光强正交调制型位移传感器的数学模型与误差分析

付敏; 彭东林; 朱革; 陈锡侯; 昌驰

doi:10.3788/OPE.20152303.0784

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光强正交调制型位移传感器的数学模型与误差分析

微纳技术与精密机械 | 更新时间：2020-08-13

- 光强正交调制型位移传感器的数学模型与误差分析
- Mathematical model and error analysis of light intensity orthogonal modulation type displacement sensor
- 光学精密工程 2015年23卷第3期页码：784-793
- 作者机构：
  
  1. 重庆大学机械传动国家重点实验室重庆,400044
  2. 重庆理工大学机械检测技术与装备教育部工程中心重庆,400054
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51127001)();国家863高技术研究发展计划资助项目(No.2012AA041202)();重庆市“两江学者”计划专项资助项目()
- DOI：10.3788/OPE.20152303.0784
  中图分类号： TP212.14
- 收稿日期：2014-07-14，
  
  修回日期：2014-09-04，
  
  纸质出版日期：2015-03-25
- 稿件说明：
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付敏, 彭东林, 朱革等. 光强正交调制型位移传感器的数学模型与误差分析[J]. 光学精密工程, 2015,23(3): 784-793

FU Min, PENG Dong-lin, ZHU Ge etc. Mathematical model and error analysis of light intensity orthogonal modulation type displacement sensor[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 784-793
付敏, 彭东林, 朱革等. 光强正交调制型位移传感器的数学模型与误差分析[J]. 光学精密工程, 2015,23(3): 784-793 DOI： 10.3788/OPE.20152303.0784.

FU Min, PENG Dong-lin, ZHU Ge etc. Mathematical model and error analysis of light intensity orthogonal modulation type displacement sensor[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 784-793 DOI： 10.3788/OPE.20152303.0784.

摘要

针对传统光学位移测量方法对环境要求高和制造精度难以提高等问题

提出了一种以交变光场为测量媒介的新型线性位移检测方法。基于提出的方法

设计了一种光强正交调制型位移传感器。该方法采用基于光强正交变化的两路电驻波合成电行波信号

通过对行波信号时间先后的测量实现空间位移的测量。为了深入理解传感器的传感机理

推导了传感器的测量模型

分析了与传感机理相关的关键因素对测量误差的影响。根据测量原理和测量模型的理论分析

研制出传感器原理样机

通过实验测试了各种关键因素对测量误差的影响

并进一步优化设计了传感器结构与参数。实验显示

优化后的传感器在108 mm测量范围内的测量精度达到±0.5 μm

是一种新的无需精细刻划的位移检测方案。

Abstract

Traditional measurement methods for optical displacement have higher demands for the environment and it is difficult to improve the manufacturing precision of measuring devices. Therefore

a novel linear displacement measurement method was proposed by using the alternating light field as measuring medium. On the basis of the method

a light Intensity orthogonal modulation type displacement sensor was designed. The method combined two electrical standing waves with orthogonal changes into the electrical traveling wave signals

then

it measured the time sequence of traveling waves to achieve the spatial displacement measurement. In order to explore the sensing mechanism of the sensor

the actual measurement model of the sensor was derived

and the influence of key factors associated with the sensing mechanism on the measurement error was analyzed in detail. According to the analysis of the measuring principle and model theory

a sensor prototype was developed and various critical factors effecting on measurement error levels were tested. Then

sensor structures and parameters were optimized. The experimental results show that measuring errors of the optimized sensor are controlled within ± 0.5 μm in the measuring range of 108 mm

which demonstrates that proposed method is a new displacement detection solution without demands for precise photolithographic processing.

关键词

Keywords

references

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