静电悬浮加速度计轴间耦合误差角的在线测量

刘爽; 刘云峰; 董景新

doi:10.3788/OPE.20152302.0415

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静电悬浮加速度计轴间耦合误差角的在线测量

微纳技术与精密机械 | 更新时间：2020-08-13

- 静电悬浮加速度计轴间耦合误差角的在线测量
- Online measurement of coupled error angle between different axes of electrostatically suspended accelerometer
- 光学精密工程 2015年23卷第2期页码：415-422
- 作者机构：
  
  清华大学精密仪器系高精度导航技术教育部重点实验室北京,100084
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61374207)()
- DOI：10.3788/OPE.20152302.0415
  中图分类号： TH824.4;U666.1
- 收稿日期：2014-07-07，
  
  修回日期：2014-08-22，
  
  纸质出版日期：2015-02-25
- 稿件说明：
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刘爽, 刘云峰, 董景新. 静电悬浮加速度计轴间耦合误差角的在线测量[J]. 光学精密工程, 2015,23(2): 415-422

LIU Shuang, LIU Yun-feng, DONG Jing-xin. Online measurement of coupled error angle between different axes of electrostatically suspended accelerometer[J]. Editorial Office of Optics and Precision Engineering, 2015,23(2): 415-422
刘爽, 刘云峰, 董景新. 静电悬浮加速度计轴间耦合误差角的在线测量[J]. 光学精密工程, 2015,23(2): 415-422 DOI： 10.3788/OPE.20152302.0415.

LIU Shuang, LIU Yun-feng, DONG Jing-xin. Online measurement of coupled error angle between different axes of electrostatically suspended accelerometer[J]. Editorial Office of Optics and Precision Engineering, 2015,23(2): 415-422 DOI： 10.3788/OPE.20152302.0415.

摘要

静电悬浮加速度计轴间耦合误差角与悬浮质量块的平行度误差有关

而常规方法很难测量其大小和方向

故本文提出了一种变预载轴间耦合误差角在线测量方法。通过分析悬浮质量块平行度误差、耦合误差角、姿态角与静电力耦合的关系

推导了变预载法进行在线耦合误差角精确测量的原理和公式。设计了静电悬浮加速度计原理样机

并利用该样机对提出的测量方法进行了实验验证。实验测得

向对

Y/Z

向耦合误差角分别为-5.10×10

-4

rad和2.36×10

-5

rad

与理论分析相符。该方法同样适用于

向对

X/Z

及

向对

X/Y

的耦合误差角的在线测量。上述结果表明该方法可以有效、精确地完成静电悬浮加速度计不同轴之间耦合误差角的在线测量。

Abstract

The coupled angles between different axes of an Electrostatically Suspended Accelerometer (ESA) are related to the parallelism error of a sensor head

and it is hardly measured accurately by using classical methods. Therefore

a novel online measurement method for the coupling angles was proposed by a varying preload voltage. By modeling the relationship of the parallelism error

coupled angle

attitude angle and the electrostatic force coupled angle

the mechanism and equation of the varying preload voltage method for online measurement of the coupled angles were given. A ESA prototype was designed and then it was used to verify the proposed method. Experiment results show that the coupling angles of

X/Y

and

X/Z

are -5.10×10

-4

rad and 2.36×10

-5

rad

respectively

which are consistent with that of theoretical analysis. The method is also suitable for online measurement of the coupling angles for

Y/X

Y/Z

and

Z/X

Z/Y

. The result shows that this novel varying preload method can online identify the coupled angles of different axes of ESA effectively and accurately.

关键词

Keywords

references

TOUBOUL P. Space Accelerometers:Present Status [M]. Springer, 2001: 273-291.

陶永康,刘云峰,董景新. 电容式高过载微机械加速度计的设计与实验[J].光学精密工程,2014,22(4):918-925.

TAO Y K, LIU Y F, DONG J X. Design and experiment of high-overload capacitive micromachined accelerometers [J]. Opt. Precision Eng.,2014,22(4): 918-925.

李童杰,刘云峰,董景新, 等. 力反馈式微机械加速度计刚度的自适应调整[J].光学精密工程,2010, 18(11):2430-2436.

LI T J, LIU Y F, DONG J X, et al.. Adapting adjustment of stiffness for force feedback micro acce- lerometer [J]. Opt. Precision Eng., 2010, 18(11):2430-2436.

TOUBOUL P, FOULON B, CHRISTOPHE B, et al.. CHAMP, GRACE, GOCE Instruments and Beyond [J]. Geodesy for Planet Earth, 2012,136:215-221.

MUZI D, ALLASIO A. GOCE: the first core Earth explorer of ESA's Earth observation programme [J]. Acta Astronautica, 2004, 54(3):167-175.

CHEN J, WILSON C, FAMIGLIETTI J, et al.. Spatial sensitivity of the Gravity Recovery and Climate Experiment (GRACE) time-variable gravity observations [J]. Journal of Geophysical Research: Solid Earth ,2005,110(B8):1978-2012.

唐富荣, 薛大同. 静电悬浮式三轴加速度传感器的初步设计[J]. 传感器技术, 2001, 20(7): 30-32.

TANG F R, XUE D T. A Preliminary design of an electrostatically suspended triaxial accelerometer [J]. Journal of Transducer Technology. 2001, 20(7): 30- 32.

薛大同. 静电悬浮加速度计的地面重力倾角标定方法[J]. 宇航学报,2011, 32(3): 688-696.

XUE D T. On-ground calibration methods of electrostatically suspended accelerometers with graviry inclination [J]. Journal of Astronautics, 2011, 32(3): 688-696.

ZHOU Z B, LIU L, TU H B, et al.. Seismic noise limit for ground-based performance measurements of an inertial sensor using a torsion balance [J]. Classical and Quantum Gravity, 2010, 27(17): 175012-1-9.

LI G, WU S, ZHOU Z, et al.. Design and validation of a high-voltage levitation circuit for electrostatic accele rometers [J]. Review of Scientific Instruments, 2013, 84(12): 125004.

郑子文,翁雷,陈善勇,等. 高精度六面体垂直度误差测量的一种新方法[J]. 光学技术,2008,34(3): 391-394.

ZHENG Z W, WENG L, CHENG SH Y, et al.. A novel method for perpendicularity measurement of high precision hexahedron [J]. Optical Tech- nique, 2008, 34(3):391-394.

张磊,郭劲. 分体式激光扩束系统平行度测量装置的设计[J]. 光学精密工程, 2012,20(4): 789-795.

ZHANG L, GUO J. Design of parallelism measuring equipment for laser beams from independent laser expanding beam system [J]. Opt. Precision Eng., 2012,20(4): 789-795.

TA Y F, JUN X, LIANG Y, et al.. The effects of non- parallel plates in a differential capacitive microaccelerometer [J]. Journal of Micromechanics and Microengineering, 1999, 9(4): 283-293.

范达. 星载静电悬浮加速度计的设计与地面实验研究[D]. 北京: 清华大学,2013.

FAN D. Design and Ground Experimental Study of a Spaceborne Electrostatic Levitated Accelerometer [D]. Beijing: Tsinghua University, 2013.

FAN D, LIU Y F, HAN F T, et al.. Identification and adjustment of the position and attitude for the electrostatic accelerometer's proof mass [J]. Sensors and Actuators A: Physical, 2012, 187:190-193.

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