双质量振动式硅微陀螺理论和实验模态分析

姜劭栋; 苏岩; 施芹; 裘安萍

doi:10.3788/OPE.20152302.0467

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双质量振动式硅微陀螺理论和实验模态分析

微纳技术与精密机械 | 更新时间：2020-08-13

- 双质量振动式硅微陀螺理论和实验模态分析
- Theory and experimental modal analysis of dual-mass vibrating silicon micro-gyroscope
- 光学精密工程 2015年23卷第2期页码：467-476
- 作者机构：
  
  南京理工大学机械工程学院,江苏南京,中国,210094
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2011AA040402)();武器装备预研基金资助项目(No.9140A09011011BQ02)();江苏省科研创新计划
- DOI：10.3788/OPE.20152302.0467
  中图分类号： V666.123;TP273
- 收稿日期：2014-05-20，
  
  修回日期：2014-06-27，
  
  纸质出版日期：2015-02-25
- 稿件说明：
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姜劭栋, 苏岩, 施芹等. 双质量振动式硅微陀螺理论和实验模态分析[J]. 光学精密工程, 2015,23(2): 467-476

JIANG Shao-dong, SU Yan, SHI Qin etc. Theory and experimental modal analysis of dual-mass vibrating silicon micro-gyroscope[J]. Editorial Office of Optics and Precision Engineering, 2015,23(2): 467-476
姜劭栋, 苏岩, 施芹等. 双质量振动式硅微陀螺理论和实验模态分析[J]. 光学精密工程, 2015,23(2): 467-476 DOI： 10.3788/OPE.20152302.0467.

JIANG Shao-dong, SU Yan, SHI Qin etc. Theory and experimental modal analysis of dual-mass vibrating silicon micro-gyroscope[J]. Editorial Office of Optics and Precision Engineering, 2015,23(2): 467-476 DOI： 10.3788/OPE.20152302.0467.

摘要

考虑硅微陀螺的设计和结构优化

研究了陀螺固有频率及模态对其性能的影响。针对本课题组研制的双质量振动式硅微陀螺

利用能量法建立了固有频率的理论公式

对硅微陀螺的低阶模态进行了理论分析

并利用有限元仿真和实验对理论分析结果进行了验证。结果显示:理论分析结果与仿真结果的最大误差为8.6%

与实验结果的最大误差为10.6%。利用Allan方差分析法对陀螺进行了静态性能实验

结果显示其角度随机游走为0.0578(°)/hr

1/2

零偏不稳定性为0.459(°)/hr。与传统的单纯依靠有限元仿真的模态定阶相比

本文建立的理论模型可以省略繁琐的结构参数调整过程

更高效地完成陀螺模态定阶

而且可用于陀螺的结构优化过程。

Abstract

For designing silicon micro-gyroscopes and optimizing their structures

the effects of intrinsic frequency and modal of a silicon micro-gyroscope on its performance were researched. On the basis of energy theorem

a theoretical formula of the intrinsic frequency was established

and the lowest frequency mode of the dual-mass vibrating silicon micro-gyroscope was analyzed. Then the analytical results were validated by the Finite Element Method (FEM) simulation and the experiment. Analysis results show that the largest analytical errors with respect to simulation and experiment are 8.6% and 10.6%

respectively. Moreover

the Allan Variance analysis was used to conduct a static performance experiment

and the results demonstrate that the Angle Random Walk (ARW) is 0.057 8(°)/hr

1/2

and the measured bias instability is 0.459(°)/hr. As compared with the traditional modal ordering method depending on the FEM

the proposed theoretical model avoids complex structure parameter adjustment processing

complements modal ordering of the silicon micro-gyroscope and can be used in the structure optimization of the silicon micro-gyroscope.

关键词

Keywords

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