用于影像仪测量误差分离的自校准技术

郭天太; 王晓晓; 洪博; 孔明; 施玉书

doi:10.3788/OPE.20152301.0197

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用于影像仪测量误差分离的自校准技术

微纳技术与精密机械 | 更新时间：2020-08-13

- 用于影像仪测量误差分离的自校准技术
- Self-calibration technology in measuring error separation of imaging instrument
- 光学精密工程 2015年23卷第1期页码：197-205
- 作者机构：
  
  1. 中国计量学院计量测试工程,浙江杭州,310018
  2. 北京计量科学研究院北京,100013
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.11172287)();国家重大科学仪器设备开发专项资助项目(No.2011YQ03011208)();浙江省自然科学基金资助项目(No
- DOI：10.3788/OPE.20152301.0197
  中图分类号： TH161.5;TP216
- 收稿日期：2014-06-10，
  
  修回日期：2014-07-18，
  
  纸质出版日期：2015-01-25
- 稿件说明：
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郭天太, 王晓晓, 洪博等. 用于影像仪测量误差分离的自校准技术[J]. 光学精密工程, 2015,23(1): 197-205

GUO Tian-tai, WANG Xiao-xiao, HONG Bo etc. Self-calibration technology in measuring error separation of imaging instrument[J]. Editorial Office of Optics and Precision Engineering, 2015,23(1): 197-205
郭天太, 王晓晓, 洪博等. 用于影像仪测量误差分离的自校准技术[J]. 光学精密工程, 2015,23(1): 197-205 DOI： 10.3788/OPE.20152301.0197.

GUO Tian-tai, WANG Xiao-xiao, HONG Bo etc. Self-calibration technology in measuring error separation of imaging instrument[J]. Editorial Office of Optics and Precision Engineering, 2015,23(1): 197-205 DOI： 10.3788/OPE.20152301.0197.

摘要

基于自校准技术提出了用于影像仪的误差分离方法.建立了自校准算法模型

并利用影像仪对算法模型进行了实验验证.该算法运用普通栅格板来替代标准器

将栅格板置于影像仪工作台3个不同位置得到3组测量数据

通过研制的测量数据转换模型将得到的数据代入自校准算法模型中

最终将测量结果中包含的仪器系统误差分离出来

实现了自校准.由于运用了测量数据转换模型

有效解决了实验过程中栅格板所在坐标系与影像仪工作台坐标系不重合的问题

提高了影像仪测量结果的准确度.测试实验显示:测量点实际测得的误差为毫米级

经过自校准算法处理后得到的测量点的系统误差最大为0.49 μm

最小为0.00 μm

表明将自校准算法应用于影像测量仪结果的误差分离具有较好的可行性.

Abstract

A measuring error separation method was proposed on the basis of self-calibration algorithm for an imaging instrument. A self-calibration model was established and verified by the imaging instrument. A regular grid plate was used to replace the standard

and the grid plate was put on the image instrument stage in three different positions to get three sets of measurement data. The data were put into the self-calibration model through the developed transformation model in advance. Then

the system error contained in the measurement results was separated

and self-calibration was implemented. As measurement data transformation model was established

the problem of misalignment between grid plate and stage coordinate system was solves effectively during the process of experiment and the measuring accuracy of the imaging instrument was improved. Experiments show that the error of the measurement point is or millimeter scale without the self-calibration algorithm

but the maximum and minimum errors of the measurement point after self-calibration are 0.49 μm and 0.00 μm respectively. The results mean that it is feasible to apply the self-calibration algorithm to error separation of measurement results for the image measuring instrument.

关键词

Keywords

references

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