平面电极型MEMS电化学地震传感器

王军波; 龚黎明; 陈德勇; 何文涛; 王鹏; 陈健

doi:10.3788/OPE.20152303.0769

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平面电极型MEMS电化学地震传感器

微纳技术与精密机械 | 更新时间：2020-08-13

- 平面电极型MEMS电化学地震传感器
- MEMS based electrochemical seismic sensors with planar electrodes
- 光学精密工程 2015年23卷第3期页码：769-775
- 作者机构：
  
  中国科学院电子学研究所传感技术国家重点实验室北京,100190
- 作者简介：
- 基金信息：
  
  国家重大科学仪器设备开发专项资助项目(No.2013YQ12035703)();国家863高技术研究发展计划资助项目(No.2014AA091508)()
- DOI：10.3788/OPE.20152303.0769
  中图分类号： P315.62;TP212.9
- 收稿日期：2014-05-20，
  
  修回日期：2014-07-06，
  
  纸质出版日期：2015-03-25
- 稿件说明：
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王军波, 龚黎明, 陈德勇等. 平面电极型MEMS电化学地震传感器[J]. 光学精密工程, 2015,23(3): 769-775

WANG Jun-bo, GONG Li-ming, CHEN De-yong etc. MEMS based electrochemical seismic sensors with planar electrodes[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 769-775
王军波, 龚黎明, 陈德勇等. 平面电极型MEMS电化学地震传感器[J]. 光学精密工程, 2015,23(3): 769-775 DOI： 10.3788/OPE.20152303.0769.

WANG Jun-bo, GONG Li-ming, CHEN De-yong etc. MEMS based electrochemical seismic sensors with planar electrodes[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 769-775 DOI： 10.3788/OPE.20152303.0769.

摘要

针对传统电化学地震传感器的加工工艺成本高、一致性差等问题

设计了一种新的平面电极型微机电系统(MEMS)电化学地震传感器结构。建立了平面电极型MEMS电化学地震传感器的计算模型

通过Comsol多场耦合数值模拟分析方法

对影响传感器的结构参数如:电极宽度、电极间距、流道高度等进行了计算和优化。采用MEMS表面工艺和准LIGA工艺

制备了平面电极型MEMS电化学地震传感器。最后

与采用传统方法精密加工的MET2003器件进行了频率响应和微震动的对比测试。实验结果表明:与MET2003器件相比

平面电极型MEMS电化学地震传感器的带宽从1 Hz扩展到了30 Hz

两种器件的采集结果具有很好的相关性和一致性

Abstract

For higher fabrication costs and poor consistency of electrochemical seismic sensors

a new structure for an electrochemical seismic sensor with planar electrodes based on Micro-electric-mechanical System (MEMS) was presented. A 2D calculation model for the seismic sensor designed was built. The key structure parameters

such as the widths of electrodes

the space between electrodes and the height of the channel which might affect the performance of the seismic sensor

were calculated and optimized by the multi-field coupling numerical simulation method with Comsol software. Through the MEMS surface processes and quasi-LIGA (Lithographie Galvanoformung Abformung) process

the MEMS based electrochemical seismic sensor with planar electrodes was fabricated and packaged. Finally

the characteristic experiments of the frequency response and the tiny-vibration testing for the sensor designed and the traditional seismic sensor based on precise-machining (MET 2003) were carried out. The experiments show that the frequency bandwidth of the sensor designed is expanded from 1 Hz to 30 Hz as compared with that of the MET 2003 and the consistency between the sensor designed and MET 2003 is achieved to 0.887. The noise level is less than 120 dB at 1 Hz.

关键词

Keywords

references

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KOZLOV V A, SAFONOV M V. Dynamic characteristic of an electrochemical cell with gauze electrodes in convective diffusion conditions [J]. Russian Journal of Electrochemistry, 2004, 40(4):460-462.

SUN Z Y, AGAFONOV V M. 3D numerical simulation of the pressure-driven flow in a four-electrode rectangular micro-electrochemical accelerometer [J]. Sensors and Actuators B:Chemical, 2010, 146(1):231-238.

SUN Z Y, AGAFONOV V M. Computational study of the pressure-driven flow in a four-electrode rectangular micro-electrochemical accelerometer with an infinite aspect ratio [J]. Electrochemical Acta, 2010, 55(6):2036-2043.

DENG T, CHEN D Y, WANG J B, et al.. A MEMS based electrochemical vibration sensor for seismic motion monitoring [J]. Journal of Microelectromechanical Systems, 2014, 23(1):92-99.

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