菱形压电微位移放大机构的设计

黄卫清; 史小庆; 王寅

doi:10.3788/OPE.20152303.0803

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菱形压电微位移放大机构的设计

微纳技术与精密机械 | 更新时间：2020-08-13

- 菱形压电微位移放大机构的设计
- Design of diamond piezoelectric micro displacement amplification mechanism
- 光学精密工程 2015年23卷第3期页码：803-809
- 作者机构：
  
  南京航空航天大学机械结构力学及控制国家重点实验室,江苏南京,210016
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51375224)()
- DOI：10.3788/OPE.20152303.0803
  中图分类号： TN384;TH112.5
- 收稿日期：2014-07-09，
  
  修回日期：2014-09-05，
  
  纸质出版日期：2015-03-25
- 稿件说明：
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黄卫清, 史小庆, 王寅. 菱形压电微位移放大机构的设计[J]. 光学精密工程, 2015,23(3): 803-809

HUANG Wei-qing, SHI Xiao-qing, WANG Yin. Design of diamond piezoelectric micro displacement amplification mechanism[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 803-809
黄卫清, 史小庆, 王寅. 菱形压电微位移放大机构的设计[J]. 光学精密工程, 2015,23(3): 803-809 DOI： 10.3788/OPE.20152303.0803.

HUANG Wei-qing, SHI Xiao-qing, WANG Yin. Design of diamond piezoelectric micro displacement amplification mechanism[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 803-809 DOI： 10.3788/OPE.20152303.0803.

摘要

为提高叠层压电陶瓷作动行程

并使之具有往复对称作动的特性

提出一种基于三角放大原理的菱形压电微位移放大机构。该机构以叠层压电陶瓷作为驱动元件

利用三角位移放大原理

在放大叠层压电陶瓷位移输出的同时

实现在平衡位置两侧的双向主动输出。提出了相应的驱动方法

实现了对该机构输出方向和大小的控制。分析了机构的工作原理

通过解析计算得到该机构的理论放大倍数为2.9

与所建立有限元模型通过仿真计算得到放大倍数2.5相近。制作了试验样机并进行了试验验证

结果显示:该机构在驱动电压为200 V时最大输出位移为(32±16) μm

对叠层压电陶瓷位移输出的放大比例为2.4倍

与理论计算相近;频率响应试验表明信号频率对位移输出影响较小。提出的设计方案实现了位移放大和位移双向主动输出这两个预期目标。

Abstract

To improve the actuator stroke of laminated piezoelectric ceramic and to let it be with the ability of reciprocating symmetrical actuation

a diamond piezoelectric micro displacement amplification mechanism was proposed based on the triangle amplification principle. The laminated piezoelectric ceramic was taken as a driving element of the mechanism. On the basis of the triangle displacement amplification principle

a two-way active output on both sides of the equilibrium position was achieved while amplifying the output displacement of the laminated piezoelectric ceramics. A corresponding driving method was proposed to achieve the control of direction and magnitude of the output. The working principle of the mechanism was analyzed

and the geometric calculation results show that the magnification is 2.9

which is close to the simulation calculation magnification result 2.5 based on finite element model. A test prototype was developed to test the performance of the mechanism. The experimental results indicate that the maximum output displacement of the mechanism is 32 microns (±16 microns) when the driving voltage is 200 V and its amplification is 2.4 for the displacement of the laminated piezoelectric ceramic

which is close to the theoretical calculation. The experiment also shows that the signal frequency has a minor effect on the displacement output. The mechanism achieves both of the displacement amplifications and two-way movement outputs as desired.

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references

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