPE.20152301.0063
  中图分类号： TN384;TN761
- 收稿日期：2014-03-12，
  
  修回日期：2014-05-13，
  
  纸质出版日期：2015-01-25
- 稿件说明：
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王志斌, 李克武, 张瑞等. 基于铌酸锂制作光弹调制器用压电驱动器[J]. 光学精密工程, 2015,23(1): 63-69

WANG Zhi-bin, LI Ke-wu, ZHANG Rui etc. Fabrication of piezoelectric actuator for photoelastic modulator based on lithium niobate[J]. Editorial Office of Optics and Precision Engineering, 2015,23(1): 63-69
王志斌, 李克武, 张瑞等. 基于铌酸锂制作光弹调制器用压电驱动器[J]. 光学精密工程, 2015,23(1): 63-69 DOI： 10.3788/OPE.20152301.0063.

WANG Zhi-bin, LI Ke-wu, ZHANG Rui etc. Fabrication of piezoelectric actuator for photoelastic modulator based on lithium niobate[J]. Editorial Office of Optics and Precision Engineering, 2015,23(1): 63-69 DOI： 10.3788/OPE.20152301.0063.

摘要

基于石英(SiO

)制作光弹调制器(PEM)的压电驱动器时

存在机电耦合系数小、需高压驱动且谐振频率随温度漂移严重等缺陷

故本文研究了PEM的优化设计方法.考虑铌酸锂(LiNbO

)特殊的晶体结构

从理论上推导了LiNbO

晶片作为压电驱动器的可行性

并确定其切型为

zyw

/35°切.基于有限元分析软件COMSOL4.3a仿真

确定了晶片体积和谐振频率

设计了LiNbO

压电驱动器.对设计出的压电驱动器进行了压电性能测试

并和SiO

压电驱动器进行了比较.将LiNbO

压电驱动器和硒化锌(ZnSe)光弹晶体组合成PEM

用671 nm激光进行了光弹调制实验.实验结果表明:实现相同位移时

SiO

压电驱动器需要的驱动电压是LiNbO

压电驱动器的100多倍

且后者横向长度伸缩振动模式单一性和稳定性均优于前者.驱动电压为3.76 V时

671 nm的激光通过基于LiNbO

压电驱动器的PEM的调制光程差为3.7 μm.得到的结果表明:基于LiNbO

压电驱动器的PEM易于驱动控制

调制性能优于基于SiO

驱动器的PEM.

Abstract

When the quartz(SiO

) is used as the piezoelectric actuator of a photoelastic modulator(PEM)

it has shortcomings of smaller electromechanical coupling coefficient

high driving voltage required

and serious frequency drifting with a temperature. Therefore

this paper designs an optimized PEM. In consideration of the special crystal structure of lithium niobate (LiNbO

)

the feasibility of LiNbO

crystal to be a piezoelectric actuator was verified and its cut shape was set as

zyw

/35°cut. Based on the finite element analysis software COMSOL4.3a simulation

the chip size and the resonant frequency were determined. Then

a LiNbO

piezoelectric actuator was designed. The piezoelectric performance of the piezoelectric actuator was tested and compared with SiO

piezoelectric actuator. Finally the LiNbO

piezoelectric actuator was combined with a ZnSe crystal to construct a PEM

and it was performed a photoelastic experiment by a 671 nm laser. The experiment for achieving the same displacement show that the drive voltage for the SiO

based piezoelectric actuator is 100 times that of LiNbO

based piezoelectric actuator

and the unity and stability of lateral length stretching vibration mode for the latter is better than that for the former. Moreover

when the drive voltage is 3.76 V

the optical path difference of 671 nm laser will be modulated to 3.7 μm through the LiNbO

piezoelectric actuator based PEM. These results demonstrate that proposed LiNbO

piezoelectric actuator based PEM is easy to drive and control and the modulation performance is better than that of previous PEMs.

关键词

Keywords

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