大型光学设备检测中大口径平行光管波像差的消除

李响; 张晓辉

doi:10.3788/OPE.20152302.0342

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大型光学设备检测中大口径平行光管波像差的消除

现代应用光学 | 更新时间：2020-08-13

- 大型光学设备检测中大口径平行光管波像差的消除
- Elimination of wavefront aberration introduced from large aperture collimator in detection of large optical device
- 光学精密工程 2015年23卷第2期页码：342-348
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院大学北京,中国,100049
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61307114)()
- DOI：10.3788/OPE.20152302.0342
  中图分类号： TH741.14
- 收稿日期：2013-10-22，
  
  修回日期：2013-12-20，
  
  纸质出版日期：2015-02-25
- 稿件说明：
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李响, 张晓辉,. 大型光学设备检测中大口径平行光管波像差的消除[J]. 光学精密工程, 2015,23(2): 342-348

LI Xiang, ZHANG Xiao-hui,. Elimination of wavefront aberration introduced from large aperture collimator in detection of large optical device[J]. Editorial Office of Optics and Precision Engineering, 2015,23(2): 342-348
李响, 张晓辉,. 大型光学设备检测中大口径平行光管波像差的消除[J]. 光学精密工程, 2015,23(2): 342-348 DOI： 10.3788/OPE.20152302.0342.

LI Xiang, ZHANG Xiao-hui,. Elimination of wavefront aberration introduced from large aperture collimator in detection of large optical device[J]. Editorial Office of Optics and Precision Engineering, 2015,23(2): 342-348 DOI： 10.3788/OPE.20152302.0342.

摘要

使用大口径平行光管检测大型光学设备或元件时

平行光管的自身误差会影响检测结果

故本文提出了一种消除光学检测结果中平行光管引入误差的新方法。该方法使用干涉仪获取平行光管和光学检测系统的出射波前信息并以37项Standard Zernike Phase多项式进行拟合;通过两组系数相减分离平行光管引入误差

再配合ZEMAX中建立的等效被检光学系统的仿真模型模拟真实系统的出射光锥

最终获得被检光学系统真实的出射波前信息。利用ZEMAX中的光学系统模型验证了该方法在大口径光学检测工作中的可行性;使用焦距为1 597 mm

口径为150 mm的小型平行光管、焦距为50 mm的光学镜头进行了实验。实验结果表明:使用该方法获得的被检光学系统出射波前与真实波前的P-V值误差小于0.005λ

RMS值误差小于0.001λ

可以满足实验室中对被检光学系统成像质量参数检测的精度要求。

Abstract

When a large aperture collimator is used to test large aperture optical devices or components

the error introduced by the collimator will effect the measuring accuracy. This paper proposes a new method to eliminate the error from optical test results. The method uses an interferometer to obtain wavefront information of the collimator and the optical testing system

and adopts 37 Standard Zernike Phase polynomials to fit the wavefront. The error introduced by the collimator is then separated by subtraction of two sets of coefficients and the true wavefront information of tested optical system is obtained by simulating the light cone of a real optical system using the simulation model of tested optical system established in ZEMAX. The feasibility of this method in large aperture optical testing is verified by using the optical system model in ZEMAX

and an experiment is performed by using a small collimator with a focal length of 1 597 mm and an aperture of 150 mm

as well as a camera lens with a focal length of 50 mm. The experiment results show that the calculated wavefront P-V error is less than 0.005λ and the RMS error is less than 0.001λ after eliminating collimator error as compared to the real tested optical system wavefront. It meets the accuracy requirement of testing optical systems for image quality parameters in a laboratory.

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Keywords

references

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