杠杆式尺蠖压电直线驱动器

马立; 肖金涛; 周莎莎; 孙立宁

doi:10.3788/OPE.20152301.0184

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杠杆式尺蠖压电直线驱动器

微纳技术与精密机械 | 更新时间：2020-08-13

- 杠杆式尺蠖压电直线驱动器
- Linear lever-type piezoelectric inchworm actuator
- 光学精密工程 2015年23卷第1期页码：184-190
- 作者机构：
  
  1. 上海大学机电工程与自动化学院上海,200072
  2. 苏州大学机器人与微系统研究中心,江苏苏州,215021
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.50905105)();上海市自然科学基金资助项目(No.13ZR1415800)();上海市教育委员会科研创新项目(No.14YZ00
- DOI：10.3788/OPE.20152301.0184
  中图分类号： TN384
- 收稿日期：2014-03-25，
  
  修回日期：2014-05-18，
  
  纸质出版日期：2015-01-25
- 稿件说明：
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马立, 肖金涛, 周莎莎等. 杠杆式尺蠖压电直线驱动器[J]. 光学精密工程, 2015,23(1): 184-190

MA Li, XIAO Jin-tao, ZHOU Sha-sha etc. Linear lever-type piezoelectric inchworm actuator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(1): 184-190
马立, 肖金涛, 周莎莎等. 杠杆式尺蠖压电直线驱动器[J]. 光学精密工程, 2015,23(1): 184-190 DOI： 10.3788/OPE.20152301.0184.

MA Li, XIAO Jin-tao, ZHOU Sha-sha etc. Linear lever-type piezoelectric inchworm actuator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(1): 184-190 DOI： 10.3788/OPE.20152301.0184.

摘要

设计了一种基于尺蠖运动原理的压电直线驱动器

用于解决光学领域中的精密定位问题.该驱动器采用了对称杠杆式位移放大机构

在保证钳紧力的同时

可以获得较大的驱动位移.阐述了尺蠖式压电驱动器的工作原理

对杠杆式柔性放大机构的位移损失、压电陶瓷与柔性机构的耦合特性及箝位机构与中间驱动机构的刚度进行了分析.利用有限元软件Ansys对钳位机构和驱动机构的变形、应力、输出位移和固有频率等参数进行了仿真分析.最后

搭建了实验平台

测试了驱动器的各项性能.测试结果显示

该驱动器的行程为±25 mm

钳紧力为17 N

承载力为11 N

最大和最小步距分别为55 μm和60 nm.当驱动电压为150 V时

驱动器的最高驱动速度为1.259 mm/s.得到的性能指标满足光学领域精密定位需要.

Abstract

A linear lever-type piezoelectric inchworm actuator is designed to implement the high precision positioning of optical field. The actuator adopts the displacement amplification mechanism of symmetric lever

which offers enough clamping force while obtains a larger driving displacement. The working principle of piezoelectric inchworm actuator is presented. And the displacement loss of the flexible amplification mechanism

the coupling characteristics between piezoelectric ceramics and flexible mechanism

and the stiffness and driving mechanism of the clamping mechanism are analyzed. The finite element method is used to simulate the clamping mechanism and the driving mechanism

then the deformation

stress

output displacement and natural frequency are all analyzed. An experimental platform is set up to test the performance of the actuator. The results on the actuator are shown that the travel range

clamping force and the bearing capacity for the actuator are 25 mm

17 N

and 11 N

respectively. Moreover

the maximum step is 55 μm

and the minimum step is 60 nm

respectively. By applying a driving voltage of 150 V

it offers the highest driving speed of 1.259 mm/s. these data meet the demands of the precision positioning in the optical field.

关键词

Keywords

references

LIU Y X,CHEN W S. A linear piezoelectric actuator using the first-order bending modes [J].Ceramics International,2013,39 (5):681-684.

HATSUZAWA T, MICHISHITA K. A reciprocating linear actuator driven by anti-photo axis of plankton [J]. Sensors and Actuators A: Physical,2013,201 (10):316-320.

JAEWOOK L, ERCAN M. Magnetic force enhancement in a linear actuator by air-gap magnetic field distribution optimization and design [J]. Finite Elements in Analysis and Design,2013, 58 (10):44-52.

张桂林, 张承进, 赵学良. 压电驱动器记忆特性迟滞非线性建模 [J]. 光学精密工程, 2012,20(5): 996-1001. ZHANG G L,ZHANG CH J, ZHAO X L. Modeling of nonlocal memory hysteresis in piezoelectric actuators [J]. Opt. Precision Eng., 2012, 20(5): 996-1001.(in Chinese)

马立,谢炜,刘波,等. 柔性铰链微定位平台的设计 [J]. 光学精密工程, 2014,22(2): 338-345. MA L, XIE W, LIU B, et al.. Design of micro-positioning stage with flexure hingle [J]. Opt. Precision Eng., 2014, 22(2): 338-345.(in Chinese)

张东华,陈维山,等. 微机电系统用压电驱动器的发展及应用 [J]. 仪器仪表学报,2006,27 (6):1023-1025. ZHANG D H,CHEN W SH,et al.. Development and applications of piezoelectric actuator in MEMS [J]. Chinese Journal of Scientific Instrument,2006, 27 (6):1023-1025.(in Chinese)

王俐, 饶长辉, 饶学军. 压电陶瓷微动台的复合控制 [J]. 光学精密工程, 2012,20(6): 1265-1271. WANG L, RAO CH H, RAO X J. Feed-forward control of piezoelectric ceramic position stage [J]. Opt. Precision Eng., 2012, 20(6): 1256-1271.(in Chinese)

刘泊,郭建英,孙永全. 压电陶瓷微位移驱动器建模与控制 [J]. 光学精密工程,2013, 6 (6):1503-1509. LIU B,GUO J Y,SUN Y Q. Modeling and control for PZT micro-displacement Actuator [J].Opt. Precision Eng., 2013, 6 (6):1503-1509.(in Chinese)

张兆成,胡泓. 提高蠕动式压电直线驱动器输出力的研究进展 [J]. 微特电机.2009, 4 (12):61-64. ZHANG ZH CH,HU H. Research advances of improving thrust power of inchworm-type piezoelectric linear actuators [J]. Small & Special Electrical Machines,2009, 4 (12):61-64.(in Chinese)

JIAN L, RAMIN S. Design and development of a new piezoelectric linear Inchworm actuator [J]. Mechatronics,2005, 15 (2): 651-681.

ZHANG Z J,XU M L. Research for a New Actuator With Variable Step and Large Displacement [J]. International journal of Applied Electromagnetics and Mechanics,2010,33(10): 597-604.

ZHANG ZH CH, HU H. Design of A Novel Piezoelectric Inchworm Actuator. Proceedings of the 11th International Conference on Electrical Machines and Systems,2008(10): 3707-3711.

PAROSJ M,WEISBOROL. How to design flexure hinges [J]. Materials and Design,1965.

张兆成,胡泓. 尺蠖驱动器箝位机构的优化设计 [J]. 纳米技术与精密工程,2010,3(8):251-256. ZHANG ZH CH,HU H. Optimum design of clamp device for inchworm actuator [J]. Nanotechnology and Precision Engineering,2010,3(8):251-256.(in Chinese)

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