聚合物超声压印非成形面熔融缺陷形成机理及抑制

祁娜; 罗怡; 王晓东; 王立鼎

doi:10.3788/OPE.20152302.0452

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聚合物超声压印非成形面熔融缺陷形成机理及抑制

微纳技术与精密机械 | 更新时间：2020-08-13

- 聚合物超声压印非成形面熔融缺陷形成机理及抑制
- Mechanism and avoiding of polymer melting on non-forming surface during ultrasonic embossing
- 光学精密工程 2015年23卷第2期页码：452-458
- 作者机构：
  
  1. 大连理工大学精密与特种加工教育部重点实验室,辽宁大连,116023
  2. 大连理工大学微纳米技术及系统辽宁省重点实验室,辽宁大连,中国,116023
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.50975037)();国家863高技术研究发展计划资助项目(No. 2012AA040406)。()
- DOI：10.3788/OPE.20152302.0452
  中图分类号： TB559;TH706
- 收稿日期：2014-06-09，
  
  修回日期：2014-07-30，
  
  纸质出版日期：2015-02-25
- 稿件说明：
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祁娜, 罗怡, 王晓东等. 聚合物超声压印非成形面熔融缺陷形成机理及抑制[J]. 光学精密工程, 2015,23(2): 452-458

QI Na, LUO Yi, WANG Xiao-dong etc. Mechanism and avoiding of polymer melting on non-forming surface during ultrasonic embossing[J]. Editorial Office of Optics and Precision Engineering, 2015,23(2): 452-458
祁娜, 罗怡, 王晓东等. 聚合物超声压印非成形面熔融缺陷形成机理及抑制[J]. 光学精密工程, 2015,23(2): 452-458 DOI： 10.3788/OPE.20152302.0452.

QI Na, LUO Yi, WANG Xiao-dong etc. Mechanism and avoiding of polymer melting on non-forming surface during ultrasonic embossing[J]. Editorial Office of Optics and Precision Engineering, 2015,23(2): 452-458 DOI： 10.3788/OPE.20152302.0452.

摘要

分析了聚合物超声压印工艺中基片非成形面产生熔融的原因

并提出了相应的抑制方法。基于超声波产热机理指出非成形面熔融现象是由超声工具头-基片界面摩擦引起的

据此提出"摩擦系数差法"来抑制非成形面的熔融现象并通过在聚合物基片非成形面增加表面保护膜(背膜)的手段实现了"摩擦系数差法"。为了对背膜进行优化选择

对比研究了4种背膜条件对聚合物软化时间的影响。提出了超声工具头位移-时间曲线极小值点对应聚合物软化时间的观点

并通过测量超声压印过程中基片-模具界面温度进行了实验验证。实验结果表明

使用Sekisui #622E-50保护膜可缩短聚合物软化时间3.4 s

使用Sekisui #622WB保护膜则可降低软化时间误差0.64 s。实验显示:增加背膜不仅有效地避免了非成形面的熔融现象

同时缩短了超声压印过程中的聚合物软化时间并提高了软化时间重复性。

Abstract

This paper analyzes the reason why the polymer is melted on a non-forming surface during ultrasonic embossing and proposes a method to inhibit the polymer melting. On the basis of the heating mechanism of ultrasonic

it points out that the polymer melting phenomenon on non-forming surface is resulted by the friction in a horn-substrate interface. Then

it proposed the method "two interfaces of different friction coefficients" to inhibit the polymer melting and implemented the method by coatings surface protection films on the non-forming surface. To optimize the protection films

and the influences of the four coating film conditions on the softening time are examined through Taguchi method. The results show that the Sekisui #622E-50 film shortens the softening time by 3.4 s and the Sekisui #622WB film reduces the softening time error by 0.64 s. It demonstrates that surface protection films coated can avoid polymer melting on the non-forming surface

and improve the process replication ability and the process stability in ultrasonic embossing.

关键词

Keywords

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