箝位体刚度平衡对被动箝位压电驱动器性能的影响

郭文峰; 曲建俊; 曲华杰; 汪骏雄

doi:10.3788/OPE.20152303.0738

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箝位体刚度平衡对被动箝位压电驱动器性能的影响

微纳技术与精密机械 | 更新时间：2020-08-13

- 箝位体刚度平衡对被动箝位压电驱动器性能的影响
- Influences of balanced stiffness of clamping body on performance of inverse piezoelectric inchworm motor
- 光学精密工程 2015年23卷第3期页码：738-744
- 作者机构：
  
  哈尔滨工业大学机电工程学院,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.50975057,No.51175104)()
- DOI：10.3788/OPE.20152303.0738
  中图分类号： TN384;TH703
- 收稿日期：2014-06-29，
  
  修回日期：2014-08-26，
  
  纸质出版日期：2015-03-25
- 稿件说明：
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郭文峰, 曲建俊, 曲华杰等. 箝位体刚度平衡对被动箝位压电驱动器性能的影响[J]. 光学精密工程, 2015,23(3): 738-744

GUO Wen-feng, QU Jian-jun, QU Hua-jie etc. Influences of balanced stiffness of clamping body on performance of inverse piezoelectric inchworm motor[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 738-744
郭文峰, 曲建俊, 曲华杰等. 箝位体刚度平衡对被动箝位压电驱动器性能的影响[J]. 光学精密工程, 2015,23(3): 738-744 DOI： 10.3788/OPE.20152303.0738.

GUO Wen-feng, QU Jian-jun, QU Hua-jie etc. Influences of balanced stiffness of clamping body on performance of inverse piezoelectric inchworm motor[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 738-744 DOI： 10.3788/OPE.20152303.0738.

摘要

基于前期研制的被动箝位直线压电驱动器

研究了带有三角放大结构的箝位体的刚度平衡对其有效输出位移和驱动器性能的影响。实验和有限元仿真分析显示:刚度不平衡时

箝位体结构产生的偏转位移会导致三角放大结构水平输出位移降低

箝位体对导轨放松程度较小

驱动器性能较低。文中提出用增加刚度平衡板的方法使箝位压电叠堆两侧等效拉伸刚度相等

并利用有限元仿真确定了刚度平衡板尺寸。实施上述方法后的实验结果表明:增加刚度平衡板后

箝位体水平运动位移增加

从而提高了箝位体动态响应频率和箝位体对导轨的释放程度

显著提高了驱动器性能。刚度平衡后

驱动器动态响应频率为450 Hz

最大驱动力为7 N

最大空载运行速度为1.49 mm/s。

Abstract

Based on an inverse piezoelectric inchworm motor researched and manufactured before

the influence of balanced stiffness of a clamping body with triangulation amplification on its output displacement and the performance of motor was researched. The research results show that rotary displacement is resulted by non-balanced stiffness of the clamping body and the horizontal displacement is reduced also. Then because the rotary displacement and the performance of the inchworm motor are lower

the extent of releasing guide is reduced. For overcomming this problems

a method to balance the equivalent extent stiffness in two sides of a piezoelectric stack was proposed by adding a piece of metal board

and the dimension of the board was calculated by Finite Element Method (FEM). After adding a metal board

it demonstrates that the horizontal displacement and response frequency of the clamping body are increased and the guide is approximate to be fully released. The performance of the inchworm motor is advanced dramatically. After balancing the stiffness

the response frequency is 450 Hz

the highest driving force is 7 N and the highest velocity is 1.49 mm/s.

关键词

Keywords

references

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