大型衍射光栅刻划机拉杆结构的分析与改进

糜小涛; 于宏柱; 于海利; 姚雪峰; 宋楠; 冯树龙; 齐向东

doi:10.3788/OPE.20152303.0745

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大型衍射光栅刻划机拉杆结构的分析与改进

微纳技术与精密机械 | 更新时间：2020-08-13

- 大型衍射光栅刻划机拉杆结构的分析与改进
- Analysis and improvement of rod structures for large diffraction grating ruling engines
- 光学精密工程 2015年23卷第3期页码：745-752
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  国家重大科研装备研制项目(No.ZBY2008-1)();国家重大科学仪器设备开发专项资助项目(No.11YQ120023)();吉林省重大科技攻关项目(No.09ZD
- DOI：10.3788/OPE.20152303.0745
  中图分类号： TN305.7
- 收稿日期：2014-01-12，
  
  修回日期：2014-02-20，
  
  纸质出版日期：2015-03-25
- 稿件说明：
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糜小涛, 于宏柱, 于海利等. 大型衍射光栅刻划机拉杆结构的分析与改进[J]. 光学精密工程, 2015,23(3): 745-752

MI Xiao-tao, YU Hong-zhu, YU Hai-li etc. Analysis and improvement of rod structures for large diffraction grating ruling engines[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 745-752
糜小涛, 于宏柱, 于海利等. 大型衍射光栅刻划机拉杆结构的分析与改进[J]. 光学精密工程, 2015,23(3): 745-752 DOI： 10.3788/OPE.20152303.0745.

MI Xiao-tao, YU Hong-zhu, YU Hai-li etc. Analysis and improvement of rod structures for large diffraction grating ruling engines[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 745-752 DOI： 10.3788/OPE.20152303.0745.

摘要

由于大型衍射光栅刻划机刻划系统的双拉杆结构不能使其满足精度指标要求

本文设计了一套单拉杆结构。讨论了石英导轨分度方向弯曲误差产生的原因及其减小该误差的方法

分析和比较了两种拉杆结构的鞍型滑块的受力情况。基于材料力学弯曲变形理论

建立了石英导轨分度方向弯曲误差模型。在该模型的基础上仿真了双、单拉杆结构下刻划系统的石英导轨在分度方向上的弯曲变形误差。最后

使用双频激光干涉仪对石英导轨上的两个特征测量点进行了测量。测量结果显示:改进后的拉杆结构使得石英导轨在两特征测量点处的位移误差由50.36 nm降低到小于10 nm

满足大型衍射光栅刻划机刻划系统在分度方向上5~10 nm的精度指标要求。

Abstract

As the double-rod structure in ruling system of a large diffraction grating ruling machine can not meet its accuracy requirement

this paper designs a single-rod structure to substitute it. The reasons of bending error of indexing direction of quarts guide rail in the grating ruling machine were discussed and the method to reduce the error was analyzed. Meanwhile the rod structure and the stress on a saddle slider were analyzed. Then

based on the theory of bending deformation of material mechanics

the model of bending error in indexing direction of quartz guide rail was established. On the basis of this model

the bending errors of quartz guide rails on the double-rod structure and the single-rod structure were simulated. Finally

a frequency laser interferometer was used to measure the two feature points on quartz guide rail. Experimental results indicate that the bendings at the measuring points of quartz guide rail are reduced from 50.36 nm to less than 10 nm by using the single-rod struture. It concludes that the single-rod structure basically meets the requirement of large diffraction grating ruling engine for the measuring precision of 5—10 nm.

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references

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